G01B5/046

CONTROL SYSTEM, AND CONTROL METHOD AND PROGRAM FOR CONTROL SYSTEM
20180120087 · 2018-05-03 · ·

A PLC system includes a displacement sensor, drives, and a PLC. In the PLC system, the trace control unit calculates a target position at which a distance between the displacement sensor and the object is constant based on measurement information (1D information) from which measurement noise (noise information) has been removed by the filter and positional information from the drives.