A monitoring and control system for a flow duct and a method for determining a component status of an operational component disposed within a flow passage of the flow duct utilizing the system are provided. In one exemplary aspect, the system includes at least two sensors that are disposed within the flow passage and configured to sense a characteristic of a fluid flowing therethrough. The sensors may be averaging sensors. Each sensor extends circumferentially about an axial centerline defined by the flow duct. The sensors are arranged in an overlapped arrangement. Particularly, the sensors extend circumferentially about the axial centerline such that the sensors physically overlap one another circumferentially. Additionally, the sensors may be disposed within the same or substantially the same plane axially. Signals generated by the sensors may be utilized to monitor and control the fluid and various operational components disposed within the flow passage.

A mass flow control apparatus and methods for calibrating and tuning the mass flow apparatus are provided. The mass flow apparatus can be calibrated by receiving a calibration input signal that provides one or more properties of a gas that is flowing through a main fluid flow path and performing one or more measurements, using one or more sensors, on the gas. The calibration includes determining a calibration parameter based on the results of the one or more measurements and the calibration input signal and adjusting a proportional valve, based on the calibration parameter, to adjust a flow rate, of the gas through the apparatus, to match a setpoint flow rate.

Provided is a device for measuring a microfluid flow velocity, having a structure separable by an ultra-thin film, the device including a first panel including a flow velocity measurement structure configured to measure a flow velocity of a fluid, a second panel configured to be separated from the first panel and including a microfluid channel through which a sample passes, and the ultra-thin film formed in a portion where the first panel and the second panel adjoin each other, the ultra-thin film being configured to separate the first panel and the second panel so that the sample passing through the microfluid channel does not come into direct contact with the flow velocity measurement structure, in which the first panel including the flow velocity measurement structure is usable multiple times repeatedly.

A non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection includes a heater, an ambient temperature sensor and a flow rate sensor which are configured to sense the temperature of a fluid in a conduit, and then monitor the flow of that fluid through the conduit. Based upon the ambient temperature sensor readings, the flow rate sensor and heater may be adjusted to optimize the operation of the system to detect leaks. Based on the sensor readings, the flow may be adjusted to prevent damage and leaks by relieving the system of excess pressure. Geographic location, occupancy sensors and occupant identifiers are used to control the system to facilitate operation and minimize leak damage when occupants are away.

Methods, systems, and apparatuses are provided for detecting and determining conditions of and conditions within a fluid conduit.

A thermal flowmeter including a measurement tube that has an inflow port into which a liquid flows and an outflow port that allows the liquid which flows in from the inflow port to flow out, and has an internal flow passage where the liquid flows formed to extend along an axis, and a plurality of detection sections each of which has a heating resistor and a temperature detecting resistor along the axis and is provided at the measurement tube, and a control section that calculates a flow rate of the liquid flowing through the internal flow passage based on signals from the plurality of detection sections, wherein the plurality of detection sections are respectively provided with predetermined intervals left in a circumferential direction with the axis as a center.

The present disclosure provides an air flow rate measuring including a casing and a sensor. The casing includes a main-bypass passage that defines an inlet and an outlet, a sub-bypass passage that branches off from the main-bypass passage at a branching area, and a guiding wall that changes, at a position upstream of the branching area, a flow direction of the passing air taken in from the inlet. The inlet and the guiding wall are arranged in an arranging direction along a flow direction of the intake air in the duct. The guiding wall includes an inlet side surface that faces the inlet and is not perpendicular to the arranging direction.

An electronic device manufacturing system includes a mass flow controller (MFC) that has a thermal flow sensor. The thermal flow sensor may measure a mass flow rate and may include a sensor tube having an inner surface coated with a material to form an inner barrier layer. The inner barrier layer may prevent or substantially reduce the likelihood of a corrosive reaction from occurring on the inner surface, which may prevent or reduce the likelihood of the MFC drifting beyond the MFC's mass flow rate accuracy specifications. This may improve the repeatability of flow detection by the MFC. Methods of measuring and controlling a mass flow rate in an electronic device manufacturing system are also provided, as are other aspects.

Methods, systems, and apparatuses are provided for detecting and determining conditions of and conditions within a fluid conduit.

By supplying a pulse signal to sensor wires to make the sensor wires generate heat, instead of applying DC electric voltage to the sensor wires, an amount of energy supplied to the sensor wires is decreased while maintaining a signal intensity supplied to the sensor wires, or the signal intensity supplied to the sensor wires is increased while maintaining the amount of energy supplied to the sensor wires. Thereby, a method for measuring a mass flow rate by a thermal type mass flow meter, which can reduce heat generation from the sensor wires while suppressing decrease in measurement accuracy, or can improve measurement accuracy while suppressing increase in heat generation from the sensor wires, is provided.