A CMOS-based sensing device includes a substrate including an etched portion and a first region located on the substrate. The first region includes a membrane region formed over an area of the etched portion of the substrate, a flow sensor formed within the membrane region and a pressure sensor formed within the membrane region.

An apparatus and a method for measuring fluid flow parameters. The apparatus can have a plurality of upstream sensors and a plurality of downstream sensors in communication with a computer. By comparing the sensor reading to an ambient condition, or a known fluid characteristic, the presence of fluid can be determined. The computer can utilize measured data from the sensors and known sensor placement to calculate volumetric flow rate and make determinations about equipment health.

We disclose herein a flow and thermal conductivity sensor comprising a semiconductor substrate comprising an etched portion, a dielectric region located on the semiconductor substrate, wherein the dielectric region comprises at least one dielectric membrane located over the etched portion of the semiconductor substrate and a heating element located within the dielectric membrane. The dielectric membrane comprises one or more discontinuities located between the heating element and an edge of the dielectric membrane.

A microfluidic flow sensor may include a substrate having a microfluidic channel, a bubble generator to introduce a bubble into fluid that is directed through the microfluidic channel and a sensor element along the microfluidic channel and spaced from the bubble generator. The sensor element outputs a signal based upon a sensed passage of the bubble with respect to the sensor element. Portions of the microfluidic channel proximate the sensor element have a first size and wherein the bubble generated by the bubble generator is to have a second size greater than one half the first size.

A microfluidic flow sensor may include a substrate having a microfluidic channel, an inert particle source to supply a fluid carrying an inert particle to the microfluidic channel and a sensor element along the microfluidic channel and spaced from the inert particle source. The sensor element outputs a signal based upon a sensed passage of the inert particle with respect to the sensor element. Portions of the microfluidic channel proximate the sensor element have a first size and wherein the inert particle provided by the inert particle source is to have a second size greater than one half the first size.

A gas flow measuring circuit includes at least one reference resistor and at least one variable resistor that varies in accordance with the characteristics of the flow of a gas and means for determination of the difference between the reference resistor and variable resistor, with at least one current loop arrangement including first current source means coupled in series with said reference resistor and second current source means coupled in series with said variable resistor wherein both resistors are connected to ground for providing an ideally constant current through the respective resistor to produce first voltages across the reference resistor and second voltages across the variable resistor, and voltage measuring means for measuring the voltage difference between said reference resistor and said variable resistor to produce a characteristic voltage difference representative of the characteristics of the gas.

To provide an MFC capable of improving an S/N ratio of a sensor signal even when a pressure difference between both sides of the MFC is small and a flow rate in the sensor flow path is low. Provided is a mass flow controller including a fluid flow path that allows a fluid to pass therethrough, a plurality of flow sensor units that measure a mass flow rate of the fluid, an adjusting valve that adjusts a flow rate of the fluid passing through the fluid flow path, and a control unit that controls a degree of open of the adjusting valve. The flow sensor units are each a thermal flow sensor unit. The control unit calculates a mass flow rate from an added output signal obtained by adding the output signals of the plurality of flow sensor units, and controls the degree of open of the adjusting valve.

A device which: optically detects the presence of, measures the flow rate of, and identifies the characteristics of venting fugitive gas emissions. Specifically the device provides a spectral analysis of emission gas constituents; selective detection of the presence of venting hydrocarbons; measurement of venting emissions flow rates, the measurement of shut-in and flowing venting system pressures and the venting system temperatures. The flow rates are corrected, relative to the detection of the gas constituents and standard temperature and pressure (STP). These devices are configured to collect such data electronically and transmit via various telemetry systems, to a secure remote data network for reporting, access, evaluation, real-time monitoring and archiving as required.

A method of electronically deriving a conclusion of a condition of slurry flow in a non-vertical conduit having a conduit wall and which contains a slurry to flow or flowing along the conduit is provided.

Provided herein are improved methods for estimating the flow velocity of a fluid in a vessel. Systems and methods are provided herein related to making and/or refining velocity measurements for flowing fluids, both single and multi-phase fluids, in vessels, such as pipes or conduits, utilizing contrast media property agent variations. In one aspect, this disclosure provides a method of determining a flow velocity of a fluid flow in a vessel including: providing a fluid flow having contrast media, the contrast media having a contrast media property variation; providing a detectable signal corresponding to the contrast media property variation; collecting the detectable signal at an upstream receiver to produce a first received signal; collecting the detectable signal at a downstream receiver to produce a second received signal, the downstream receiver being located downstream of the upstream receiver at a distance (L); filtering the first received signal and the second received signal through a contrast media variant filter to produce a first filtered signal and a second filtered signal; cross-correlating the first filtered signal and the second filtered signal to determine a time shift (t) between the first filtered signal and the second filtered signal; and estimating the velocity of the fluid flow using this relationship vflow=L/t.