Improved imaging and spectrographic devices and systems, and in particular hyperspectral systems and devices suitable for use in analysis of soils and other geological substances, as well as other types of samples. The hyperspectral systems comprise diffraction gratings and a linear image sensor, and optionally one or more of light sources, lenses, slits, and digital light processors, and corresponding control processors and memory. Among other advantages, the hyperspectral systems and devices enable detailed spectrographic analysis of specific points, regions, and/or areas in analytical samples such as core samples and other types of soil blocks, using visible, infrared, and/or ultraviolet electromagnetic radiation.

An optical element includes an optical block constructed of a first material having a % transmission of at least 50% throughout a spectral range of 300 nm to 2700 nm through at least a thickness of the optical block. The optical block comprises a surface. A grating layer constructed of a second material is disposed on the surface of the optical block, the grating layer comprising a first surface that is directly in contact with the surface of the optical block and a second surface comprising a plurality of diffraction features forming a diffraction grating.

The present disclosure relates to limitation of noise on light detectors using an aperture. One example embodiment includes a system. The system includes a lens disposed relative to a scene and configured to focus light from the scene onto a focal plane. The system also includes an aperture defined within an opaque material disposed at the focal plane of the lens. The aperture has a cross-sectional area. In addition, the system includes an array of light detectors disposed on a side of the focal plane opposite the lens and configured to intercept and detect diverging light focused by the lens and transmitted through the aperture. A cross-sectional area of the array of light detectors that intercepts the diverging light is greater than the cross-sectional area of the aperture.

Disclosed are embodiments of an improved apparatus and system, and associated methods for optically diagnosing a semiconductor manufacturing process. A hyperspectral imaging system is used to acquire spectrally-resolved images of emissions from the plasma, in a plasma processing system. Acquired hyperspectral images may be used to determine the chemical composition of the plasma and the plasma process endpoint. Alternatively, a hyperspectral imaging system is used to acquire spectrally-resolved images of a substrate before, during, or after processing, to determine properties of the substrate or layers and features formed on the substrate, including whether a process endpoint has been reached; or before or after processing, for inspecting the substrate condition.

Optical spectrometers may be used to determine the spectral components of electromagnetic waves. Spectrometers may be large, bulky devices and may require waves to enter at a nearly direct angle of incidence in order to record a measurement. What is disclosed is an ultra-compact spectrometer with nanophotonic components as light dispersion technology. Nanophotonic components may contain metasurfaces and Bragg filters. Each metasurface may contain light scattering nanostructures that may be randomized to create a large input angle, and the Bragg filter may result in the light dispersion independent of the input angle. The spectrometer may be capable of handling about 200 nm bandwidth. The ultra-compact spectrometer may be able to read image data in the visible (400-600 nm) and to read spectral data in the near-infrared (700-900 nm) wavelength range. The surface area of the spectrometer may be about 1 mm.sup.2, allowing it to fit on mobile devices.

The present invention relates to a color control system for controlling, in real time, the color of an article positioned on a moving carrier. The system comprises: an illuminating device configured to illuminate said moving article in successive illuminating cycles, each illuminating cycle comprising successively generating, at a given rate, a given number of lines of light having distinct spectral bands said lines of light being substantially perpendicular to the direction of movement; a detecting device configured to detect the light backscattered by the article successively illuminated by each of said lines of light, such as to generate for each dot of a given number of dots of an observation strip perpendicular to the direction of movement, a number of signals corresponding to the light backscattered by said dot; and a processing unit configured to determine at least one value representative of the color of said dot.

A spectrometer and a metrology system capable of improving spectral performance are provided. The spectrometer includes a collimator lens, a focusing lens, and a spatial light modulator (SLM), wherein light reflected by the SLM is output from an output slit through the focusing lens and a dispersive optical element, and on a second plane perpendicular to a first plane including optical paths of pieces of light dispersed at different angles, an incident slit, the output slit, and a reflective plane have a conjugate relationship.

The invention relates to an optical arrangement, particularly for the detection beam path of a multi-spot scanning microscope, comprising a detection plane, in which a detector is positionable, comprising a dispersive device for spectrally splitting detection light. According to the invention, the optical arrangement is characterized in that a distorting optical unit is present for guiding the detection light into the detection plane, said distorting optical unit being arranged downstream of the dispersive device and upstream of a detection plane, and in that a rotating device is present for the relative rotation of a luminous field of the spectrally separated detection light and the distorting optical unit. The invention additionally relates to a multi-spot scanning microscope and a method for operating a microscope.

Spectral analysis system for capturing a spectrum with an optic that forms an optical path. The spectral analysis system is configured to apply a correction function to a captured spectrum so as to obtain a modified spectrum.

The present application relates to a system for performing time-resolved interferometric spectroscopy of incoming light. In some embodiments, the system includes one or more optical elements, a photo-detector, a capacitance detector, and one or more processors. Upon application of a varying input signal to the one or more optical elements, a change to an optical characteristic is caused resulting in a changing interference pattern produced by the incoming light incident on the one or more optical elements. During the application of the varying input signal, the photo-detector may detect an intensity of light output from the one or more optical elements and the capacitance detector may detect a capacitance of the one or more optical elements.