A micromechanical sensor that is produced surface-micromechanically includes at least one mass element formed in a third functional layer that is non-perforated at least in certain portions. The sensor has a gap underneath the mass element that is formed by removal of a second functional layer and at least one oxide layer. The removal of the at least one oxide layer takes place by introducing a gaseous etching medium into a defined number of etching channels arranged substantially parallel to one another. The etching channels are configured to be connected to a vertical access channel in the third functional layer.

An acceleration sensor includes a substrate, a support beam, a weight body a stationary section and an engaging section. The weight body is divided into a first weight section and a second weight section based on the support beam as a boundary line, and the first weight section and the second weight section have different weights from each other. The first weight section and the second weight section include a facing section which faces a side of the engaging section opposite to a side facing the support beam. In an X axis direction intersecting the Y axis direction, if a distance between a corner section of the engaging section in the vicinity of one end portion and the support beam is L1 and a distance between the engaging section and the facing section is L2, a relational expression, L1>L2 is satisfied.

Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component.

Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component.

A micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage. The damping structure is designed in such a way that a frequency response and/or a damping of the movably suspended mass are/is changeable with the aid of a deflection of the damping structure.

A micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage. The damping structure is designed in such a way that a frequency response and/or a damping of the movably suspended mass are/is changeable with the aid of a deflection of the damping structure.

A gyro sensor element includes a base, driving vibrating arms, which extend from the base, have a first surface and a second surface located on an opposite side to the first surface, and make a driving vibration, and detecting vibrating arms, which extend from the base, have a third surface located on a same side as the first surface and a fourth surface located on an opposite side to the third surface, and vibrate in accordance with a physical quantity applied to the driving vibrating arms, wherein the driving vibrating arms have bottomed grooves on at least one of the first surface and the second surface, and driving electrodes disposed on inner surfaces of the bottomed grooves, and the detecting vibrating arms have through holes penetrating the detecting vibrating arms in a direction crossing the third surface and the fourth surface, and detecting electrodes disposed on at least a part of an inner wall surface of the through holes.

Provided is a vibrometer capable of detecting vibration of a vibrator having a placement surface and vibrating horizontally in a predetermined direction. The vibrometer includes a revolving body and a gyroscope sensor. The revolving body has an outer surface including a curved surface that is curved outward when viewed in a direction along a predetermined axis. The revolving body is capable of rolling in the predetermined direction on the placement surface in such a manner that the curved surface comes into contact with the placement surface, with the predetermined axis forming an angle with the predetermined direction. The gyroscope sensor is fixed to the revolving body and is capable of determining the angular velocity around the predetermined axis. When viewed in the direction along the predetermined axis, the curved surface is shaped such that a portion of the curved surface at a greater distance along the curved surface from a reference portion within the curved surface is farther from the center of gravity of an assembly including the revolving body and members that roll together with the revolving body.

Provided is a vibrometer capable of detecting vibration of a vibrator having a placement surface and vibrating horizontally in a predetermined direction. The vibrometer includes a revolving body and a gyroscope sensor. The revolving body has an outer surface including a curved surface that is curved outward when viewed in a direction along a predetermined axis. The revolving body is capable of rolling in the predetermined direction on the placement surface in such a manner that the curved surface comes into contact with the placement surface, with the predetermined axis forming an angle with the predetermined direction. The gyroscope sensor is fixed to the revolving body and is capable of determining the angular velocity around the predetermined axis. When viewed in the direction along the predetermined axis, the curved surface is shaped such that a portion of the curved surface at a greater distance along the curved surface from a reference portion within the curved surface is farther from the center of gravity of an assembly including the revolving body and members that roll together with the revolving body.

In a general aspect, a micromachined gyroscope can include a substrate and a static mass suspended in an x-y plane over the substrate by a plurality of anchors attached to the substrate. The static mass can be attached to the anchors by anchor suspension flexures. The micromachined gyroscope can include a dynamic mass surrounding the static mass and suspended from the static mass by one or more gyroscope suspension flexures.