Patent classifications
G01C19/28
Inertial navigation sensor with reduced footprint
The invention relates to an inertial sensor (1) comprising a substrate extending along a drive excitation direction (x) and a detection direction (y) normal to each other, the device plane being perpendicular to a rotation direction (z), a first drive frame (110) and a second drive frame (120), a first sense frame (210), a second sense frame (220), a sense lever (1000) pivotably mounted around a rotation axis (1001), a sensing system comprising a strain gauge (1600) mechanically stressed by the sense lever it is rotating around the rotation axis. The sense lever includes a central portion (1500), a first arm (1100) and a second arm (1200), the central portion having a dimension along the detection direction called central width, the arms having a dimension along the detection direction called arm width, the central width being at least twice greater than the arm width.
Inertial navigation sensor with reduced footprint
The invention relates to an inertial sensor (1) comprising a substrate extending along a drive excitation direction (x) and a detection direction (y) normal to each other, the device plane being perpendicular to a rotation direction (z), a first drive frame (110) and a second drive frame (120), a first sense frame (210), a second sense frame (220), a sense lever (1000) pivotably mounted around a rotation axis (1001), a sensing system comprising a strain gauge (1600) mechanically stressed by the sense lever it is rotating around the rotation axis. The sense lever includes a central portion (1500), a first arm (1100) and a second arm (1200), the central portion having a dimension along the detection direction called central width, the arms having a dimension along the detection direction called arm width, the central width being at least twice greater than the arm width.