The physical quantity measurement device for measuring the physical quantity of the fluid has a measurement flow passage through which the fluid flows; a detection element for detecting the physical quantity of the fluid; a plate-shape physical quantity detector that detects the physical quantity of the fluid by the detection element in the measurement flow passage; a protection body that protects the physical quantity detector; a body recess arranged on the outer surface of the protection body at a position separated from the physical quantity detector in the orthogonal direction, which is orthogonal to a thickness direction of the physical quantity detector.

An apparatus for calculating a thermal conductivity of a gaseous substance is provided. The apparatus includes a substrate; a cover member disposed on the substrate, wherein the cover member comprises a flow tunnel for the gaseous substance; a flow sensing element disposed on the substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel; and a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel.

A flow sensor configured to detect a fluid flow of a liquid inside a pipe portion is disclosed. A thin film thermal mass flow sensor has a substrate defining a thickness from an upper side opposite a bottom side. The upper side of the substrate supports a resistive heating circuit, a first temperature sensor circuit and a second temperature sensor circuit. The resistive heating circuit is disposed between the first and second temperature sensor circuits. The circuits are electrically connected respectively to a plurality of leadwires configured to be attachable to electronic equipment. A thermally conductive membrane is configured to separate the fluid flow of the liquid inside the pipe portion from the thin film thermal mass flow sensor. A thermally conductive bond connects the bottom side of the substrate of the thin film thermal mass flow sensor to the thermally conductive membrane.

We disclose herein a flow sensor assembly comprising a first substrate, a flow sensor located over the first substrate, a lid located over the flow sensor, a flow inlet channel, and a flow outlet channel. A surface of the flow sensor and a surface of the lid cooperate to form a flow sensing channel between the flow inlet channel and the flow outlet channel, and a surface of the flow sensing channel is substantially flat throughout the length of the flow sensing channel.

A physical quantity measurement device includes a passage flow channel having an inflow port and an outflow port, a branch flow channel branched from the passage flow channel and having a branch inlet into which the fluid flows from the passage flow channel. The branch flow channel has an inclined branch path inclined with respect to the passage flow channel, and the inclined branch path extends from the branch inlet toward the outflow por. An inclination angle of the branch flow channel at the branch inlet with respect to a virtual straight line connecting the inflow port and the outflow port is smaller than or equal to a predetermined value.

Provided is a physical quantity detection device capable of achieving both rigidity improvement and sealability improvement. A physical quantity detection device (20) of the invention includes a housing (100), a cover (200), a chip package (310), and a flow rate sensor (311) supported by the chip package and arranged in a sub-passage. The housing includes: a first adhesive groove 160A which is an adhesive groove to which an adhesive for bonding the cover is applied, extends along a proximal end of the housing, extends in the protruding direction of the housing from the proximal end of the housing to a position on a more distal end side of the housing than the chip package, and is applied with the first adhesive 401; and a second adhesive groove 160B which extends along the sub-passage 134 and is applied with the second adhesive 402. The first adhesive has a higher Young's modulus, and the second adhesive has a higher thixotropy.

Reliable flow sensors with enclosures that have predictable thermal variations and reduced mechanical tolerances for a more consistent fluid flow and more consistent flow measurements. Thermal variations can be made predictable by using etched structures in silicon blocks. Mechanical tolerances can be reduced using lithography and high-precision semiconductor manufacturing equipment and techniques.

To obtain a physical quantity detection device capable of reducing an intake amount of air accompanied by foreign matter. A physical quantity detection device (20) of the invention includes a housing arranged in a main passage through which a measurement target gas (2) flows. The housing is provided with a second sub-passage (B) that takes in a part of the measurement target gas (2) flowing in the main passage, a circuit chamber (135) that accommodates a pressure sensor (320) that detects a pressure of the measurement target gas (2), and a pressure introduction passage (170) having one end opened in the middle of the second sub-passage (B) and the other end opened in the circuit chamber (135) and capable of introducing the pressure of the measurement target gas (2) from the second sub-passage (B) into the circuit chamber (135). In the pressure introduction passage (170), an introduction port (171) is arranged at a position offset outward from a side wall surface (152b) of the second sub-passage (B).

The present disclosure relates to a process connection for connecting a flow measuring device, to a pipeline, the process connection including a base body having an opening for conducting a medium and a flow rectifier, wherein the flow rectifier is inserted into a first recess of the base body and fixed in place by plastic deformation of an edge region of the base body surrounding the first recess, for example, by press fitting.

A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and a first outlet port, the first inlet port being fluidly coupled to the gas inlet of the monolithic base. The third flow component mounting region has a first sensing port fluidly coupled to the gas outlet of the monolithic base.