Patent classifications
G01B9/0207
Measuring a cavity by means of interference spectroscopy
A method for interferometrically determining geometric and/or optical parameters of a cavity comprises the method steps of: tuning the frequency f of a coherent light source (10) over a frequency range f, deriving a target beam and a reference beam from the coherent light source (10), wherein the target beam passes through the cavity at least once, generating an interference signal I(f) which is dependent on the frequency f of the light source by superimposing the reference beam on the target beam, capturing an interference spectrum of the interference signal I(f) over the frequency range f of the frequency f of the coherent light source, evaluating a plurality of measurement points of the captured interference spectrum over the frequency range f by numerically fitting the measurement points to a mathematical function produced, and determining the geometric and/or optical parameters of the cavity (40, 45) by determining the parameters of the mathematical function produced.
INTERFEROMETER WITH PIXELATED PHASE SHIFT MASK
An interferometer uses a phase shift mask that includes an array of pixels that are aligned with a corresponding array of pixels of a detector. Each pixel in the phase shift mask is adapted to produce one of a number of predetermined phase shifts between a test beam and a reference beam. For example, the pixels may be linear polarizers or phase delay elements having one of the number of polarizer orientations or phase delays to produce the predetermined phase shifts between the test beam and the reference beam. The pixels in the phase shift mask are arranged in the array to include each of the predetermined phase shifts in repeating pixel groups in rows that are one column wide, columns that are one row high, or blocks of multiple rows and columns.
Dispersion correction in optical frequency-domain reflectometry
An optical frequency domain reflectometry (OFDR) measurement is produced from an OFDR apparatus that includes a tunable laser source coupled to a sensing interferometer and a monitor interferometer. The sensing interferometer is also coupled to a waveguide, e.g., an optical sensing fiber. Sensor interferometric data obtained by the OFDR measurement is processed in the spectral domain (e.g., frequency) with one or more parameters to compensate for the optical dispersion associated with the sensing interferometer data. A Fourier Transform of the dispersion-compensated sensing interferometric data in the spectral domain is performed to provide a dispersion-compensated OFDR measurement information in the temporal (e.g., time) domain.
Interference measurement device having a variable phase element
An interference measurement device configured to detect a phase from an interference beam between an object beam and a reference beam, includes: a laser beam source; a splitter configured to split an emitted beam from the laser beam source into the object beam and the reference beam; an object beam optical unit configured to make only the object beam incident on a measurement object; a combination unit configured to combine the object beam and the reference beam; a phase element configured to vary mutual relationship in phase between the object beam and the reference beam; and a detector configured to detect the interference beam between the object beam and the reference beam. A signal of a spatial phase variation of the measurement object is directly operated, based on at least two measurement results of an intensity signal with the detector.
AN INTERFEROMETER SYSTEM, POSITIONING SYSTEM, A LITHOGRAPHIC APPARATUS, A JITTER DETERMINATION METHOD, AND A DEVICE MANUFACTURING METHOD
An interferometer system includes an optics system configured to allow a first light beam to travel along a measurement path including a target, and a second light beam to travel along a fixed reference path excluding the target; and a signal generator configured to introduce a power-modulated optical signal in the measurement path or the reference path to determine jitter caused by components of the interferometer system downstream of the signal generator.
Miniaturized mobile, low cost optical coherence tomography system for home based ophthalmic applications
Improved optical coherence tomography systems and methods to measure thickness of the retina are presented. The systems may be compact, handheld, provide in-home monitoring, allow the patient to measure himself or herself, and be robust enough to be dropped while still measuring the retina reliably.
Optical measurement system, optical measurement method, and non-transitory storage medium having measurement program stored thereon
An optical measurement system includes a light source, a spectroscopic detector, a reference sample, a switching mechanism that switches between a first optical path through which a sample to be measured is irradiated with light from the light source and light produced at the sample is guided to the spectroscopic detector and a second optical path through which the reference sample is irradiated with light from the light source and light produced at the reference sample is guided to the spectroscopic detector, and a processing unit that calculates, by performing correction processing based on change between a first detection result at first time and a second detection result at second time, a measurement value of the sample from a third detection result provided from the spectroscopic detector as a result of irradiation of the sample with light from the light source at third time temporally proximate to the second time.
Measuring the position of objects in space
Interference fringes in a bullseye pattern are produced by a measurement module by interfering a flat reference beam with a spherical beam reflected by a sphere connected to the tip of a probe in point contact with a test object. The bullseye interferogram is registered at a detector and analyzed conventionally to produce a position measurement of the tip of the probe. A beam correction module is used to align the bullseye interferogram with the illumination axis of the measurement module. By combining at least three such measurement modules in a coordinate measurement machine, the three-dimensional position of the probe and of its point contact with the test object can be obtained from analysis of the bullseye interferograms registered by the detectors with high precision and greatly reduced Abbe error.
Single shot full-field reflection phase microscopy
The present invention relates to a full-field reflection phase microscope. In a preferred embodiment, the invention can combine low-coherence interferometry and off-axis digital holographic microscopy (DHM). The reflection-based DHM provides highly sensitive and a single-shot imaging of cellular dynamics while the use of low coherence source provides a depth-selective measurement. A preferred embodiment of the system uses a diffraction grating in the reference arm to generate an interference image of uniform contrast over the entire field-of-view albeit low-coherence light source. With improved path-length sensitivity, the present invention is suitable for full-field measurement of membrane dynamics in live cells with sub-nanometer-scale sensitivity.
Post-processing reduction of fixed pattern artifacts and trigger jitter in swept-source optical coherence tomography
Disclosed herein are methods and systems for aligning swept-source optical coherence tomography (SS-OCT) spectral interferograms to a reference spectral interferogram based on signal information (e.g., amplitude or phase) at a fixed-pattern noise location to reduce residual fixed-pattern noise and improve the phase stability of SS-OCT systems.