Provided is a physical quantity measurement device capable of reducing a frequency analysis error of a gas flow rate as compared with the related art. A physical quantity measurement device 20 includes a flow rate sensor 205 and a signal processing unit 260. The signal processing unit 260 has a buffer 261, an offset adjustment unit 262, a gain calculation unit 263, a correction calculation unit 264, and a frequency analysis unit 265. The buffer 261 stores a flow rate data based on an output signal of the flow rate sensor 205 for a predetermined period. The offset adjustment unit 262 adjusts the zero point of the flow rate waveform. The gain calculation unit 263 calculates a correction gain of the flow rate waveform whose zero point has been adjusted. The correction calculation unit 264 performs the correction by multiplying the flow rate waveform whose zero point has been adjusted by the correction gain. The frequency analysis unit 265 performs a frequency analysis calculation of the corrected flow rate waveform and stores the data obtained by the calculation in the buffer 261. The gain calculation unit 263 calculates the correction gain at which the overflow does not occur in the frequency analysis unit 265.

An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.

An air flow rate measurement device includes a flow rate detection unit, a detected flow rate response compensation unit, a pulsation amplitude calculation unit, a correction value calculation unit, and an error correction unit. The flow rate detection unit detects a detected flow rate. The detected flow rate response compensation unit advances a response time of the detected flow rate and calculating a compensation flow rate which is an output obtained by compensating for a response delay of the detected flow rate. The pulsation amplitude calculation unit calculates a pulsation amplitude correlated with a pulsation amplitude in the detected flow rate. The correction value calculation unit calculates a pulsation correction value which is a value for correcting the compensation flow rate based on the pulsation amplitude. The error correction unit corrects the compensation flow rate based on the pulsation correction value.

In a measurement control device that measures an airflow, an amplitude calculator calculates, by use of an output value of a sensor, a pulsation amplitude that is a difference between a pulsation maximum and an average airflow or a difference between the pulsation maximum and a pulsation minimum. The pulsation maximum is a maximum value of pulsation generated in the airflow, the average airflow is an average value of the pulsation, and the pulsation minimum is a minimum value of the pulsation. A correction parameter acquirer acquires a correction parameter corresponding to the calculated pulsation amplitude by use of a correction characteristic. An airflow corrector corrects the airflow by use of the acquired correction parameter.

Provided is an internal combustion engine control device capable of more appropriately correcting an output value of a flow rate sensor that measures a flow rate of air flowing through an intake flow path of an internal combustion engine, and further reducing an error between a corrected air flow rate and an actual air flow rate as compared to a conventional device. For this purpose, the internal combustion engine control device of the present invention includes an arithmetic device 100 including a fundamental frequency derivation unit 104 that derives a fundamental frequency, a flow rate amplitude calculation unit 107 that extracts a radio frequency of a plurality of frequencies equal to or higher than the fundamental frequency from a pulsation waveform based on the output value of the flow rate sensor as a flow rate radio frequency and calculates an amplitude of the flow rate radio frequency for each frequency, a correction amount derivation unit 108 that derives a correction amount based on the amplitude of the flow rate radio frequency for each frequency, and a flow rate calculation unit 109 that calculates a flow rate of air by using the output value of the flow rate sensor and the correction amount.

An electronic utility gas meter using MEMS thermal mass flow sensor to meter gas custody transfer and MEMS gas thermal property sensor to compensate the metering values due to gas composition variations is disclosed in the present invention. The meter is designed to have a MEMS mass flow sensor to meter the city utility gas consumption independent of environmental temperature and pressure while a MEMS gas thermal property or dual gas thermal property sensors to compensate the tariff due to the gas composition variations for compliance with the current regulation requirements of tariff and remove the major concerns for the wide deployment of the thermal mass MEMS utility gas meters.

A device for measuring the speed or flow of a gas at a temperature different from an ambient temperature is provided, which includes: a first platform suspended by first arms above a support designed to be kept at an ambient temperature, the first arms comprising thermoelectric strips designed to supply a first voltage based on the difference between the temperatures of the first platform and the support; and a processing unit designed to supply the speed or flow measurement on the basis of the first voltage, the gas temperature and the ambient temperature.

A sensor recess portion is provided on a sensor back surface. A membrane portion provided with a detection element forms a bottom surface of the sensor recess portion. A sensor support portion includes a back support portion, a support recess portion, a support hole, and a support recess inner wall surface. The back support portion covers an opening of the sensor recess portion. The support recess portion is provided on a side opposite from a physical quantity sensor. The support hole penetrates the back support portion and communicates with the opening. The support recess inner wall surface extends from the support recess bottom portion and is inclined with respect to a center line of the support hole.

A flow rate measurement system outputs a measurement value which represents a magnitude of a flow rate and a flow direction of a fluid that flows through a particular main passage. The system includes a bypass passage disposed in the main passage, a detection unit disposed in the bypass passage that outputs a detection value corresponding to a magnitude of a flow rate and a flow direction of the fluid flowing through the bypass passage, and a calculation unit that, by using the detection value, calculates the measurement value by compensating as needed for a delay in the change in flow rate in the bypass passage with respect to the change in flow rate in the main passage. The compensation is based on whether a change of flow direction has occurred in the main passage or the bypass passage.

There is disclosed herein a flow sensor comprising: a first substrate comprising an etched portion; a dielectric layer located on the first substrate, where the dielectric layer comprises at least one dielectric membrane located over the etched portion of the first substrate; a first heating element and a second heating element located on or within the dielectric membrane; and a controller coupled with the first heating element and the second heating element. The first heating element and the second heating element are arranged to intersect one another within or over an area of the dielectric membrane. The controller is configured to: take a measurement from the second heating element; determine a calibration parameter using the measurement from the second heating element; take a measurement from the first heating element; and determine a flow rate through the flow sensor using the determined calibration parameter and the measurement from the first heating element.