An optical measurement system includes a light source, a spectroscopic detector, a reference sample, a switching mechanism that switches between a first optical path through which a sample to be measured is irradiated with light from the light source and light produced at the sample is guided to the spectroscopic detector and a second optical path through which the reference sample is irradiated with light from the light source and light produced at the reference sample is guided to the spectroscopic detector, and a processing unit that calculates, by performing correction processing based on change between a first detection result at first time and a second detection result at second time, a measurement value of the sample from a third detection result provided from the spectroscopic detector as a result of irradiation of the sample with light from the light source at third time temporally proximate to the second time.

A light detection and ranging (LIDAR) system includes a LIDAR measurement unit, a reference measurement unit, and a phase cancellation unit. The LIDAR measurement unit estimates a time for which a laser beam travels. The reference measurement unit determines a phase of a laser source. The phase cancellation unit identifies phase noise and cancels the phase noise from the laser beam, at least partially based on the phase of the laser source and the time for which the laser beam travels. The denoised signal is used to determine the range between a laser source and a target.

A light detection and ranging (LIDAR) system includes a laser and a calibration unit. The laser is configured to generate a laser beam based on a particular laser waveform that is associated with at least one parameter of a plurality of parameters. The calibration unit is configured to determine a particular value for the at least one parameter of the plurality of parameters to compensate for distortion characteristics of the laser. The calibration unit is configured to determine the particular value based on an output frequency of the laser beam. The calibration unit is configured to update the particular laser waveform with the particular value of the at least one parameter of the plurality of parameters.

A light detection and ranging (LIDAR) system includes a LIDAR measurement unit, a reference measurement unit, and a phase cancellation unit. The LIDAR measurement unit estimates a time for which a laser beam travels. The reference measurement unit determines a phase of a laser source. The phase cancellation unit identifies phase noise and cancels the phase noise from the laser beam, at least partially based on the phase of the laser source and the time for which the laser beam travels. The denoised signal is used to determine the range between a laser source and a target.

A light detection and ranging (LIDAR) system includes a LIDAR measurement unit, a reference measurement unit, and a phase cancellation unit. The LIDAR measurement unit estimates a time for which a laser beam travels. The reference measurement unit determines a phase of a laser source. The phase cancellation unit identifies phase noise and cancels the phase noise from the laser beam, at least partially based on the phase of the laser source and the time for which the laser beam travels. The denoised signal is used to determine the range between a laser source and a target.

A light detection and ranging (LIDAR) system includes a LIDAR measurement unit, a reference measurement unit, and a phase cancellation unit. The LIDAR measurement unit estimates a time for which a laser beam travels. The reference measurement unit determines a phase of a laser source. The phase cancellation unit identifies phase noise and cancels the phase noise from the laser beam, at least partially based on the phase of the laser source and the time for which the laser beam travels. The denoised signal is used to determine the range between a laser source and a target.

The disclosure discloses a differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method. The beam output from the single-frequency laser is converted into a 45° linearly polarized beam after passing through the polarizer, then projected onto two sets of sinusoidal phase modulation interferometers consisting of the beam splitter, the electro-optic phase modulator, the half wave plate, three pyramid prisms, two polarization beam splitters, thereby forming measurement and reference interference signals which are received by two photodetectors. A high-frequency sinusoidal voltage signal is applied to the electro-optic phase modulator placed in the common reference arm of the two interferometers, thereby modulating the interference signal into a high-frequency AC signal. By detecting the difference between the phase change amounts of the two interference signals when the measured object moves, the measured displacement can be obtained.

System and methods for Light Detecting and Ranging (LIDAR) are disclosed. The LIDAR system includes a light source that is configured project a beam at various wavelengths toward a wavelength dispersive element. The wavelength dispersive element is configured to receive the beam and direct at least a portion of the beam into a field of view (FOV) at an angle dependent on frequency. The system also includes a detector that is positioned to receive portions of the beam reflected from an object within the FOV and a processor that is configured to control the light source and determine a velocity of the object.

An optoelectronic system for measuring physical parameters comprising: two narrow band light sources with different peak frequencies coupled together into a combined light using a coupler. The combined light is split into a first Fabry-Pérot interferometer arranged to be exposed to both temperature and physical parameter of interest and a second Fabry-Pérot interferometer arranged to be exposed only to temperature. The system further comprises first and second optical detectors arranged to receive light reflected from the cavities of the first and second Fabry-Pérot interferometers respectively through an optical path comprising a combination of lenses and/or mirrors and a Fizeau interferometer. A processor is arranged to analyze the data received by the first optical detector and second optical detector and calculate a value for temperature and the physical parameter of interest.

An analysis apparatus includes an acquisition part that acquires a plurality of interference images based on a plurality of optical path lengths between the reference surface and the surface of the object to be measured from the interference measurement apparatus, a calculation part that calculates a sine wave component and a cosine wave component of an interference signal for each pixel in the plurality of interference images, respectively, an error detection part that detects an error between a first Lissajous figure constructed on the basis of the sine wave component and the cosine wave component for each pixel and an ideal second Lissajous figure, a correction part that corrects the sine wave component and the cosine wave component for each pixel on the basis of the error, and a geometry calculation part that calculates surface geometry of the object to be measured on the basis of the corrected sine wave component and cosine wave component is provided.