Embodiments include a spectral reflectance system comprising a light source. The system includes a platform configured to retain a sample. The system includes an optical director positioned in the optical path between the light source and the platform. The optical director couples light from the light source to the platform. The system includes a detector positioned to receive reflected light from the sample. The detector generates a signal representing the reflected light. The system includes a focusing system coupled to the optical director. In response to the signal the focusing system automatically focuses the light on the sample by controlling a position of the optical director to maximize a strength of the signal.

Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.

A chromatic confocal range sensor optical pen comprises a housing, an in/out optical fiber, a chromatically dispersive lens configuration, a reflected light dividing configuration comprising a lower NA zone and a higher NA zone, and a camera portion. The lens configuration is configured to receive source light from the optical fiber and output focused source light to a workpiece surface with axial chromatic dispersion, and receive reflected light from the workpiece surface and focus at least a portion of the reflected light to the fiber aperture. The reflected light dividing configuration is arranged to divide the reflected light into a measurement portion and an imaging portion. In some embodiments, the lower NA zone directs the imaging portion along an imaging optical path to the image detector, and the higher NA zone directs the measurement portion along a measurement optical path to a point proximate to the fiber aperture.

Systems and methods relating to a multi-slit hyperspectral imager. The imager is configured with multiple slits that are parallel to one another. Each slit produces its own hyperspectral cube and is limited to a specific wavelength range. The multiple slits produce multiple data sets, obtained in quick succession, for the same section of an area to be imaged. In optical spectrometry applications such as trace gas sensing and quantification, this allows for improved measurement precision. The imager may be used for any gas of interest by adjusting the wavelength range to one that contains absorption features of the targeted gas.

Systems and methods relating to a multi-slit hyperspectral imager. The imager is configured with multiple slits that are parallel to one another. Each slit produces its own hyperspectral cube and is limited to a specific wavelength range. The multiple slits produce multiple data sets, obtained in quick succession, for the same section of an area to be imaged. In optical spectrometry applications such as trace gas sensing and quantification, this allows for improved measurement precision. The imager may be used for any gas of interest by adjusting the wavelength range to one that contains absorption features of the targeted gas.

Immersion tip of a probe for Raman spectroscopy comprising a cylindrical body equipped with a collimating optic and/or a window and designed to be immersed in a liquid to be analysed, the cylindrical body consisting of two parts separated by a slit intended to allow the liquid to be analysed to pass through it, the first part being hollow and traversed from a first end by light emission and reception signals, the other end opposite the first being closed by the collimating optic and/or the window, the second part being configured to prevent any reception of stray light other than that passing through the slit and comprising a part made of a light-absorbent material arranged facing the window.

An example system can include a support and two or more sensor elements mounted to the support. Each sensor element can be electrically connected to a common electrical node and may include: a respective quench resistor connected to a respective internal node; and a respective photodiode (PD) connected to the respective internal node; a differentiating element fed by at least one of the photodiodes; a first readout electrode fed by the common electrical node; and a second readout electrode fed by the differentiating element. The common electrical node may be connected to at least one of the quench resistors or at least one of the photodiodes.