G01B9/02029

Optical probe and method of operating the optical probe
10932668 · 2021-03-02 · ·

An optical probe (2) for optically examining an object (1) is described, said optical probe having a first optical beam path for a scanning imaging method and a second optical beam path for a spectroscopic method. The optical probe comprises a first optical fibre (9) in the first optical beam path and a scanning apparatus (10) that is configured to laterally deflect the first optical fibre (9) or illumination light (31) emerging from the first optical fibre (9) for the purposes of scanning the object (1) during the scanning imaging method. The optical probe comprises a second optical fibre (11) in the second optical beam path, said second optical fibre being configured to guide excitation light or detected object light for the spectroscopic method, and a beam splitter filter (15), wherein the beam path of the scanning imaging method and the beam path of the spectroscopic method are brought into partial overlap in the probe (2) by means of the beam splitter filter (15). The optical probe (2) has a diameter of no more than 5 mm. Furthermore, a method for operating the optical probe (2) is specified.

LENS REFRACTIVE INDEX DETECTION DEVICE AND METHOD

A lens refractive index detection device is disclosed which has a light source module, a lens center physical thickness detection module and a lens center optical thickness detection module. The light source module includes a first light source component and a second light source component for outputting a collimated light beam, a first light combining component, and a focusing component. The lens center physical thickness detection module includes a first imaging component and a second imaging component. The lens center optical thickness detection module includes a first photodetection component and a second photodetection component, a beam splitting component, a partial reflection mirror, and a movable reflection mirror. The lens refractive index detection device enables simple operation, fast and non-destructive on-line detection, and is also applicable to lenses with irregular surfaces, such as aspherical lenses, cylindrical lenses, and finished lenses. A lens refractive index detection method is also provided.

Position measurement system, zeroing method, lithographic apparatus and device manufacturing method
10883816 · 2021-01-05 · ·

A position measurement system configured to measure a position of an object, the system including: a displacement interferometer having a first capture range; a time-of-flight sensor having a second capture range that is larger than the first capture range and having an inaccuracy that is smaller than the first capture range; and a processing unit, wherein the position measurement system has a zeroing mode in which the processing unit is configured to determine a coarse position of the object within the second capture range based on an output from the time-of-flight sensor, and in which the processing unit is configured to determine a fine position of the object based on the determined coarse position and an output from the displacement interferometer.

Infrared-Optical Hybrid Imaging Technology for All-Digital Histopathology
20200217643 · 2020-07-09 ·

Methods and apparatus are provided for imaging a response of a sample to radiative heating. A method in accordance with one embodiment has steps of: illuminating a first area of the sample with a radiative heating beam; illuminating a portion of the first area with a probe beam; collecting light exiting the sample due to interaction of the probe beam with the sample; superimposing the light exiting the sample with a reference beam derived from the probe beam, wherein the reference is characterized by an optical phase relative to the probe beam; detecting a spatial portion of the light exiting the sample and the reference beam with at least one detector to generate an interference signal; and processing the interference signal to obtain an image of the sample associated with absorption of the radiative heating beam.

POSITION MEASUREMENT SYSTEM, ZEROING METHOD, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
20200191552 · 2020-06-18 · ·

A position measurement system configured to measure a position of an object, the system including: a displacement interferometer having a first capture range; a time-of-flight sensor having a second capture range that is larger than the first capture range and having an inaccuracy that is smaller than the first capture range; and a processing unit, wherein the position measurement system has a zeroing mode in which the processing unit is configured to determine a coarse position of the object within the second capture range based on an output from the time-of-flight sensor, and in which the processing unit is configured to determine a fine position of the object based on the determined coarse position and an output from the displacement interferometer.

Laser interferometer system for measuring six degrees of freedom with respect to a linear axis

A laser interferometer system includes a beam splitter to split a laser beam into first and second beam sets, a first retroreflector mounted to an object to reflect the first beam set, a first detecting device for detecting movements of the object in x-, y- and z-axis directions based on the reflected first beam set, a second retroreflector mounted to the object to reflect the second beam set, and a second detecting device for detecting rotations and movements of the object with respect to the y- and z-axis directions based on the reflected second beam set. The movements of the object in the z-axis direction obtained by the first and second detecting devices are used to obtain a rotation of the object with respect to the x-axis direction.

Coherence-gated wavefront-sensorless adaptive-optics multi-photon microscopy, and associated systems and methods

In one embodiment, a sensorless adaptive optics imaging system includes a source of light, an optical delivery unit having a wavefront modifying element, and an optical coherence tomography (OCT) sensor configured to acquire OCT images based on light emitted by the source of light and transmitted through the optical delivery unit. The system also includes a processing unit that can: process the OCT images, and determine an adjustment of parameters of the wavefront modifying element. In some embodiments, the system includes a multi-photon microscopy (MPM) sensor that acquires MPM images based on the light transmitted through the optical delivery unit.

OPTICAL PROBE AND METHOD OF OPERATING THE OPTICAL PROBE
20200000341 · 2020-01-02 · ·

An optical probe (2) for optically examining an object (1) is described, said optical probe having a first optical beam path for a scanning imaging method and a second optical beam path for a spectroscopic method. The optical probe comprises a first optical fibre (9) in the first optical beam path and a scanning apparatus (10) that is configured to laterally deflect the first optical fibre (9) or illumination light (31) emerging from the first optical fibre (9) for the purposes of scanning the object (1) during the scanning imaging method. The optical probe comprises a second optical fibre (11) in the second optical beam path, said second optical fibre being configured to guide excitation light or detected object light for the spectroscopic method, and a beam splitter filter (15), wherein the beam path of the scanning imaging method and the beam path of the spectroscopic method are brought into partial overlap in the probe (2) by means of the beam splitter filter (15). The optical probe (2) has a diameter of no more than 5 mm. Furthermore, a method for operating the optical probe (2) is specified.

Diagnosis system and diagnosis method
10433722 · 2019-10-08 · ·

A diagnosis system and a diagnosis method are provided. More specifically, embodiments of the present disclosure relate to a diagnosis system for detection of corneal degeneration impacting the biomechanical stability of the human cornea and a diagnosis method for detection of corneal degeneration impacting the biomechanical stability of the human cornea. Still more specifically, embodiments of the present disclosure relate to a diagnosis system for early detection of corneal degeneration impacting the biomechanical stability of the human cornea and a diagnosis method for early detection of corneal degeneration impacting the biomechanical stability of the human cornea.

LASER INTERFEROMETER SYSTEM FOR MEASURING SIX DEGREES OF FREEDOM WITH RESPECT TO A LINEAR AXIS

A laser interferometer system includes a beam splitter to split a laser beam into first and second beam sets, a first retroreflector mounted to an object to reflect the first beam set, a first detecting device for detecting movements of the object in x-, y- and z-axis directions based on the reflected first beam set, a second retroreflector mounted to the object to reflect the second beam set, and a second detecting device for detecting rotations and movements of the object with respect to the y- and z-axis directions based on the reflected second beam set. The movements of the object in the z-axis direction obtained by the first and second detecting devices are used to obtain a rotation of the object with respect to the x-axis direction.