Mass flow controllers and methods for controlling mass flow controllers are disclosed. A method includes providing a gas through a thermal mass flow sensor of the mass flow controller and processing a sensor signal from the thermal mass flow sensor to produce a flow signal. A total nonlinearity characteristic function is determined based on nonlinearity effects on the flow signal and includes a first and second nonlinearity component function based on a first and second source of nonlinearity respectively. The total nonlinearity characteristic function is calibrated, and the first nonlinearity component function is adjusted responsive to changes in the first source of nonlinearity, after which the total nonlinearity characteristic function is updated. The flow signal is corrected to produce a corrected flow signal using the total nonlinearity characteristic function. A valve of the mass flow controller is controlled using the corrected flow signal and a setpoint signal.

The purpose of the present invention is to provide a highly accurate and highly reliable physical quantity sensor wherein an error due to stress applied to a sensor element of the physical quantity sensor is reduced. This physical quantity sensor device is provided with: a hollow section formed in a Si substrate; an insulating film covering the hollow section; and a heating section formed in the insulating film. The sensor device is also provided with a detection element that detects the temperature of the insulating film above the hollow section, the detection element is provided with a first silicon element and a second silicon element, and the first silicon element and the second silicon element are doped with different impurities, respectively.

The purpose of the present invention is to provide a highly accurate and highly reliable physical quantity sensor wherein an error due to stress applied to a sensor element of the physical quantity sensor is reduced. This physical quantity sensor device is provided with: a hollow section formed in a Si substrate; an insulating film covering the hollow section; and a heating section formed in the insulating film. The sensor device is also provided with a detection element that detects the temperature of the insulating film above the hollow section, the detection element is provided with a first silicon element and a second silicon element, and the first silicon element and the second silicon element are doped with different impurities, respectively.

We disclose herein a fluid sensor for sensing a concentration or composition of a fluid, the sensor comprising a semiconductor substrate comprising a first etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises a first dielectric membrane located over the first etched portion of the semiconductor substrate, a heating element located within the first dielectric membrane, and a first temperature sensing element spatially separated from the heating element. The fluid sensor further comprises a second temperature sensing element within the dielectric membrane, or the heating element may be further configured to operate as a second temperature sensing element. The separation between the second temperature sensing element and the first temperature sensing element introduces a temperature difference between the second temperature sensing element and the first temperature sensing element, such that a differential signal between the first temperature sensing element and the second temperature sensing element is indicative of the concentration or composition of the fluid based on a thermal conductivity of the fluid.

Various examples of methods and systems related to thermistor sensing for measurement of respiration are shown. In one example, a breath sensing system includes a self-heating temperature sensor that can be positioned in respiratory air of a subject and processing circuitry that can monitor operation of the self-heating temperature sensor. Respiratory information associated with physical or physiological properties of the subject can be communicated to a remotely located computing device. Electronic switching circuitry can be included to change operation of the self-heating temperature sensor between a temperature sensing mode and a heated power dissipation sensing mode. The processing circuitry can control switching between the modes. In another example, a method includes monitoring operational conditions of a self-heating temperature sensor positioned in respired air and determining, e.g., breath velocity, breath period, breath volume, breath carbon dioxide level, and heart rate based at least in part upon the operational conditions.

Methods and apparatus for a flow ratio controller are provided herein. In some embodiments, a flow ratio controller includes an inlet; a plurality of channels extending from the inlet to a corresponding plurality of outlets; a bypass pipe extending from each channel of the plurality of channels that diverts a small portion of a flow from that channel and then returns the small portion of the flow back to that channel; and a thermal mass flow meter coupled to the bypass pipe having a first temperature sensor, a second temperature sensor, and a heating element disposed therebetween. A controller is configured to determine a flow rate through each of the plurality of channels based on a measured temperature difference between the first temperature sensor and the second temperature sensor.

Methods and apparatus for a flow ratio controller are provided herein. In some embodiments, a flow ratio controller includes an inlet; a plurality of channels extending from the inlet to a corresponding plurality of outlets; a bypass pipe extending from each channel of the plurality of channels that diverts a small portion of a flow from that channel and then returns the small portion of the flow back to that channel; and a thermal mass flow meter coupled to the bypass pipe having a first temperature sensor, a second temperature sensor, and a heating element disposed therebetween. A controller is configured to determine a flow rate through each of the plurality of channels based on a measured temperature difference between the first temperature sensor and the second temperature sensor.

Described herein are thermal mass flow sensors that combine calorimetric and anemometric (e.g., hot-wire) elements to provide a hybrid approach to determining flow rate of a liquid. The flow probes or flow sensors are configured to use a heater to apply heat to a thermally-conducting material in contact with the flowing liquid, to measure a temperature of the thermally-conducting material upstream of the heater and downstream or at the heater, to adjust power to the heater to achieve a targeted temperature difference, and to determine a flow rate based at least in part on the power supplied to the heater and the measured temperatures. This approach provides flow rate due at least in part to the fluid cooling the thermally-conductive material proportionate to flow rate with non-linear effects. This hybrid approach can provide accurate readings of flow rates of liquids delivered through an IV line to a patient.

The disclosed subject matter relates to a measuring device for measuring the flow velocity of a flowing fluid, comprising a first measuring element, which is configured to measure the flow velocity of the fluid and includes an interface that can be exposed to the flowing fluid, a second measuring element, which is configured to measure a characteristic property of the fluid and includes an interface that can be exposed to the flowing fluid, and an evaluation unit, which is connected to the first and second measuring elements and configured to correct the flow velocity, measured by the first measuring element, by the influence of the property of the fluid, measured by the second measuring element, on the measurement of the flow velocity. The disclosed subject matter furthermore relates to a measuring probe for such a measuring device.

The present disclosure resides in a sensor element for determining a physical, measured variable of a measured medium, comprising: a planar substrate; a functional layer applied on a surface of the substrate; a passivating layer applied on the functional layer; a metal connecting layer applied on the surface of the passivating layer such that the passivating layer is completely covered; and a metal platelet applied on the surface of the metal connecting layer such that no contact can occur between the passivating layer and the measured medium, as well as residing in a thermal flow sensor, which has at least two such sensor elements.