The present document relates to a scanning probe microscopy system and method for mapping nanostructures on the surface of a sample. The system comprises a sample support structure, a scan head including a probe comprising a cantilever and a probe tip, and an actuator for scanning the probe tip relative to the sample surface. The system also includes an optical source, and a sensor unit for obtaining a sensor signal indicative of a position of the probe tip. The sensor unit includes a partially reflecting element for reflecting a reference fraction and for transmitting a sensing fraction of the optical signal. It further includes directional optics for directing the sensing fraction as an optical beam towards the probe tip, and for receiving a reflected fraction thereof to provide a sensed signal. Moreover the sensor includes an interferometer for providing one or more output signals, and signal conveyance optics for conveying the sensed signal and the reference signal to the interferometer. The directional optics is configured for directing the sensing fraction such that at least a part of the sensing fraction is reflected by the probe tip such as to form the reflected fraction.

Systems and methods are provided for inspection. One embodiment is a method for measuring a hole. The method includes driving a fiber optic probe into the hole, determining a profile by scanning the hole via the fiber optic probe, and determining whether an interface gap exists at the hole based on the profile.

An optical fiber ring interferometer is provided, which is based on a common light path for two or more light beam pairs preferably originated from two or more light sources of a substantially different spectrum or from a single light source split spectrum and whereas each light beam of a specific pair is propagating in relative opposite directions, wherein at least one pair of light beams is utilized to detect acousto-mechanical events and to provide information regarding location and other characteristics of detected environmental disturbance.

Provided is an optical measurement device configured so that a high-accuracy three-dimensional image can be obtained. An emission angle of a ray of light is changed in such a manner that the rotation frequencies of two motors configured to rotatably drive a first optical path changing unit and a second optical path changing unit is controlled. The ray of light is emitted to a front three-dimensional region, and reflected light is obtained. Then, calculation is made by a computer, and in this manner, three-dimensional data on a measurement target object is obtained. The amount (vibration amount) of axial backlash or play of a rotary mechanism, such as a motor shaft, along which the ray of light is emitted is measured in real time, and such a backlash or play amount is subtracted from a three-dimensional image obtained by the computer. Consequently, a high-accuracy three-dimensional image is obtained.

An optical fiber ring interferometer is provided, which is based on a common light path for two or more light beam pairs preferably originated from two or more light sources of a substantially different spectrum or from a single light source split spectrum and whereas each light beam of a specific pair is propagating in relative opposite directions, wherein at least one pair of light beams is utilized to detect acousto-mechanical events and to provide information regarding location and other characteristics of detected environmental disturbance.

An optical fiber ring interferometer is provided, which is based on a common light path for two or more light beam pairs preferably originated from two or more light sources of a substantially different spectrum or from a single light source split spectrum and whereas each light beam of a specific pair is propagating in relative opposite directions, wherein at least one pair of light beams is utilized to detect acousto-mechanical events and to provide information regarding location and other characteristics of detected environmental disturbance.

An airway adapter includes a housing and a pressure transducer. The housing includes a flow path having a first end and a second end, a first pressure port that communicates with the flow path, and a second pressure port that communicates with the flow path. The first pressure port is spaced apart from the second pressure port. The flow restriction is disposed in the flow path between the first and second pressure ports that creates a pressure differential therebetween. The pressure transducer generates a signal that reflects the differential pressure created by the flow restriction between the first and second pressure ports, wherein the pressure transducer includes an optical interferometer.

Provided is a common-path optical fiber-based handheld parallel optical coherence tomography (OCT) apparatus, including a probe configured to receive the light from a broadband light source and illuminate a measurement target, wherein the probe may include an inner space through which the light passes, a collimator configured to collimate the light incident to the inner space, a diffraction grating configured to diffract the light having passed through the collimator, a galvanometer scanner configured to reflect the light having passed through the diffraction grating, an objective lens configured to concentrate the reflected light on a focal point, and an interferer configured to acquire an interfered light by reflecting at least a portion of the light having passed through the objective lens.

Provided is an optical measurement device configured so that a high-accuracy three-dimensional image can be obtained. An emission angle of a ray of light is changed in such a manner that the rotation frequencies of two motors configured to rotatably drive a first optical path changing unit and a second optical path changing unit is controlled. The ray of light is emitted to a front three-dimensional region, and reflected light is obtained. Then, calculation is made by a computer, and in this manner, three-dimensional data on a measurement target object is obtained. The amount (vibration amount) of axial backlash or play of a rotary mechanism, such as a motor shaft, along which the ray of light is emitted is measured in real time, and such a backlash or play amount is subtracted from a three-dimensional image obtained by the computer. Consequently, a high-accuracy three-dimensional image is obtained.

Provided is a common-path optical fiber-based handheld parallel optical coherence tomography (OCT) apparatus