In one embodiment, a system includes a pump light source configured to produce a pump beam of light at a pump frequency, and a Stokes light source configured to produce: (i) a Stokes beam of light at a Stokes frequency, where the pump and Stokes frequencies are offset by a frequency offset and (ii) a Stokes reference beam of light. The system also includes one or more optical elements configured to: direct the pump and Stokes beams of light to a sample, and collect (i) a Raman signal produced by the sample in response to the pump and Stokes beams of light and (ii) residual light from the Stokes beam of light after the Stokes beam of light has interacted with the sample. The system further includes an optical receiver configured to detect the Raman signal, where the optical receiver includes a probe light source.

A spectroscopic measurement device includes a light source unit configured to irradiate a tablet with light, and a light detection unit configured to measure a spectral characteristic of transmission light transmitted through the tablet, in which the light source unit includes a condensing member configured to condense light emitted from a light source, the condensing member includes a first opening on which the light emitted from the light source is incident, a second opening formed to face the light detection unit and having an opening area smaller than an opening area of the first opening, and a transfer path configured to communicate the first opening and the second opening and transfer light entering the first opening to the second opening, and the transfer path has an inner dimension decreasing from the first opening toward the second opening and includes a wall surface consisting of a reflection surface.

Example embodiments relate to detectors for detecting electromagnetic radiation. One embodiment includes a detector for detecting electromagnetic radiation spanning a range from a first wavelength to a second wavelength. The detector includes an array of funnel elements for propagating electromagnetic radiation from a second plane towards a first plane. Each of the funnel elements includes an entrance end and an exit end. The entrance ends of the array of funnel elements define the second plane. The entrance end is larger than half of the second wavelength in a medium from which the electromagnetic radiation enters the detector. The exit end is smaller than half of the first wavelength of in the medium. The detector also includes an array of photosensitive elements for detecting electromagnetic radiation incident on the array of photosensitive elements. Each funnel element is associated with a photosensitive element. The array of photosensitive elements defines the first plane.

A semiconductor-device inspection apparatus includes a stage configured to allow a measurement target to be placed thereon, an actuator configured to move the stage in a vertical direction, a detector configured to detect a plurality of Raman spectra from scattered light that has been scattered away from the measurement target, and a processor configured to generate a plurality of spectral images for a measurement variable by using the plurality of Raman spectra detected by the detector, wherein the detector is further configured to detect the plurality of Raman spectra at different vertical levels of the measurement target.

A multispectral sensor array can include a combination of ranging sensor channels (e.g., LIDAR sensor channels) and ambient-light sensor channels tuned to detect ambient light having a channel-specific property (e.g., color). The sensor channels can be arranged and spaced to provide multispectral images of a field of view in which the multispectral images from different sensors are inherently aligned with each other to define an array of multispectral image pixels. Various optical elements can be provided to facilitate imaging operations. Light ranging/imaging systems incorporating multispectral sensor arrays can operate in rotating and/or static modes.

According to an aspect of the present inventive concept there is provided a device for polarization dependent imaging, comprising a detector comprising an array of light sensitive elements; a plurality of light propagating units, each comprising: a funnel element having a collecting end and a transmitting end, the funnel element being configured to collect light at the collecting end and propagate the light to the transmitting end; a waveguide having a receiving end and a distributing end, the waveguide being configured to receive the light from the transmitting end at the receiving end and propagate the light to the distributing end, wherein the waveguide is configured to propagate the light through the waveguide in dependence of polarization such that a distribution of the light at different locations of the distributing end is dependent on polarization of the light.

Infrared spectrometer and method of performing infrared spectrometry. In one embodiment, the method comprises the steps of providing a first single pixel detector sensitive to infrared light in a first spectral range; providing an entrance slit for receiving an infrared light signal; disposing a moveable encoding mask between the entrance slit and the first single pixel detector for encoding based multiplexing, the moveable encoding mask comprising at least three adjacent coding sections along an encoding moving direction thereof, each coding section comprising the same coding pattern in a cyclic manner such that a last encoding step of one encoding section is the same as a first encoding step in a next encoding section step; disposing a dispersion and imaging optics between the entrance slit and the moveable encoding mask for dispersing the infrared signal and for imaging the dispersed infrared signal onto the moveable encoding mask; disposing a collection optics between the moveable encoding mask and the first single pixel detector for collecting an encoding based multiplexed version of the infrared signal onto the first single pixel photodetector; selectively allowing only one of at least first and second bands within the first spectral range to be imaged onto respective ones of the coding sections excluding a first coding section along the encoding moving direction of the moveable encoding mask, in a starting position of the moveable encoding mask; and moving the moveable encoding mask in the encoding moving direction for the encoding based multiplexing.

Provided are a meta-surface-based spectral confocal displacement measurement method. The method includes: using micro-nano structures on a meta-surface to allow different wavelengths of broadband parallel light passing through a collimating lens to have different focal lengths to obtain a focal length sequence; determining an arrangement manner of the micro-nano structures according to working phases and a working focal length of the micro-nano structures and a working wavelength of the broadband parallel light; determining the working phases of the micro-nano structures according to a size of each micro-nano structure, the working wavelength of the broadband parallel light, a refractive index of the air, and a refractive index of material of the micro-nano structures; and obtaining spectral signals by a spectrometer to output wavelength sequence data and light intensity sequence data to obtain a measurement result when a measured object is located in the focal length sequence.

Microscopic Raman spectroscopy device that detects and analyzes Raman scattering light emitted from sample irradiated with excitation light includes: laser light source that emits excitation light; spectrometer for measuring spectrum of the Raman scattering light; wavelength discriminator such as a dichroic filter that reflects the excitation light emitted from the laser light source toward the sample and transmits Raman scattering light emitted from the sample toward the spectrometer; condenser lens arranged between wavelength discriminator and the spectrometer for condensing the Raman scattering light passing through the wavelength discriminator; aperture arranged between the condenser lens and the spectrometer for limiting Raman scattering light incident on the spectrometer; adjusting means for adjusting to match a position of spot image of Raman scattering light condensed by condensing lens with a position of the aperture so that light amount of Raman scattering light passing through the aperture is maximized.

A wavelength detection device for an excimer laser includes a first housing accommodating a first etalon; a first heater arranged on an outer wall of the first housing, and configured to heat the first housing; a second housing connected to the first housing, and accommodating a first light concentrating optical system configured to cause light output from the first etalon to be imaged on a first sensor; a second heater arranged on an outer wall of the second housing, and configured to heat the second housing; and a processor configured to control a temperature of the first housing and a temperature of the second housing using the first heater and the second heater.