A spectroscopic autofocusing method and a system for such a method are disclosed. According to one embodiment, a spectroscopic autofocusing method includes applying a plurality of electrical signals to a shape changing lens of a spectroscopy system. The method includes emitting, by an optical source coupled to the spectroscopy system, one or more optical signals directed to a target. The method includes determining, by a detector, one or more power measurements of one or more returned optical signals corresponding to an illuminated area of the target. The method includes aggregating, from the detector, the one or more power measurements, wherein each power measurement corresponds to a respective electrical signal of the plurality of electrical signals applied to the shape changing lens. The method includes determining an optimized electrical signal corresponding to a maximum power measurement indicated by the one or more power measurements.

System for performing chemical spectroscopy on samples from the scale of nanometers to millimeters or more with a multifunctional platform combining analytical and imaging techniques including dual beam photo-thermal spectroscopy with confocal microscopy, Raman spectroscopy, fluorescence detection, various vacuum analytical techniques and/or mass spectrometry. In embodiments described herein, the light beams of a dual-beam system are used for heating and sensing.

Disclosed is an apparatus for light-beam scanning microscopy including a microscope objective and a movement system for moving an excitation light beam. The movement system for moving the excitation light beam includes a first focusing optical component suitable for focusing the excitation light beam in an intermediate focal plane, another focusing optical component suitable for forming an image of the intermediate focal plane in a focal plane of the microscope objective and a single scanning mirror arranged between the first optical component and the intermediate focal plane, the scanning mirror being mounted on a stage, the orientation of which can be adjusted, so as to move the image of the focusing point in two transverse directions in the object focal plane or in the image focal plane of the microscope objective.

A collection system of a semiconductor metrology tool includes a chuck to support a target from which an optical beam is reflected and a spectrometer to receive the reflected optical beam. The collection system also includes a plurality of aperture masks arranged in a rotatable sequence about an axis parallel to an optical axis. Each aperture mask of the plurality of aperture masks is rotatable into and out of the reflected optical beam between the chuck and the spectrometer to selectively mask the reflected optical beam.

The technology provides a spectroscopy system having two or more spectrometers with substantially uniform focal lengths. The spectrometers include a detector that converts optical signals into electrical signals to render spectral data. The spectroscopy system includes a computing device that is electrically coupled to one or more detectors to receive the spectral data and compare the spectral data against other spectral data. The other spectral data originates from spectrometers that have substantially similar focal lengths, slit widths, excitation laser wavelengths, or any combination of these. The technology includes an application server that is communicatively coupled to a second spectroscopy system. The application server includes software that enables data sharing among the two or more spectroscopy systems, including sharing the spectral data and the other spectral data. The application server compares sampled spectral data against stored spectral data to identify a match.

Disclosed herein is a tunable diffraction grating using surface acoustic waves. In some embodiments, the tunable diffraction grating includes a piezoelectric substrate including an interdigital transducer (IDT) region and a delay line region; a plurality of IDT electrodes positioned in the IDT region, wherein the IDT electrodes are each individually addressable such that the voltage applied to each of the electrodes is phase shifted, and wherein the IDT electrodes provide the phase shifted voltage to induce surface acoustic waves in the piezoelectric substrate in a pattern which produce a grating in the delay line region. Advantageously, tunable diffraction gratings have many applications including spectrometers for orbiters and rovers to Mars.

In a spectrometry setup where a first spectral component dominates a second spectral component having a different wavelength, diffraction of the first spectral component as it passes through the optical train of the spectrometer can produce spectral noise that obscures detection of the second spectral component. To reduce the spectral noise, the light from the spectrometer is subject to spatial filtering or interference such that effects of the first spectral component are removed, or at least reduced. The second spectral component can then be more readily detected by a detector after the spatial filtering or interference. In embodiments, the spatial filtering or interference may be provided by a filtering module, which may be installed in existing spectrometry setups or form part of a unitary spectrometry system.

This far-infrared spectroscopy device is provided with: a variable wavelength far-infrared light source that generates first far-infrared light; an illuminating optical system that irradiates a sample with the first far-infrared light; a detecting nonlinear optical crystal that converts second far-infrared light into near-infrared light using pump light, said second far-infrared light having been transmitted from the sample; and a far-infrared image-forming optical system that forms an image of the sample in the detecting nonlinear optical crystal. The irradiation position of the first far-infrared light on the sample does not depend on the wavelength of the first far-infrared light.

There is provided a system comprising an artificial intelligence engine trained to determine a presence of a set of reference contaminants from first spectral imaging data generated on the basis of spectral imaging performed in a training environment. The system comprises at least one communications interface for receiving second spectral imaging data from at least one spectral imaging device deployed in an operating environment remote from the system. The system is configured to determine a reliability level for the presence of contaminants in the second spectral imaging data and to control the at least one spectral imaging device deployed in the operating environment, when the reliability level is insufficient.

The present invention discloses a wavelength-modulable spectrum generator as well as a system and method for measuring concentration of a gas component based thereon. The wavelength-modulable spectrum generator includes a filter plate, a to-be-measured gas box and a light intensity receiving plate. A plate surface of the filter plate is encircled with N filter holes, and a filter lens with a specific refractive index is correspondingly fixedly arranged in each filter hole. A light source mounting position is fixed to a side of an in-light surface of the filter plate. After any light source is mounted at the light source mounting position, lights of the light source irradiate the filter lens. A rotation and deflection driving mechanism is connected with an out-light surface of the filter plate and drives the filter plate to rotate or deflect along the axis according to a preset angle.