An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

An arrangement includes a pipeline and a Coriolis volumetric flow meter for measuring a mass flow rate of a medium flowing through the pipeline. A first pressure sensor is attached at an inlet-side of the pipeline and a second pressure sensor is attached at an outlet-side of the pipeline, or wherein a differential pressure sensor is configured to detect a difference between an inlet-side and an outlet-side. The pressure sensors and/or the differential pressure sensor are configured to measure a media pressure and to determine, for each differential pressure, a volumetric flow velocity of the medium through the pipeline. A first monitoring sensor is attached at an inlet-side portion of the pipeline and a second monitoring sensor is attached at an outlet-side portion of the pipeline, wherein the monitoring sensors are configured to monitor a measurement variable different from the media pressure to identify a static media state.

An arrangement includes a pipeline and a Coriolis volumetric flow meter for measuring a mass flow rate of a medium flowing through the pipeline. A first pressure sensor is attached at an inlet-side of the pipeline and a second pressure sensor is attached at an outlet-side of the pipeline, or wherein a differential pressure sensor is configured to detect a difference between an inlet-side and an outlet-side. The pressure sensors and/or the differential pressure sensor are configured to measure a media pressure and to determine, for each differential pressure, a volumetric flow velocity of the medium through the pipeline. A first monitoring sensor is attached at an inlet-side portion of the pipeline and a second monitoring sensor is attached at an outlet-side portion of the pipeline, wherein the monitoring sensors are configured to monitor a measurement variable different from the media pressure to identify a static media state.

A method for calibrating flow meters measuring fluid passing through a pipe wherein fluid pressures are detected and used to determine a volume or mass flow rate using an energy correlation calculation. The energy correlation calculation equates a change in potential energy for the flowing fluid with a change in kinetic energy for the flowing fluid. The energy correlation method of calculating flow rate offers lower measurement uncertainty than calculating flow by the Reynolds number versus discharge coefficient method.

A method for calibrating flow meters measuring fluid passing through a pipe wherein fluid pressures are detected and used to determine a volume or mass flow rate using an energy correlation calculation. The energy correlation calculation equates a change in potential energy for the flowing fluid with a change in kinetic energy for the flowing fluid. The energy correlation method of calculating flow rate offers lower measurement uncertainty than calculating flow by the Reynolds number versus discharge coefficient method.

A sensor apparatus may include a channel structure configured to couple with an external element and a fluid conduit, such that the channel structure may receive a fluid, at least partially drawn through the external element from an ambient environment, and direct the fluid through the fluid conduit. A sensor may generate sensor data indicating a flow rate of the fluid through the fluid conduit based on monitoring a variation in a pressure at a location in hydrodynamic contact with the fluid conduit and in relation to an ambient pressure of the ambient environment. The sensor apparatus may enable generation of improved topography information associated with flows of fluid drawn from the external element based on measuring a local pressure at the location in hydrodynamic contact with the fluid conduit and determining the ambient pressure based on monitoring the local pressure over time.

An airflow sensor assembly for an air duct is provided. The airflow sensor assembly includes the air duct having an interior wall and an exterior wall, a high pressure pickup device, a low pressure pickup device, a pressure redirection device, and a pressure sensor. The pressure redirection device is fluidly coupled to the high pressure pickup device and the low pressure pickup device and includes a low inlet, a high inlet, and a common outlet. The pressure sensor is selectively fluidly coupled to the high pressure pickup device and the low pressure pickup device and includes a first inlet and a second inlet. The second inlet is fluidly coupled to the common outlet of the pressure redirection device.

An airflow sensor assembly for an air duct is provided. The airflow sensor assembly includes the air duct having an interior wall and an exterior wall, a high pressure pickup device, a low pressure pickup device, a pressure redirection device, and a pressure sensor. The pressure redirection device is fluidly coupled to the high pressure pickup device and the low pressure pickup device and includes a low inlet, a high inlet, and a common outlet. The pressure sensor is selectively fluidly coupled to the high pressure pickup device and the low pressure pickup device and includes a first inlet and a second inlet. The second inlet is fluidly coupled to the common outlet of the pressure redirection device.

A system for operating a flow meter in a pipeline includes at least one flow conditioner or mixer installed in a pipeline; at least one volumetric flow meter installed downstream from the at least one flow conditioner or mixer for measuring velocity of a fluid in the pipeline; a pair pressure transmitters for measuring fluid pressure at a first side and a second side of the at least one flow conditioner or mixer; and a flow computer, connected to the pair of pressure transmitters and to the at least one flow meter. The flow computer includes 1) at least one database having experimental Reynolds number data for the at least one flow meter for a plurality of fluids, and 2) a processor having programmable logic for calculating viscosity of a fluid in the pipeline and operating the flow meter when the fluid in the pipeline changes.

The present invention provides methods and apparatus for determining a fluid leakage volume in a pipeline complex, the method including providing a leakage measurement apparatus, determining a fluid flowrate through the leakage measurement apparatus and adjusting an externally controlled pressure located at a pressure point in said apparatus thereby determining said fluid leakage volume.