An analysis chamber for an optical-metrology tool includes an enclosure having an opening oriented toward an optical-metrology specimen and aligned substantially parallel to the specimen; at least one transparent window arranged in the enclosure; at least one fluid inlet passing through the enclosure, the fluid inlet coupled to an analysis-fluid source; and an enclosure support configured to hold the enclosure above and in proximity to the specimen.

A method for the machining of workpieces that have an unknown workpiece geometry with a tooling machine, said method having the steps of clamping of the workpiece in a clamping device on the tooling machine, execution of a manually guided 3D line scan with a measurement sensor within the tooling machine to determine the workpiece geometry in a first dataset, processing of the first dataset to compensate for errors in the manually guided 3D line scan in order to obtain a second dataset, use of the second dataset for 3D CAD surface generation by the tooling machine for the generation of a rough component geometry, use of the rough component geometry for the generation of scan paths for an automatic 3D line scan, execution of an automatic 3D line scan of the workpiece with the measurement sensor within the tooling machine in order to obtain a third dataset, use of the third dataset for 3D CAD surface generation for the generation of a precise component geometry, and automated machining of the workpiece by the tooling machine based on the precise component geometry, and a tooling machine for the execution of the method are provided.

The present disclosure provides a system and method of optical inspection of substrates that have relative large variations in topography. The present disclosure provides a system wherein optical components of the optical inspection system can be automatically moved vertically towards or away from the substrate during optical inspection of the substrate. The system moves the optics in a controlled and precise manner, thereby enabling accurate on-the-fly inspection of substrates having a large variation in topography.

A processing apparatus includes an acquisition unit that acquires a captured image obtained by capturing, by an image capturing unit, a target object to which a projection unit has emitted pattern light. A derivation unit derives a distance from the image capturing unit to the target object by using the captured image. An adjustment unit adjusts, in accordance with the derived distance, at least one of a first parameter for controlling brightness of the pattern light emitted from the projection unit, and a second parameter for controlling an exposure amount of the image capturing unit.

Measuring device for measuring a rotationally symmetrical cavity in a workpiece has a base body for supporting on the workpiece, and a measuring head with a sensor for scanning the inner wall of the cavity. The measuring device has a shaft connected to the base body. Measuring head is movable relative to base body in the axial direction of the shaft and is rotatable about a rotational axis defined by the shaft. The shaft is configured as a hollow shaft, and accommodates a drive shaft rotationally drivable by a rotary drive apparatus. A distal end of the drive shaft is connected to the measuring head in a rotationally fixed manner. The shaft is situated on the base body and movable in the axial direction of the shaft by a slide bearing system. An axial drive apparatus moves the shaft relative to the base body.

A method and an apparatus for calibrating a tool in a flange coordinate system of a robot are disclosed. The method includes: acquiring a rotation angle of each joint of a robot when a to-be-calibrated tool fasted on an end joint mounting portion of the robot moves to a central point of the to-be-calibrated tool and overlaps with a calibration reference point acquiring calibration information of a central point of a calibrated tool in a flange coordinate system of the robot and completing calibration of the central point of the to-be-calibrated tool in the flange coordinate system of the robot according to the calibration information of the central point of the calibrated tool and a rotation angle of the to-be calibrated tool.

A probe head of a coordinate measuring machine (‘CMM”) includes a sensor to detect impact of the probe head with a foreign object. The probe head is movably coupled to the CMM such that the sensor detects motion of the probe head relative to a portion of the CMM resulting from an impact event. Some embodiments cause the CMM to take action in response to detecting an impact. Probe clips allow adjustment of the position of a CMM probe relative to the portion of the CMM from which the probe is suspended. This allows the position and orientation of the CMM probe to be adapted to a variety of applications.

An articulating probe for use with a coordinate measuring machine comprises an attachment portion, a measuring portion, and at least one articulating joint. The attachment portion can be configured for attachment to a coordinate measuring machine. The measuring portion can be configured to contact an object to be measured by the coordinate measuring machine. The at least one articulating joint can be configured to allow rotation between the attachment portion and the measuring portion. Further, the articulating joint can comprise an angular sensor configured to measure an angle of the joint.

A touch trigger probe interface for a machine tool is described that includes a probe communication portion for receiving probe event information from a touch trigger probe. A machine tool communication portion is also provided for outputting probe event information to a numerical controller of the machine tool. The machine tool communication portion outputs the probe event information as digital data packets, for example over a digital data bus. The digital data packets may include a time stamp and/or the touch trigger probe interface may receive timing information from the machine tool. A touch trigger probing system and a machine tool system including the probe interface are also described.

Embodiments provide measurement systems having a coordinate measuring machine, a workpiece storage apparatus, and a robot for delivering workpieces from the workpiece storage apparatus to the coordinate measuring machine, and methods for orienting and operating such systems. Illustrative embodiments employ a reference geometry tool on the robotic arm, and kinematic locators on the coordinate measuring machine and/or on the workpiece storage apparatus to define a coordinate system common to the coordinate measuring machine, the workpiece storage apparatus, and the robot.