The invention relates to the field of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope of the present invention drives oscillation of at least one proof mass in a primary drive mode at a first frequency and in a secondary drive mode at a second frequency, different to the first frequency. The primary drive mode and secondary drive mode are orthogonal. Sense circuitry measures oscillation of the at least one proof mass in a sense mode, which is orthogonal to the primary drive mode and the secondary drive mode, in order to determine the angular rate of rotation of the MEMS gyroscope about sense axes parallel to the movement of the at least one proof mass in the primary and secondary drive modes.

A tuning fork sensor system places a controlled bias on the proof-mass drive-axis electrodes to cancel the quadrature charge. Also, its charge amplifiers employ a field-effect transistor biased slightly into the triode region so that it behaves as a very large value resistor. In addition, it uses a phase-locked loop having a special loop filter in order to optimize performance by rejecting off-frequency drive feedthrough to the motor pick-off while resulting in very low phase wander for the demodulation references.

A vibration-type angular velocity sensor (100) includes a primary side control circuit (2) and a secondary side control circuit (3) which are configured so that a function as the primary side control circuit (2) and a function as the secondary side control circuit (3) are interchangeable, in which an offset value after interchange and an offset value before interchange are symmetric values with respect to a predetermined reference value.

An oscillator drive circuit and a trim circuit are implemented inside an integrated circuit of a sensor. The drive circuit provides an oscillating drive signal at a resonant frequency to drive a movable mass of the sensor. The drive circuit includes a phase shift circuit having an input for receiving a first signal indicative of an oscillation of the movable mass and having an output. The phase shift circuit adds a phase shift component to the first signal and produces a second signal shifted in phase by the phase shift component. The trim circuit includes a first comparator for receiving the first signal, a second comparator for receiving the second signal, and a processing element. The processing element determines a phase lag between the first and second signals and produces trim code for use by the phase shift circuit, the trim code being configured to adjust the phase shift component.

An oscillator drive circuit and a trim circuit are implemented inside an integrated circuit of a sensor. The drive circuit provides an oscillating drive signal at a resonant frequency to drive a movable mass of the sensor. The drive circuit includes a phase shift circuit having an input for receiving a first signal indicative of an oscillation of the movable mass and having an output. The phase shift circuit adds a phase shift component to the first signal and produces a second signal shifted in phase by the phase shift component. The trim circuit includes a first comparator for receiving the first signal, a second comparator for receiving the second signal, and a processing element. The processing element determines a phase lag between the first and second signals and produces trim code for use by the phase shift circuit, the trim code being configured to adjust the phase shift component.

A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

According to one embodiment, a sensor includes a sensor element, and a controller. The sensor element includes a first sensor part. The first sensor part includes a first movable part which can vibrate. Vibration of the first movable part includes a first component and a second component. The controller is configured to perform to third mode operations. In the first mode operation, the controller is configured to derive a first rotation angle of the first movable part based on a first amplitude of the first component and a second amplitude of the second component. In the second mode operation, the controller is configured to derive a first angular velocity of the first movable part based on a change of a control signal. In the third mode operation, the controller is configured to supply a third mode signal to the first sensor part.

According to one embodiment, a sensor includes a sensor part. The sensor part includes a supporter and a movable part. The movable part includes a movable member located around the supporter in a first plane, and a plurality of structure members located between the supporter and the movable member. The structure members have bent shapes. The structure members connect the movable member with the supporter. The movable member is capable of vibrating. The movable part has the supporter as a center of rotational symmetry. The movable part has a plurality of mirror planes. The mirror planes pass through the center of the rotational symmetry and cross the first plane.

According to one embodiment, a sensor includes a sensor part. The sensor part includes a supporter and a movable part. The movable part includes a movable member located around the supporter in a first plane, and a plurality of structure members located between the supporter and the movable member. The structure members have bent shapes. The structure members connect the movable member with the supporter. The movable member is capable of vibrating. The movable part has the supporter as a center of rotational symmetry. The movable part has a plurality of mirror planes. The mirror planes pass through the center of the rotational symmetry and cross the first plane.