A laser processing apparatus emits processing light, measurement light, processing guide light, and measurement guide light with which a surface of a workpiece is irradiated. Respective wavelengths of the processing guide light and the measurement guide light are set to wavelengths at which a deviation amount between an irradiation position of the processing guide light and an irradiation position of the measurement guide light due to a chromatic aberration of magnification of a lens, and a deviation amount between an irradiation position of the processing light and an irradiation position of the measurement light due to the chromatic aberration of magnification of the lens are equal to each other. Therefore, positioning of spot positions of a plurality of laser lights having different output differences can be realized with high accuracy and high speed.

A system and method for aligning a floor target relative to a vehicle, the floor target including a calibration pattern for observation by a vehicle safety system sensor during calibration. The system includes at least one optical projection system consisting of at least one optical projector having an orientable projection axis. The optical projection system is operatively controlled by a processor to orient said projection axis towards a selected location on the floor surface relative to the vehicle, and to activate the optical projected to illuminate a point, a line, or a boundary, against which the floor target is aligned.

An illuminated sensor target includes a light source. Actuating the light source illuminates the sensor target. The illuminated sensor target is recognized by one or more sensors of a vehicle during a calibration process, and is used to calibrate the one or more sensors of the vehicle during the calibration process. The illuminated sensor target is illuminated during at least part of the calibration process, which may involve rotation of the vehicle about a turntable, with the illuminated sensor target positioned within a range of the turntable along with other sensors targets, which may also be illuminated.

An apparatus and method for aligning two coaxially coupled rotatable shafts. A servo operated multi axis positioning device is movable along a longitudinal axis parallel to the axis of the shafts, and movable vertically to position a laser range (LRF) adjacent to the two shafts, which measures the distance between the LRF and a spot on the shafts. A controller having a processor and memory communicates with the positioning device and the LRF to collect data at two axial positions on each shaft. At each position the LRF measures the distance to the shaft and stores the measurement and location data. The LRF is vertically repositioned and the measurement and storing steps are repeated over a scan distance sufficient to provide enough data to determine the location of the shaft center. The processor then calculates and compares the shafts centerlines and determines the necessary adjustments needed to move the shafts into coaxial alignment.

An imaging system for a biological sample includes a sample container having at least one biological cell that is in contact with an interface surface of a container interface. The imaging system also includes illuminating optics that output a light beam aligned with a sample plane, the light beam being oriented horizontally along a transverse (XY) plane and illuminating the biological cell vertically along an axial (XZ) plane. The imaging system further includes imaging optics aligned horizontally along the transverse (XY) plane with the interface in the sample container, the imaging optics being configured to detect along the axial (XZ) plane a magnified image of a measurable contact angle between the biological cell and the interface surface. The measurable contact angle changes over time and is indicative of biological adhesion between the biological cell and another biological cell.

A system and method for positioning oilfield tubulars on a drilling floor (2), having an automated tubular handling system, to permit alignment and automated make up and break out of threading operations between a stationary tubular (8) and a moving tubular (34), utilizing image information from radially offset cameras (54, 56), processing the image information to recognize the tubulars within the image and develop position information for said tubulars, combining the position information from the two camera systems to develop three dimensional information for each of the tubulars, developing instructions for the automated tubular handling system to bring the stationary and moving tubulars into vertical alignment and lowering the moving tubular into threaded contact, and engaging an automated hydraulic torque wrench to make up the threaded connection.

A metrology target includes a first target structure set having one or more first target structures formed within at least one of a first working zone or a second working zone of a sample. The metrology target includes a second target structure set having one or more second target structures formed within at least one of the first working zone or the second working zone. The first working zone may include a center of symmetry that overlaps with a center of symmetry of the second working zone when an overlay error of one or more layers of the sample is not present. The metrology target may additionally include a third target structure set, a fourth target structure set, or a fifth target structure set.

Method for positioning and orienting a first object relative to a second object. Method includes positioning a near field transducer having an aperture on the first object, and directing a laser light toward the aperture of the near field transducer on the first object to create an effervescent wave on the other side of the aperture. Positioning a sensor on the second object for detecting the effervescent wave from the near field transducer. Providing an algorithm, and using information obtained from the sensor on the second object in the algorithm to control a nanopositioning system to position one of the first and second objects in a desired position and orientation relative to the other one of the first and second objects. One or both of the first and second objects may be an interposer, such as a silicon or glass interposer.

A method for correcting misregistration measurements of a semiconductor wafer for errors therein arising from tilt of the wafer including measuring, for at least one location on a wafer, a difference between a Tool Induced Shift (TIS) of a metrology device in a first illumination arrangement with respect to the wafer wherein a surface of the wafer is generally orthogonally illuminated by an illumination source of the metrology device and a TIS of the metrology device in a second illumination arrangement with respect to the wafer, wherein the surface is obliquely illuminated by the illumination source, and correcting a misregistration measurement measured by the metrology device at the at least one location for errors therein arising from tilt of the wafer at the location by subtracting from the misregistration measurement a weighted value of the difference between the TIS in the first and second illumination arrangements.

A chromatic confocal sensor configured for calibrating an orientation of an equipment about the optical axis of the chromatic confocal sensor, wherein the equipment is disposed at a first orientation about the optical axis of the chromatic confocal sensor, the chromatic confocal sensor including a light source, a collimator, a lens and a reticle, wherein the light source, the collimator and the lens are coaxially disposed along the optical axis, the reticle is configured to be interposable between the collimator and the lens along the optical axis, an image is configured to be cast by the light source through the collimator, the reticle and the lens on the equipment, the image is disposed at a second orientation about the optical axis and the equipment is calibratable by aligning the equipment with the image such that the first orientation approaches the second orientation.