The invention relates to a measurement device (10) for measuring light (200) from a light source (2), comprising an optical unit (30) with a delay element (31) for splitting a polarized light beam (210) of the light (200) into a first partial beam (211) and a second partial beam (212), which have a defined phase shift relative to one another. Furthermore, the invention relates to a measurement system (1), as well as a measurement method (100).

Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures over a broad range of angles of incidence (AOI), azimuth angles, or both, are presented herein. Spectra including two or more sub-ranges of angles of incidence, azimuth angles, or both, are simultaneously measured over different sensor areas at high throughput. Collected light is linearly dispersed across different photosensitive areas of one or more detectors according to wavelength for each subrange of AOIs, azimuth angles, or both. Each different photosensitive area is arranged on the one or more detectors to perform a separate spectroscopic measurement for each different range of AOIs, azimuth angles, or both. In this manner, a broad range of AOIs, azimuth angles, or both, are detected with high signal to noise ratio, simultaneously. This approach enables high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.

An imager for imaging a plurality of images of a single scene over a plurality of disparate electromagnetic wavelength sets includes front-end optics for outputting a polychromatic, collimated image beam of the scene; a beam displacer configured for splitting the collimated image beam into spatially displaced, mutually parallel beams, and an imaging-sensor array configured for registration of the spatially displaced wavelength sets at disparate locations along the imaging-sensor array. In alternative versions, the beam displacer displaces constituent light beams based on at least one of wavelength and polarization. In various implementations, a back-end focusing element focuses each constituent beam onto a predetermined location along the imaging-sensor array. The imaging-sensor array is optimally configured for simultaneous sampling of the plural images focused thereupon by the back-end focusing elements.

Systems and methods for hyperspectral imaging are described. In one implementation, a hyperspectral imaging system includes a sample holder configured to hold a sample, an illumination system, and a detection system. The illumination system includes a light source configured to emit excitation light having one or more wavelengths, and a first set of optical elements that include a first spatial light modulator (SLM), at least one lens, and at least one dispersive element. The illumination system is configured to structure the excitation light into a predetermined two-dimensional pattern at a conjugate plane of a focal plane in the sample, spectrally disperse the structured excitation light in a first lateral direction, and illuminate the sample in an excitation pattern with the one or more wavelengths dispersed in the first lateral direction.

Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.

A light radiating portion radiates light with wavelength λ1 having predetermined absorptivity for an object and light with wavelength λ2 having smaller absorptivity for the object than the wavelength λ1, to a target, so as to scan in 2-dimensional directions. A light receiving portion receives scattered lights reflected by the target based on light with wavelength λ1 and light with wavelength λ2. A measuring portion generates information used for detection of the object at the target, based on difference between the two scattered lights with wavelength λ1 and wavelength λ2 received by the light receiving portion. An output portion outputs whether or not the object is present at the target, by 2-dimensional area information, based on scanning by the light radiating portion and information generated by the measuring portion.

An optical system operating in the near or short-wave infrared wavelength range identifies an object based on water absorption. The system comprises a light source with modulated light emitting diodes operating at wavelengths near 1090 and 1440 nanometers, corresponding to lower and higher water absorption. The system further comprises one or more wavelength selective filters and a housing that is further coupled to an electrical circuit and a processor. The detection system comprises photodetectors that are synchronized to the light source, and the detection system receives at least a portion of light reflected from the object. The system is configured to identify the object by comparing the reflected light at the first and second wavelength to generate an output value, and then comparing the output value to a threshold. The optical system may be further coupled to a wearable device or a remote sensing system with a time-of-flight sensor.

A method for characterizing terahertz radiation using spectral domain interferometry, comprising overlapping a pump beam and a terahertz beam in a detecting crystal; obtaining two probe pulses by propagating the probe beam into a polarization maintaining single-mode optical fiber after the detecting crystal; and measuring a change in the optical path difference between the two probe pulses. The system comprises a detection crystal, where a terahertz pulse and a probe beam are made to overlap; a polarization-maintaining optical fiber propagating the probe beam after the detection crystal and outputting two probe pulses; and a spectrometer where the two probe pulses interfere.

A total reflection spectroscopic measurement device includes a terahertz wave generation unit, an internal total reflection prism, a detection unit configured to detect the terahertz wave, an electric field vector measurement unit configured to measure an electric field vector of the terahertz wave, and an analysis unit configured to acquire information about an optical constant of the object to be measured. Proportions of S polarization component and P polarization component of the terahertz wave are constant. The analysis unit acquires the information about the optical constant on the basis of a ratio between S polarization component and P polarization component of the measured electric field vector when the object is not arranged on the total reflection surface and a ratio between S polarization component and P polarization component of the measured electric field vector when the object is arranged on the total reflection surface.

A multichannel color measurement instrument for measuring spectral properties of a target comprises pick-up optics to collect measurement light, first and second anamorphic optical paths optically coupled to the pick up optics, a pick-up polarizing element located to polarize measurement light in the second anamorphic optical path, a reference anamorphic optical path including a reference illumination source, and a two-dimensional variable filter sensor having an optically transmissive filter function that varies in a first direction parallel to a surface of the variable filter sensor and is substantially constant in a second direction parallel to a surface of the variable filter sensor and orthogonal to the first direction. The anamorphic optical paths spread the measurement light in the first direction direct it on to different portions of the variable filter sensor.