A photosensitive circuit, a driving method thereof and an electronic device are disclosed. The photosensitive circuit includes a photosensitive element and a signal acquisition circuit. The photosensitive element is configured to be able to generate a photosensitive voltage signal by changing threshold characteristic of the photosensitive element according to intensity of light incident into the photosensitive element; and the signal acquisition circuit configured to convert the photosensitive voltage signal into a photosensitive current signal.

A photosensitive circuit, a driving method thereof and an electronic device are disclosed. The photosensitive circuit includes a photosensitive element and a signal acquisition circuit. The photosensitive element is configured to be able to generate a photosensitive voltage signal by changing threshold characteristic of the photosensitive element according to intensity of light incident into the photosensitive element; and the signal acquisition circuit configured to convert the photosensitive voltage signal into a photosensitive current signal.

A light sensor having an adaptively controlled gain includes a photoelectric element, an operational amplifier, a comparator, an adaptive gain control circuit, a variable capacitor and a pulse accumulator circuit. The photoelectric element converts light energy into a photocurrent. The operational amplifier outputs an error amplified signal based on a gain multiplied by a voltage difference between an input voltage and a reference voltage. The comparator compares the error amplified signal with a voltage of a reference voltage source to output a comparison signal. The adaptive gain control circuit includes a pulse detector circuit and a gain control circuit. The pulse detector circuit detects the comparison signal and a clock signal to output a pulse detected signal. The adaptive gain control circuit outputs a capacitance modulating signal according to the pulse detected signal. A capacitance of the variable capacitor is modulated according to the capacitance modulating signal.

An electromagnetic radiation detection circuit includes a photodetector transforming the received electromagnetic radiation into an electric current. A readout circuit is coupled to a first terminal of the photodetector and configured to transform a current signal into a voltage signal. A capacitor has a first terminal electrically coupled to the first terminal of the photodetector and a second terminal electrically coupled to the readout circuit. A resistor has a first terminal electrically coupled to the capacitor and to a first terminal of the photodetector. A bias circuit is electrically coupled to a second terminal of the resistor and configured to bias the photodetector during a first time period by means of the resistor.

An electromagnetic radiation detection circuit includes a photodetector transforming the received electromagnetic radiation into an electric current. A readout circuit is coupled to a first terminal of the photodetector and configured to transform a current signal into a voltage signal. A capacitor has a first terminal electrically coupled to the first terminal of the photodetector and a second terminal electrically coupled to the readout circuit. A resistor has a first terminal electrically coupled to the capacitor and to a first terminal of the photodetector. A bias circuit is electrically coupled to a second terminal of the resistor and configured to bias the photodetector during a first time period by means of the resistor.

An optical sensor and a method having a high linearity digital controlling mechanism are provided. An optoelectronic component converts a light energy into a photocurrent. Then, the photocurrent flows to a current mirror and is amplified by a gain to form a charging current by the current mirror to charge a capacitor. A comparator compares a voltage of the capacitor with a reference voltage multiple times to generate a comparison signal. A counter determines a digital value capturing range according to the gain, and counts bit values that fall within the digital value capturing range from the comparison signal to output a counted signal. A noise cancellation processor reduces the digital value capturing range according to the gain, and removes one or more of the bit values that do not fall within the digital value capturing range from the counted signal to output a sensed signal.

An optical sensor and a method having a high linearity digital controlling mechanism are provided. An optoelectronic component converts a light energy into a photocurrent. Then, the photocurrent flows to a current mirror and is amplified by a gain to form a charging current by the current mirror to charge a capacitor. A comparator compares a voltage of the capacitor with a reference voltage multiple times to generate a comparison signal. A counter determines a digital value capturing range according to the gain, and counts bit values that fall within the digital value capturing range from the comparison signal to output a counted signal. A noise cancellation processor reduces the digital value capturing range according to the gain, and removes one or more of the bit values that do not fall within the digital value capturing range from the counted signal to output a sensed signal.

Disclosed are methods and apparatus for inspecting a photolithographic reticle. An inspection tool is used to obtain a plurality of patch area images of each patch area of each die of a set of identical dies on a reticle. An integrated intensity value for each patch area image is determined. A gain is applied to the integrated intensity value for each patch area image based on a pattern sparseness metric of such patch area image and its relative value to other patch area images' pattern sparseness metric. A difference between the integrated intensity value of each patch of pairs of the dies, which each pair includes a test die and a reference die, is determined to form a difference intensity map of the reticle. The difference intensity map correlates with a feature characteristic variation that depends on feature edges of the reticle.

An optical sensing circuit has a plurality of optical sensing units arranged so that the optical sensing circuit is ambient light insensitive or sensitive to light within certain spectrum. The sensitive spectra corresponding to the plurality of optical sensing units are different from one another.

An optical sensing circuit has a plurality of optical sensing units arranged so that the optical sensing circuit is ambient light insensitive or sensitive to light within certain spectrum. The sensitive spectra corresponding to the plurality of optical sensing units are different from one another.