Methods and apparatuses associated with an example flow sensing device are provided. In some examples, the flow sensing device may include a flow cap component and a sensor component. In some examples, the flow cap component may include a heating element disposed in a first layer of the flow cap component. In some examples, the sensor component may include at least one thermal sensing element disposed in a second layer of the sensor component. In some examples, the first layer and the second layer are noncoplanar. In some examples, the flow cap component may be bonded to a first surface of the sensor component to form a flow channel. In some examples, the first layer and the second layer may be noncoplanar and separated by the flow channel.

A U-shaped tube is used to measure the mass flow rate of the fluid using both thermal method and the Coriolis principle simultaneously. Two resistant coils are wound on the tube to do the thermal measurement and an excitation coil and two optical sensors are used to do the Coriolis flow measurement. It takes the advantages of both technologies and create a flow sensor which is super accurate, gas type insensitive, long-term stable and fast responsive without too much pressure drop.

A thermal, flow measuring device for ascertaining a mass flow or a flow velocity of a medium in a pipe. The thermal, flow measuring device has at least one measuring transducer with at least a first and a second sensor element. The first sensor element has a pin-shaped metal sleeve, which has a lowest point on a wall of the metal sleeve in the gravitational direction, wherein there is arranged in the metal sleeve at least one heating means, especially a heatable temperature sensor. The heating means is arranged in the metal sleeve and above the aforementioned point in the gravitational direction, in such a manner that the maximum heat input per unit area from the heating means into the medium occurs in the gravitational direction above the point.

A sensor includes a heater, a thermal insulator between two thermometer layers, the heater generating a thermal gradient within the thermal insulator. The thermometers give an indirect measurement of fluid flow around the sensor, based on their temperature readings. The thermometers are flexible layers including gels.

A flow rate sensor includes: a housing made from a resin material and having a bottom base portion and a side wall, at least one surface side of the housing being open; a cover made from a resin material, covering the one surface side of the housing, welded to an upper surface of the side wall of the housing, and defining, with the bottom base portion and the side wall of the housing, an auxiliary passage within which a gas to be measured flows that is taken in from a main passage; and a flow rate detection unit disposed within the auxiliary passage. A protruding portion for height control is provided to one of the housing and the cover at least in a vicinity of the side wall around the flow rate detection unit so as to suppress sinking in of the cover during welding.

A system for metering gas includes a flow sensor and a controller. The flow sensor is disposed in a conduit in fluid connection with a flow of a gas through the conduit. The flow sensor includes a heater and a temperature sensing element, and generates an electrical output based on the flow of the gas. The controller controls operation of the heater and is operable in a pre-measurement mode and multiple measurement modes. The controller in the pre-measurement mode operates the heater at a pre-measurement setting. The controller in the measurement modes operates the heater at corresponding measurement settings that have increased power levels and/or increased operating durations relative to the pre-measurement setting. The controller in the measurement modes is configured to determine a flow rate of the gas based on an amplitude characteristic and/or a temporal characteristic of the electrical output of the flow sensor.

The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter. For example, in one embodiment, a self-validating mass flow controller is disclosed that does not require any software modification to a tool/tool controller in which the mass flow controller is being utilized. In other embodiments, a self-validating mass flow controller is disclosed that does not require any hardware or mechanical changes to an existing mass flow controller. Still, the disclosed embodiments further include a self-validating mass flow controller that is configured to determine valve leak and sensor offset simultaneously for performing real time in-situ correction of a mass flow controller's output for zero offset or zero drift in the presence of valve leak.

A multi-purpose Micro-Electro-Mechanical Systems (MEMS) thermopile sensor able to use as a thermal conductivity sensor, a Pirani vacuum sensor, a thermal flow sensor and a non-contact infrared temperature sensor, respectively. The sensor comprises a rectangular membrane created in a silicon substrate which has a thin polysilicon layer and a thin residual thermal reorganized porous silicon layer both attached on its back side, and configured to have its three sides clamped to the frame formed in the silicon substrate which surrounds and supports the membrane and the other side free to the frame, a cavity created in the silicon substrate, positioned under the membrane and having its flat bottom opposite to the membrane, its three side walls shaped as curved planes and the other side wall shaped as a vertical plane, a heater or an infrared absorber positioned on the membrane, close to and parallel with the free side of the membrane and a thermopile positioned on the membrane and consists of several thermocouples connected in series and having its hot junctions close to the heater and its cold junctions extended to the frame.

A flow rate detecting device according to an aspect of the invention includes a pipe which includes a bent portion and through which fluid is passed; two temperature detecting portions which detect the temperature of the fluid in the pipe; and a temperature changing portion which changes the temperature of the fluid in the pipe at an intermediate position in which distances between each of the two temperature detecting portions and the intermediate position are equidistant. The intermediate position is positioned in the bent portion in the pipe, and the bent portion is formed to be line symmetric with respect to a straight line passing through the intermediate position.

A process fluid flow system includes a first pipe skin sensor and a second pipe skin sensor. The first pipe skin sensor is disposed to measure an external temperature of a process fluid conduit at a first location on the process fluid conduit. The second pipe skin sensor is disposed to measure an external temperature of a process fluid conduit at a second location on the process fluid conduit. Measurement circuitry is coupled to the first and second pipe skin sensors. A controller is coupled to the measurement circuitry and is configured to identify a process fluid flow condition based on signals from the first and second pipe skin sensors and to output an indication of the process fluid flow condition.