The present disclosure relates to the technical field of semiconductors, and more particularly to a mass flow controller. The mass flow controller includes an inlet pipeline, an outlet pipeline and a control component. There are multiple inlet pipelines and/or outlet pipelines. One end of each inlet pipeline is an air inlet, and the other end of each inlet pipeline is communicated with each outlet pipeline. Each inlet pipeline is provided with a potential monitoring element. The control component is connected to each potential monitoring element, and the control component controls the gas flow of each inlet pipeline and each outlet pipeline. In order to achieve the purpose of uniform gas supply after uniform mixing of multiple gases, multiple inlet pipelines and multiple outlet pipelines may be provided, and a control component controls the gas flow of each inlet pipeline and outlet pipeline

The disclosure provides a sensing device including a supporting member, a thermal resistance portion, a sensing unit and a heating unit. The supporting member has a supporting surface. The thermal resistance portion is located within the supporting member, wherein a thermal conductivity of the thermal resistance portion is less than a thermal conductivity of the supporting member. The sensing unit is disposed on the supporting surface. The heating unit is disposed on the supporting surface, wherein the heating unit is configured to heat the sensing unit, and an orthogonal projection of the heating unit on the supporting surface overlaps an orthogonal projection of the thermal resistance portion on the supporting surface. In addition, the disclosure also provides a method for manufacturing the sensing device.

A wireless remote monitoring system for biomedical fluid management that uses one or more sensors to detect changes in fluid or air in any container attached to a patient in order to monitor pre-surgical or post-surgical progress or complications. The sensors may be configured to monitor any type of container used to collect fluid or air from the human body, to transmit the sensor signals wirelessly to any number of devices including, but not limited to, cell phones or devices which in turn can send data to a functional repository where it can be analyzed and potentially acted upon by either a central or distributed network of providers.

A thermal mass flow sensor 10 enclosed airtightly in a sealed container 11 under an inert atmosphere for the purpose of suppressing disappearance of a coating layer on sensor wires 13a and 13b in association with use at a high temperature, further comprises an air release pipe 16 that is a pipe which brings an internal space and outside of the sealed container 11 in airtight communication with each other through an air release hole 16a that is a through-hole formed in an outer wall of the sealed container 11. An end of the air release pipe 16 on an opposite side to the air release hole 16a is sealed by plastic deformation to form a sealed part 16b. Thereby, after forming the sealed container 11 under a normal atmosphere, the internal space of the sealed container 11 can be closed airtightly. The sealed part 16b may be further sealed by welding. The sealed container 11 can be assembled easily and accurately in this way, and degradation in airtightness of the sealed container 11 in association with use at a high temperature can be suppressed.

Provided is a thermal flow meter including a measurement tube made of resin having an inlet and an outlet, and an internal flow passage extending along an axis, a sensor substrate having a heating resistance wire and temperature detecting resistance wires formed on a detection surface along the axis, and a reinforcing plate. The sensor substrate is bonded to the measurement tube along the axis with an adhesive, and the reinforcing plate is bonded to the measurement tube along the axis with the adhesive with the internal flow passage interposed between the sensor substrate and the reinforcing plate.

A non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection includes a heater, an ambient temperature sensor and a flow rate sensor which are configured to sense the temperature of a fluid in a conduit, and then monitor the flow of that fluid through the conduit. The fluid flow sensor is incorporated into a Wheatstone bridge circuit, which is used to provide increased sensitivity to the outputs of the sensors, Based upon the ambient temperature sensor readings, the flow rate sensor and heater may be adjusted to optimize the operation of the system to detect leaks. An alternative embodiment utilizes a single sensor and separate heater which work together to determine heat propagation times which in turn is used to calculate flow rate. Based on the sensor readings, the flow may be adjusted to prevent damage and leaks by relieving the system of excess pressure.

A fluid velocity sensor can include a thermally conductive body comprising a first temperature sensor, a second temperature sensor, and a third temperature sensor. A heating element is secured within the fluid velocity sensor to heat the thermally conductive body. The first temperature sensor, the second temperature sensor, and the third temperature sensor each reside within the thermally conductive body at different radial distances from the heating element. A flowrate of a fluid in contact with the fluid velocity sensor is determined based on a comparison between the internal temperatures measured by each of the first, second, and third temperature sensors.

A flow sensor system for detecting the presence or absence of flow of a liquid nutrient formula through a conduit of an enteral feeding system. The flow sensor system includes a channel configured to retain the conduit therein, a heat source disposed at a first location at a first portion of the conduit, and a heat detector disposed at a second location at a second portion of the conduit. The heat source may include an IR LED, and the heat detector may include a thermopile sensor. A method for using the flow sensor system to detect the presence or absence of flow of a liquid nutrient formula through a conduit of an enteral feeding system is also disclosed.

The invention relates to a thermal type flow meter. The flow meter comprises a base part with at least two through bores extending substantially parallel to each other. A flow tube for the medium whose flow is to be determined is provided through the through bores. A part of the flow tube spaced from the base part comprises a measuring tube part where the flow of the medium can be measured. The flow measuring tube comprises an insulating housing connected to the base part, which surrounds at least the measuring tube part of the flow tube. The insulating housing comprises an inner housing surface, which faces the measuring tube part, as well as an outer housing surface, which faces away from the measuring tube part. According to the invention, a cover element connected to the base part is provided, which cover element at least substantially surrounds the insulating housing.

In one embodiment, a modular method of making mass flow controllers for delivery of a plurality of process gases includes providing a plurality of monolithic bases, each of the monolithic bases having a plurality of flow component mounting regions. A first set of flow components are coupled to the flow component mounting regions of a first of the monolithic bases to form a mass flow controller having a first set of operating characteristics. A second set of flow components are coupled to the flow component mounting regions of a second of the monolithic bases to form a mass flow controller having a second set of operating characteristics which are different from the first set of operating characteristics.