Methods and systems for stabilized directional couplers are disclosed and may include a system comprising first and second directional couplers formed by first and second waveguides, where one of the waveguides may comprise a length extender between the directional couplers. The directional couplers may be formed by reduced spacing between the waveguides on opposite sides of the length extender. An input optical signal may be communicated into one of the waveguides, where at least a portion of the input optical signal may be coupled between the waveguides in the first directional coupler and at least a portion of the coupled optical signal may be coupled between the waveguides in the second directional coupler. Optical signals may be communicated out of the system with magnitudes at a desired percentage of the input optical signal. The length extender may add phase delay for signals in one of the first and second waveguides.

Systems, apparatus and methods that modulate the phase inside the imaging system pupil aperture with a segmented deformable mirror, spatial light modulator (SLM), or liquid deformable lens (LDL) to produce minor perturbations in the point spread function (PSF) and create un-correlated speckle patterns between B-scans.

An optical coherence tomography (OCT) engine includes a digital Fourier-Transform (dFT) spectrometer, a tunable delay line, and a high-speed optical phased array (OPA) scanner integrated onto a single chip. The broadband dFT spectrometer offers superior signal-to-noise ratio (SNR) and fine axial resolution; the tunable delay line ensures large imaging depth by circumventing sensitivity roll-off; and the OPA can scan the beams at GHz rates without moving parts. Unlike conventional spectrometers, the dFT spectrometer employs an optical switch network to retrieve spectral information in an exponentially scaling fashion—its performance doubles with every new optical switch added to the network. Moreover, it also benefits from the Fellgett's advantage, which provide a significant SNR edge over conventional spectrometers. The tunable delay line balances the path length difference between the reference and sample arms, avoiding any need to sample high-frequency spectral fringes.

Scatterometry overlay (SCOL) measurement methods, systems and targets are provided to enable efficient SCOL metrology with in-die targets. Methods comprise generating a signal matrix by: illuminating a SCOL target at multiple values of at least one illumination parameter, and at multiple spot locations on the target, wherein the illumination is at a NA (numerical aperture) >⅓ yielding a spot diameter <1μ, measuring interference signals of zeroth and first diffraction orders, and constructing the signal matrix from the measured signals with respect to the illumination parameters and the spot locations on the target; and deriving a target overlay by analyzing the signal matrix. The SCOL targets may be reduced to be a tenth in size with respect to prior art targets, as less and smaller target cells are required, and be easily set in-die to improve the accuracy and fidelity of the metrology measurements.

A distance measuring arrangement for determining a distance from an object includes at least one light source for producing at least one first monochromatic and interference-capable light beam with a first wavelength and at least one second monochromatic and interference-capable light beam with a second wavelength, a multiplexer for coupling or combining the at least one first light beam and the at least one second light beam into a common measurement beam, an output coupling element for splitting the measurement beam into a reference beam and a signal beam, wherein the reference beam propagates along a reference path and wherein the signal beam propagates along a signal path, and a phase modulator that is arranged in the signal path and configured to modulate the phase of the signal beam periodically in time.

A method for defect inspection of a transparent substrate comprises (a) providing an optical system for performing a diffraction process of object wave passing through a transparent substrate, (b) interfering and wavefront recording for the diffracted object wave and a reference wave to reconstruct the defect complex images (including amplitude and phase) of the transparent substrate, (c) characteristics analyzing, features classifying and sieving for the defect complex images of the transparent substrate, and (d) creating defect complex images database based-on the defect complex images for comparison and detection of the defect complex images of the transparent substrate.

An illumination apparatus generates an interference fringe. An input arm receives an input light beam from a light source. A splitter splits the input light beam that has passed through the input arm into a first output arm and a second output arm. A phase modulator changes a phase difference between the output light beams of the first output arm and the second output arm. A phase detector detects the phase difference between output light beams respectively output from the first output arm and the second output arm based on a return light beam generated by combining a first reflected light beam and a second reflected light beam respectively reflected by ends of the first output arm and the second output arm.

A method including: scanning a sample over a period of time using an electro-magnetic radiation source, the period of time including a first time period and a second time period, a sample portion of the electro-magnetic radiation source being directed to the sample in a sample arm of an optical interferometric system, and a reference portion of the electro-magnetic radiation source being directed to a reference arm of the optical interferometric system; applying, using a phase modulator, a phase shift comprising a first phase shift and a second phase shift to at least one of the reference portion or the sample portion of the electro-magnetic radiation source, the first phase shift being applied during the first time period and the second phase shift being applied during the second time period, the second phase shift having a difference of 90 degrees from the first phase shift; acquiring in-phase data based on a first interference between first backscattered electro-magnetic radiation during the first time period and the at least one of the reference portion or the sample portion subjected to the first phase shift; acquiring quadrature data based on a second interference between second backscattered electro-magnetic radiation during the second time period and the at least one of the reference portion or the sample portion subjected to the second phase shift; and determining a complex interference signal based on the in-phase data and the quadrature data.

An interferometer system comprises a sample interferometer arm for guiding a first wave to a sample, and receiving a reflected wave from the sample and a phase amplifier for amplifying a phase shift of the reflected wave, to provide phase-shift-amplified intermediate wave. The interferometer system can also comprise an additional interferometer arm for guiding an additional wave to combine with the intermediate wave, to provide an output wave, and a detector for detecting the output wave.

A control device assumes that observation light observed by an imaging device is composite light of primary reflection light and secondary reflection light. The control device acquires three or more samples of a brightness amplitude value of the observation light, calculates a phase error caused by the secondary reflection light using these samples, calculates a corrected phase value by correcting a phase value of the observation light using the phase error, and calculates a three-dimensional position of the measurement point on the measurement object based on the corrected phase value.