A gyro sensor apparatus includes a driving section that supplies a driving signal, which is for vibrating a sensing element of a vibration-type gyro sensor in a drive axis direction, to the sensing element, and a processing unit that receives a first vibration signal having an amplitude proportional to a driving vibration amplitude, which is an amplitude of vibration in the drive axis direction of the sensing element and a second vibration signal having an amplitude proportional to Coriolis force generated in the sensing element due to an angular velocity of the sensing element. The processing unit is configured to calculate a ratio of Coriolis force to the driving vibration amplitude based on the first vibration signal and the second vibration signal and output a result of the calculation as a result of detection of the angular velocity of the sensing element.

A sensor is provided including: an element outputting detection signals according to magnitude of physical quantity; a drive circuit outputting a driving signal to the element and receiving a monitor signal from the element; a detection circuit that includes amplifiers amplifying the detection signals and a first synchronous demodulation circuit performing synchronous demodulation on a signal from the amplifier, receives the detection signals, and outputs a physical quantity signal according to the physical quantity; a processing circuit processing a signal from the first synchronous demodulation circuit; a first diagnostic circuit that receives a signal into the processing circuit and a signal from the processing circuit, and outputs a first error signal when abnormalities occur in the processing circuit; and a second diagnostic circuit that outputs a diagnostic signal to the first diagnostic circuit, instead of the signal into the processing circuit or instead of the signal from the processing circuit.

A circuit device includes first and second detection circuits which detect physical quantity signals based on detection signals from first and second physical quantity transducers, a multiplexer which selects any one signal among a plurality of signals including the physical quantity signals from the first and second detection circuits, an A/D conversion circuit which performs A/D conversion of the selected signal, and a logic circuit which performs processing of a digital signal from the A/D conversion circuit. The first detection circuit is arranged on a second direction side from a first side of the circuit device. The second detection circuit is arranged on the second direction side from the first side and on a first direction side from the first detection circuit. The A/D conversion circuit is arranged between at least one of the first or second detection circuit and the logic circuit.

A detection device includes a driving circuit which drives a vibrator, and a detection circuit which detects a desired signal. The driving circuit includes a current-voltage conversion circuit which receives a feedback signal, and performs a current-voltage conversion, a drive signal output circuit which amplifies an input voltage signal after being subjected to the current-voltage conversion, and outputs a drive signal of a sine wave, and a gain control circuit which controls a gain of amplification of the drive signal in the drive signal output circuit. When a resistance for a current-voltage conversion is set to RI, the gain of the amplification of the drive signal in the drive signal output circuit is set to K, and an equivalent series resistance in a fundamental wave mode of the vibrator is set to R, the gain control circuit performs a gain control such that K×RI=R is satisfied.

A detection device includes a driving circuit which drives a vibrator, and a detection circuit which detects a desired signal. The driving circuit includes a current-voltage conversion circuit which receives a feedback signal, and performs a current-voltage conversion, a drive signal output circuit which amplifies an input voltage signal after being subjected to the current-voltage conversion, and outputs a drive signal of a sine wave, and a gain control circuit which controls a gain of amplification of the drive signal in the drive signal output circuit. When a resistance for a current-voltage conversion is set to RI, the gain of the amplification of the drive signal in the drive signal output circuit is set to K, and an equivalent series resistance in a fundamental wave mode of the vibrator is set to R, the gain control circuit performs a gain control such that K×RI=R is satisfied.

A circuit device includes a detection signal terminal to which a detection signal from a vibrator is input, a digital signal terminal that performs at least one of an input and an output of a digital signal, a detection circuit, and a signal generation circuit that generates a noise reduction signal based on the digital signal. The detection circuit includes an amplification circuit that amplifies the detection signal. The amplification circuit performs addition processing of a signal obtained by amplifying the detection signal and the noise reduction signal.

A gyroscope assembly includes a sense proof mass and a compensation proof mass. The sense proof mass has a sense frequency response in a sense dimension and is configured to move in a drive dimension in response to a drive signal, and to move in the sense dimension in response to experiencing an angular velocity about a sense input axis while moving in the drive dimension. And the compensation proof mass has, in the sense dimension, a compensation frequency response that is related to the sense frequency response.

A gyroscope assembly includes a sense proof mass and a compensation proof mass. The sense proof mass has a sense frequency response in a sense dimension and is configured to move in a drive dimension in response to a drive signal, and to move in the sense dimension in response to experiencing an angular velocity about a sense input axis while moving in the drive dimension. And the compensation proof mass has, in the sense dimension, a compensation frequency response that is related to the sense frequency response.

A physical quantity detection circuit including a differential amplification circuit that differentially amplifies a signal pair based on a first signal containing a first physical quantity component and a first vibration leakage component and a second signal containing a second physical quantity component having a phase opposite the phase of the first physical quantity component and a second vibration leakage component having the same phase as the phase of the first vibration leakage component, an adder circuit that adds the signal pair, a first synchronous wave-detection circuit that performs synchronous wave-detection on a signal based on an output signal from the differential amplification circuit, a second synchronous wave-detection circuit that performs synchronous wave-detection on a signal based on an output signal from the adder circuit, a physical quantity detection signal generation circuit that generates a physical quantity detection signal based on an output signal from the first synchronous wave-detection circuit, and a vibration leakage signal generation circuit that generates a vibration leakage signal based on an output signal from the second synchronous wave-detection circuit.

A physical quantity detection circuit includes: a drive circuit configured to apply a drive signal, which includes a first frequency component and a second frequency component having a frequency different from a frequency of the first frequency component, to a drive electrode of a physical quantity detection element; a physical quantity detection signal output circuit configured to output a physical quantity detection signal, based on a first physical quantity component output from a first detection electrode of the physical quantity detection element and a second physical quantity component output from a second detection electrode of the physical quantity detection element; and a first failure diagnosis signal output circuit configured to output a first failure diagnosis signal generated based on a first electrostatic leakage component resulting from the second frequency component propagating to the first detection electrode and a second electrostatic leakage component resulting from the second frequency component propagating to the second detection electrode.