Systems, devices, and methods are provided for measuring fluid flow across a pump used in a system for precisely and accurately metering fluid. The systems, devices, and methods can use contactless approaches to measure the properties of the fluid being pumped. The measured properties can be used to precisely and accurately determine the flow rate through the pump.

A side-stream respiration monitoring system that is configured to generate an alignment signal and assess information that is derived in part from the alignment signal to align in a time domain the respiration flow and composition information. The system includes an analyzer that is fluidly connected to a flow sensor that is disposed in a respiration flow path. The system includes a controller that is configured to initiate delivery of the alignment signal to the flow sensor during a portion of at least one breath cycle. The controller is configured to determine a flow rate of respiration flow and at least a portion of a composition of the respiration flow on a breath-by-breath basis and temporally associate the respiration flow value and the determined portion(s) of the composition of the respiration flow as a function of information associated with the alignment signal generated by the analyzer.

Various embodiments include systems and apparatuses for divertless dosing of process gases, including divertless dosing of precursor gases in deposition systems. In one example, the disclosed subject matter is a divertless, pressure-based gas-dosing system that includes a process gas inlet coupled to an inlet valve, a flow controller coupled to be downstream of the inlet valve, and a line charge-volume (LCV) coupled to be downstream of the inlet valve and the flow controller. The LCV is to receive an initial single-dose of the process gas. A pressure sensor is coupled to the LCV to determine a pressure level within the LCV and an outlet valve is pneumatically coupled to be downstream of the LCV. The outlet valve is to be coupled pneumatically on a downstream side of the outlet valve to a process chamber. Other systems, apparatuses, and methods are disclosed.

The present discussion relates to the addressing sensor drift issues in virtual flow meter applications. By way of example, in certain implementations: 1) pressure, temperature, or other sensors are prioritized based on one or more evaluation criteria, 2) a determination is made as to whether there are sensor drifts for those sensors with high priority, and 3) sensor readings experiencing drift, such as above a specified or measureable threshold, are compensated. In this manner, virtual flow meter accuracy is maintained over time.

A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.

A flow control device equipped with flow monitor includes a build-down type flow monitor unit provided on an upstream side, a flow control unit provided on a downstream side of the build-down type flow monitor unit, a signal transmission circuit connecting the build-down type flow monitor unit and the flow control unit and transmitting a monitored flow rate of the build-down type flow monitor unit to the flow control unit, and a set flow rate value adjustment mechanism being provided in the flow control unit and adjusting a set flow rate of the flow control unit based on the monitored flow rate from the build-down type flow monitor unit.

A fluid sample system includes a control system that operates in the hazardous area and controls one or more valves and optionally receives outputs from one or more transducers and optionally one or more sensors. The fluid sample system includes components that operate in a hazardous area and includes a control system that operates in the hazardous area and that controls one or more electrical devices. The control system communicates across a barrier with a system on a safe side of the barrier with as few as two intrinsically safe couplings including a single pneumatic coupling and a communication link coupling. The control system includes an intrinsically safe voltage boost circuit.

A fluid sample system includes a control system that operates in the hazardous area and controls one or more valves and optionally receives outputs from one or more transducers and optionally one or more sensors. The fluid sample system includes components that operate in a hazardous area and includes a control system that operates in the hazardous area and that controls one or more electrical devices. The control system communicates across a barrier with a system on a safe side of the barrier with as few as two intrinsically safe couplings including a single pneumatic coupling and a communication link coupling. The control system includes an intrinsically safe voltage boost circuit.

A flow sensor comprises a flow restriction disposed within a passage such that a fluid passing through the passage must pass through the flow restriction. The flow sensor also has an upstream pressure sensor coupled to the passage at a point upstream of the flow restriction and configured to measure and provide an upstream pressure of the fluid within the passage, a downstream pressure sensor coupled to the passage at a point downstream of the flow restriction and configured to measure and provide a downstream pressure of the fluid within the passage, and a temperature sensor coupled to the passage and configured to measure and provide a temperature of the fluid within the passage. The flow sensor also includes a flow sensor processor coupled to the upstream and downstream pressure sensors and the temperature sensor and configured to accept measurements therefrom and calculate a compensated flow rate based at least in part on the measured pressures and temperature.

A flow sensor comprises a flow restriction disposed within a passage such that a fluid passing through the passage must pass through the flow restriction. The flow sensor also has an upstream pressure sensor coupled to the passage at a point upstream of the flow restriction and configured to measure and provide an upstream pressure of the fluid within the passage, a downstream pressure sensor coupled to the passage at a point downstream of the flow restriction and configured to measure and provide a downstream pressure of the fluid within the passage, and a temperature sensor coupled to the passage and configured to measure and provide a temperature of the fluid within the passage. The flow sensor also includes a flow sensor processor coupled to the upstream and downstream pressure sensors and the temperature sensor and configured to accept measurements therefrom and calculate a compensated flow rate based at least in part on the measured pressures and temperature.