A metrology system includes an illumination source configured to generate an illumination beam, one or more illumination optics configured to direct the illumination beam to a sample, one or more collection optics configured to collect illumination emanating from the sample, a detector, and a hyperspectral imaging sub-system. The hyperspectral imaging sub-system includes a dispersive element positioned at a pupil plane of the set of collection optics configured to spectrally disperse the collected illumination, a lens array including an array of focusing elements, and one or more imaging optics. The one or more imaging optics combine the spectrally-dispersed collected illumination to form an image of the pupil plane on the lens array. The focusing elements of the lens array distribute the collected illumination on the detector in an arrayed pattern.

A method and system for accurate and precise representation of color for still and moving images, particularly sequences of digitized color images. Spectral and/or extended dynamic range information is retained as images are captured, processed, and presented during color adjustment. Using this extra spectral information, various methodologies for further presenting or processing the color within these images can be optimized. Presentation-device independence is achieved not by attempting to discover a device-independent intermediate representation, but rather by deferring the binding and mapping of color representation onto a presentation device until its actual use.

The arrangement comprises a filter region (10) filtering electromagnetic radiation and a shielding component (20) inhibiting propagation of electromagnetic radiation. The filter region comprises a central filter region (11) and a separate peripheral filter region (13). The shielding component comprises an aperture (21). The aperture is arranged above the central filter region. The central filter region and the peripheral filter region are optimized for different angles of incidence (α, β) and provided for measurements by individual sensor regions (18, 19).

A filter for removing coherent radiation from a source in a field of view, substantially independent of the size of the source, comprises a first reticle 22 located in the path of received light 21, a first lens 23 producing an optical transform of the first reticle 22 at a second reticle 24 located in the image plane of the first lens 23, a second lens 25 producing an optical transform of the second reticle 24 and a third reticle 26 located in the image plane of the second lens 25. The arrangement is such that the spatial transmittance of the third reticle 26 is selected to block at least part of the diffracted image of the first reticle 22 produced in the image plane of the second lens 25 and characteristic of the coherent radiation. Preferably the optical transforms are Fourier Transforms. A monochromatic coherent source in the field of view produces a pattern of diffracted energy in the image plane of the second lens which is independent of the size of the source. Thus, by providing a suitable reticle 26 in the image plane of the second lens light from a coherent source in the field of view can be blocked while polychromatic light is transmitted. The first and second reticles may be periodic picket-fence reticles or different spatial frequencies may be used for the first and third reticles so as to vary the stop-band characteristics of the filter.

A method of operating a hyperspectral imaging device includes receiving a light beam at a liquid crystal retarding device, and driving the liquid crystal retarding device with a pre-computed voltage waveform, wherein the voltage waveform is selected to reach a target optical retardance over time for the liquid crystal retarding device.

Apparatus and methods for acquiring a Raman spectral map of a sample including a material species. The apparatus includes: a pulsed illumination source providing pulsed illumination radiation for exciting the sample and producing scattered radiation; a microscope objective focusing the pulsed illumination radiation onto a region of the sample corresponding to a data point of the map, and collecting emitted radiation from the region; a translation stage translating the sample relative to the microscope objective in at least two directions; a spectral filter spectrally filtering the emitted radiation collected by the objective to obtain a filtered portion of radiation corresponding to a characteristic Raman spectral feature of the material species; a detector receiving the filtered portion and providing output electrical pulses indicative thereof; and readout electronics applying a time gate to the output electrical pulses to distinguish detection events corresponding to the Raman scattered radiation from events associated with photoluminescence.

An apparatus is provided that includes a detector configured to detect, separately during separate exposure periods of multiple exposure periods, spatially modulated light. The apparatus also includes a spatial modulator configured to apply a different spatial modulation to received light separately during separate exposure periods of the multiple exposure periods, to produce spatially modulated light. The apparatus further includes one or more optical elements configured to condense the spatially modulated light for detection by the detector. A system that includes the apparatus and a corresponding method and a computer-readable storage medium are also provided.

Devices and methods to perform Raman spectroscopy with a structured excitation profile to obtain a Raman excitation map. A device includes a broadband light source to emit a broadband light beam and excitation optics to disperse the broadband light beam to strike a sample as incident light according to a structured excitation profile. The device further includes analysis optics to collect scattered light scattered by the incident light striking the sample, block Rayleigh scatter from the collected scattered light in a manner complementary to the structured excitation profile, and direct Raman scatter from the collected scattered light to a sensor to generate a signal to form a Raman excitation map.

A spectrally-shaped source includes a source that generates a round beam. An optical element transforms the round beam to a rectangular beam. An image forming dispersive device angularly disperses wavelengths and images the rectangular beam at a modulation plane. A pixelated SLM is illuminated by the dispersed wavelengths of the rectangular beam such that each column of illuminated pixels is illuminated by a different wavelength. Toroidal optics projects light directed from the SLM to an output plane and focuses the angularly dispersed wavelengths of the beam so that a selected portion of the optical beam is reflected toward the toroidal optic by the SLM. A controller instructs the pixelated SLM to selectively reflect the portion of the optical beam toward the toroidal optic and to selectively reflect another portion of the beam away from the toroidal optic so as to provide a desired spectral shape.

Target devices for characterizing terahertz imaging systems are provided. The target devices include a terahertz resolution pattern having spatially distributed resolution features and one or more prism assemblies configured to provide a variable contrast level within the resolution features when used with terahertz radiation. Each prism assembly includes first and second prisms arranged in a Frustrated Total Internal Reflection (FTIR) configuration.