G01B9/02002

MEASURING APPARATUS FOR MEASURING VIBRATION OR DISPLACEMENT AND METHOD FOR MEASURING VIBRATION OR DISPLACEMENT
20170254697 · 2017-09-07 · ·

A measuring apparatus for contactlessly measuring vibration or displacement of a measurement target includes a light source configured to emit a continuous wave of light frequency-modulated to arrange a measurement site of the measurement target within a correlation peak, a divider configured to divide the continuous wave of light into first and second divided-waves of light, a light receiver configured to receive interfering light of the first divided-wave of light reflected by the measurement target and the second divided-wave of light, and a calculator configured to calculate the vibration or displacement of the measurement target using an electric signal output from the light receiver.

All-optical ultrasonic detection device based on light-induced ultrasound and laser interference
11209259 · 2021-12-28 · ·

An all-optical ultrasonic detection device based on light-induced ultrasound and laser interference. In the device, a first laser is connected to an optical switch, the optical switch is connected to a dielectric film and a second laser generates a reference laser beam and a plurality of detection laser beams. The reference laser beam generates a first frequency-shifted reference laser beam and a plurality of second frequency-shifted reference laser beams. The first frequency-shifted reference laser beam generates a carrier signal. The detection laser beams are reflected by the dielectric film and then interfere with the second frequency-shifted reference laser beams. The interference light passes through a fourth fiber coupler and reaches a second photodiode to generate a frequency-modulated signal. The frequency-modulated signal and the carrier signal are input to a frequency mixer to generate a mixed signal. An acquisition unit is configured to obtain a vibration signal for the to-be-detected object.

APPARATUS, SYSTEMS, AND METHODS FOR DETECTING LIGHT
20210372767 · 2021-12-02 ·

Described herein are an apparatus, system, and method for detecting light. An apparatus can include means for modulating an input beam of light wherein the input beam of light is obtained from an optical coherence tomography arrangement; means for dispersing the modulated beam of light; and means for detecting the dispersed beam of light and converting the detected beam of light into an electrical output signal. An apparatus can include a modulator configured to spatially modulate light; a dispersing element configured to disperse modulated light, and a detector configured to detect dispersed light and convert the detected light into electrical output signals. A method can include spatially modulating a beam of light, dispersing the modulated beam of light, detecting the dispersed beam of light, converting the detecting beam of light into electrical output signals, and providing a three-dimensional image of at least a part of an object.

INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS

An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.

INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS

An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.

Laser interferometer
11733027 · 2023-08-22 · ·

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.

Laser interferometer
11733027 · 2023-08-22 · ·

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.

Method and system for determining the separation distance between a body and the surface of an object by means of low coherence optical interferometry techniques under distortion due to sub-sampling

Method and system for determining separation distance between an object and a processing or measuring tool involve generating a measurement beam of low coherence optical radiation, leading the measurement beam towards the object and the reflected measurement beam towards an optical interferometric sensor assembly in a first direction of incidence, generating a reference beam of low coherence optical radiation, and leading the reference beam towards the optical interferometric sensor assembly in a second direction of incidence, superimposing the measurement and reference beams on a common region of incidence, detecting position of a pattern of interference fringes between the measurement and reference beams on the region of incidence, and determining difference in optical length between a measurement optical path and a reference optical path on position of the pattern of interference fringes along an illumination axis to determine current separation distance between the processing or measuring tool and the object.

Method and system for determining the separation distance between a body and the surface of an object by means of low coherence optical interferometry techniques under distortion due to sub-sampling

Method and system for determining separation distance between an object and a processing or measuring tool involve generating a measurement beam of low coherence optical radiation, leading the measurement beam towards the object and the reflected measurement beam towards an optical interferometric sensor assembly in a first direction of incidence, generating a reference beam of low coherence optical radiation, and leading the reference beam towards the optical interferometric sensor assembly in a second direction of incidence, superimposing the measurement and reference beams on a common region of incidence, detecting position of a pattern of interference fringes between the measurement and reference beams on the region of incidence, and determining difference in optical length between a measurement optical path and a reference optical path on position of the pattern of interference fringes along an illumination axis to determine current separation distance between the processing or measuring tool and the object.

Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus

An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.