A spraying apparatus having an improved system for monitoring the flow of a spray nozzle or spray device and sensing malfunctions to the spray device is provided. The spraying apparatus includes sensors to monitor an input or instruction signal and a spray signal. The timing of the signals are analyzed to verify whether the spraying apparatus is opening and closing properly for each spray instruction signal.

A spraying apparatus having an improved system for monitoring the flow of a spray nozzle or spray device and sensing malfunctions to the spray device is provided. The spraying apparatus includes sensors to monitor an input or instruction signal and a spray signal. The timing of the signals are analyzed to verify whether the spraying apparatus is opening and closing properly for each spray instruction signal.

A flow rate control device having a high response accuracy is provided.

A flow rate control device includes a flow sensor measuring a flow rate of a fluid, and a controller adjusting the flow rate where the flow rate of the fluid to be a flow rate set value. The controller includes a control valve changing the flow rate, a drive circuit driving the control valve, a sensor response adjustment circuit adjusting a frequency response of a measured value of the flow sensor, and a first filter attenuating a predetermined frequency band of an output of the sensor response adjustment circuit. The drive circuit, the flow sensor, the sensor response adjustment circuit, and the first filter, configure a feedback loop. A deviation between the flow rate set value and an output of the first filter becomes an input to the drive circuit.

A flow rate control device having a high response accuracy is provided.

A flow rate control device includes a flow sensor measuring a flow rate of a fluid, and a controller adjusting the flow rate where the flow rate of the fluid to be a flow rate set value. The controller includes a control valve changing the flow rate, a drive circuit driving the control valve, a sensor response adjustment circuit adjusting a frequency response of a measured value of the flow sensor, and a first filter attenuating a predetermined frequency band of an output of the sensor response adjustment circuit. The drive circuit, the flow sensor, the sensor response adjustment circuit, and the first filter, configure a feedback loop. A deviation between the flow rate set value and an output of the first filter becomes an input to the drive circuit.

Provided is a thermal flow meter to improve the measurement accuracy of a temperature detector provided in a thermal flow meter. The thermal flow meter includes a bypass passage through which a measurement target gas 30 flowing through a main passage flows, and a circuit package 400 which includes a measurement circuit for measuring a flow rate of the measurement target gas 30 flowing through the bypass passage and a temperature detecting portion 452 for detecting a temperature of the measurement target gas. The circuit package 400 includes a circuit package body which is molded by a resin to internally envelope the measurement circuit and a protrusion 424 molded by the resin. The temperature detecting portion 452 is provided in the leading end portion of the protrusion 424, and at least the leading end portion of the protrusion protrudes to the outside from a housing 302.

Provided is a thermal flow meter to improve the measurement accuracy of a temperature detector provided in a thermal flow meter. The thermal flow meter includes a bypass passage through which a measurement target gas 30 flowing through a main passage flows, and a circuit package 400 which includes a measurement circuit for measuring a flow rate of the measurement target gas 30 flowing through the bypass passage and a temperature detecting portion 452 for detecting a temperature of the measurement target gas. The circuit package 400 includes a circuit package body which is molded by a resin to internally envelope the measurement circuit and a protrusion 424 molded by the resin. The temperature detecting portion 452 is provided in the leading end portion of the protrusion 424, and at least the leading end portion of the protrusion protrudes to the outside from a housing 302.

Provided is a thermal flow meter that can be prevented from being eroded due to adhesion of water or like to a cut end portion of the lead exposed from the mold resin of the circuit package. A thermal flow meter 300 of the present invention is a thermal flow meter having a circuit package 400 formed by mounting a detection element 518 on leads 544 and 545 supported by a support frame 512, sealing with a mold resin, and cutting off the support frame 512, wherein cut end portions 544a and 545a of the leads 544 and 545 exposed from the mold resin of the circuit package 400 by cutting off the support frame 512 is covered by a covering portion 371.

Provided is a thermal flow meter that can be prevented from being eroded due to adhesion of water or like to a cut end portion of the lead exposed from the mold resin of the circuit package. A thermal flow meter 300 of the present invention is a thermal flow meter having a circuit package 400 formed by mounting a detection element 518 on leads 544 and 545 supported by a support frame 512, sealing with a mold resin, and cutting off the support frame 512, wherein cut end portions 544a and 545a of the leads 544 and 545 exposed from the mold resin of the circuit package 400 by cutting off the support frame 512 is covered by a covering portion 371.

A decrease in the accuracy after switching of the heating state can be reduced. The physical quantity detecting device includes: a flow rate detecting unit configured to include a heating element to measure a flow rate of a fluid to be measured; a heating element control unit configured to switch a control state of the heating element to any one of a heating state and a heating suppression state; and a signal processing unit configured to process a measured value of the flow rate detecting unit. When the heating element control unit switches the control state, the signal processing unit processes an estimated value determined based on a measured value of the flow rate detecting unit before the switching for a predetermined period immediately after the switching.

A decrease in the accuracy after switching of the heating state can be reduced. The physical quantity detecting device includes: a flow rate detecting unit configured to include a heating element to measure a flow rate of a fluid to be measured; a heating element control unit configured to switch a control state of the heating element to any one of a heating state and a heating suppression state; and a signal processing unit configured to process a measured value of the flow rate detecting unit. When the heating element control unit switches the control state, the signal processing unit processes an estimated value determined based on a measured value of the flow rate detecting unit before the switching for a predetermined period immediately after the switching.