G01F1/50

Method of operating a liquid-level transmitter device and implementation thereof

A method that configures a liquid-level transmitter device to generate a measured value for a level of a liquid. The method includes steps to correct for changes in physical properties of one or more components of the device. In one embodiment, the method utilizes a correction value that incorporates data from a temperature sensor disposed inside of the device, for example, inside of the electronics member.

Flow rate measurement apparatus and method for more accurately measuring gas flow to a substrate processing system

The flow rate measurement method includes: measuring a first pressure of a gas filled in a first flow path connected to a flow rate controller and a second flow path connected to the first flow path; supplying a gas to the first and second flow paths via the flow rate controller and measuring a second pressure and a temperature of the gas filled in the first and second flow paths; after the gas is exhausted from the second flow path, measuring a third pressure of the gas filled in the second flow path; measuring a fourth pressure of the gas filled in the first and second flow paths; and calculating an amount of the gas supplied to the first and second flow paths via the flow rate controller, based on the first, second, third, and fourth pressures and the temperature.

Flow rate measurement apparatus and method for more accurately measuring gas flow to a substrate processing system

The flow rate measurement method includes: measuring a first pressure of a gas filled in a first flow path connected to a flow rate controller and a second flow path connected to the first flow path; supplying a gas to the first and second flow paths via the flow rate controller and measuring a second pressure and a temperature of the gas filled in the first and second flow paths; after the gas is exhausted from the second flow path, measuring a third pressure of the gas filled in the second flow path; measuring a fourth pressure of the gas filled in the first and second flow paths; and calculating an amount of the gas supplied to the first and second flow paths via the flow rate controller, based on the first, second, third, and fourth pressures and the temperature.

Flow measurement device for pipes when fluid flow is discharged to atmosphere
11326915 · 2022-05-10 ·

A flow meter includes a cylindrical body having an exterior surface and an interior surface defining an inner diameter of the cylindrical body. The cylindrical body also includes an outlet end and an inlet end. The inlet end is shaped and dimensioned for selective attachment to an inlet pipe or hose having an inner diameter that is small than the inner diameter of the cylindrical body. The flow meter also includes a gauge tap formed within the cylindrical body, the gauge tap being positioned adjacent the outlet end of the cylindrical body at a position between the outlet end and the inlet end. A pressure gauge is secured within the gauge tap for measuring the pressure within the cylindrical body and ultimately the flow of fluid through the cylindrical body. A nozzle is attached at the outlet end of the cylindrical body and at least one nozzle insert is provided for selective attachment to the nozzle so as reduce the size of the outlet in order to extend the normal range of the flow meter.

Method for determining a volumetric and/or mass flow rate
11768094 · 2023-09-26 · ·

The present disclosure relates to a method for determining a volumetric and/or mass flow rate of a medium flowing in a tube, wherein a density and/or a viscosity of the fluid is/are determined using a MEMS sensor chip, wherein the medium flowing in the tube at least partially flows through a measuring channel of the MEMS sensor chip to determine the density and/or the viscosity of the fluid, and wherein the volumetric and/or mass flow rate of the medium is determined regardless of the medium based on a detected pressure drop over the measuring channel of the MEMS sensor chip and the density and/or viscosity determined by the MEMS sensor.

Method for determining a volumetric and/or mass flow rate
11768094 · 2023-09-26 · ·

The present disclosure relates to a method for determining a volumetric and/or mass flow rate of a medium flowing in a tube, wherein a density and/or a viscosity of the fluid is/are determined using a MEMS sensor chip, wherein the medium flowing in the tube at least partially flows through a measuring channel of the MEMS sensor chip to determine the density and/or the viscosity of the fluid, and wherein the volumetric and/or mass flow rate of the medium is determined regardless of the medium based on a detected pressure drop over the measuring channel of the MEMS sensor chip and the density and/or viscosity determined by the MEMS sensor.

METHOD FOR DETERMINING THE MASS FLOW IN AN INTERNAL COMBUSTION ENGINE
20230288240 · 2023-09-14 ·

A method for determining mass flow according to the differential pressure method on an internal combustion engine, includes calculating a mass flow signal by using sensors of a mass flow meter to measure a differential pressure, an absolute pressure and a temperature of the mass flow. The mass flow signal is filtered by an evaluation unit of the mass flow meter and the filtered mass flow signal is sent to an engine control. The filter parameters are matched to a measurement situation by the evaluation unit. In a first measurement situation, the filter parameters are set on the basis of an analysis of pulsations of the current measured values and in a second measurement situation, the filter parameters are set on the basis of status data of the internal combustion engine transmitted by the engine control unit. A mass flow meter and a probe are also provided.

METHOD FOR DETERMINING THE MASS FLOW IN AN INTERNAL COMBUSTION ENGINE
20230288240 · 2023-09-14 ·

A method for determining mass flow according to the differential pressure method on an internal combustion engine, includes calculating a mass flow signal by using sensors of a mass flow meter to measure a differential pressure, an absolute pressure and a temperature of the mass flow. The mass flow signal is filtered by an evaluation unit of the mass flow meter and the filtered mass flow signal is sent to an engine control. The filter parameters are matched to a measurement situation by the evaluation unit. In a first measurement situation, the filter parameters are set on the basis of an analysis of pulsations of the current measured values and in a second measurement situation, the filter parameters are set on the basis of status data of the internal combustion engine transmitted by the engine control unit. A mass flow meter and a probe are also provided.

FLOW MEASUREMENT SYSTEM AND METHOD

A flow measurement system is provided, which is configured to receive multiple flow rates; retrieve multiple physical properties for multiple pure gases; estimate multiple physical properties for a gas mixture; estimate multiple flow parameters for multiple channels of a flow splitter using a mathematical model, multiple physical properties for the gas mixture, and multiple pressure values from pressure sensors of multiple channels; and estimate multiple flow splits using multiple flow parameters for the multiple channels of the flow splitter.

Flow rate calculation system, flow rate calculation system program, flow rate calculation method, and flow rate calculation device

In order to accurately calculate an estimated flow rate by a dynamic constant volume method, a flow rate calculation system including a tank into which fluid flows, an inflow line through which the fluid flows into the tank, and a pressure sensor that detects the pressure inside the tank is adapted to include: a pressure change data storage part that stores pressure change data indicating a temporal change in the pressure detected by the pressure sensor during an inflow period; a flow rate calculation part that calculates the estimated flow rate during the inflow period based on a pressure change rate; and a flow rate correction part that, on the basis of first pressure detected by the pressure sensor after a predetermined time has elapsed after the inflow period and second pressure included in the pressure change data and higher than the first pressure, corrects the estimated flow rate.