G01J3/0243

FABRY-PEROT INTERFERENCE FILTER AND PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER

The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.

LEAKY WAVEGUIDE, SPECTROSCOPIC METHOD, AND SPECTROSCOPE INCLUDING THE LEAKY WAVEGUIDE
20190178713 · 2019-06-13 · ·

A leaky waveguide includes a waveguide configured to propagate light; a defect structure provided on a portion of the waveguide and configured to cause the light propagating in the waveguide to leak outside of the waveguide; and a plurality of detectors provided at predetermined positions adjacent to the defect structure and configured to detect the light leaking from the defect structure. Accordingly, a spectroscope including the leaky waveguide may have a reduced size.

METHOD AND APPARATUS FOR COLOUR IMAGING A THREE-DIMENSIONAL STRUCTURE
20190174110 · 2019-06-06 ·

A device for determining the surface topology and associated color of a structure, such as a teeth segment, includes a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associate color of a structure is also provided.

Confocal displacement sensor
10215631 · 2019-02-26 · ·

To provide a confocal displacement sensor that can prevent deterioration in measurement accuracy due to a spherical aberration of an optical member. The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a pinhole configured to emit detection light by allowing the light emitted from the light source for light projection to pass, an optical member configured to generate an axial chromatic aberration in the detection light emitted via the pinhole and converge the detection light toward the measurement object, a measurement control section configured to calculate displacement of the measurement object on the basis of, in the detection light irradiated on the measurement object via the optical member, detection light passed through the pinhole by being reflected while focusing on the measurement object, and a head housing configured to house the pinhole and the optical member. The optical member includes a first diffraction lens configured to diffract the detection light and a first refraction lens configured to refract the detection light. The first diffraction lens is disposed with a non-diffraction surface exposed from the head housing.

Fluorescence microscope light source apparatus and fluorescence microscope

Disclosed are a fluorescence microscope light source apparatus and a fluorescence microscope capable of obtaining high-luminance light in a wavelength of 500 to 550 nm and having reduced background noise when a sample is observed. The fluorescence microscope light source apparatus to be installed in a fluorescence microscope including an illumination light bandpass filter includes: a laser diode that emits blue light as excitation light; a phosphor that converts the excitation light from the laser diode into illumination fluorescence with a wavelength region of 500 to 550 nm; an optical system that extracts the illumination fluorescence from the phosphor; a first condenser lens that condenses the excitation light onto the phosphor; a light guide body having one end face on which the illumination fluorescence is incident and the other end face from which the illumination fluorescence exits; and a second condenser lens that condenses the illumination fluorescence onto the one end face of the light guide body. A band-elimination filter that blocks or attenuates light, out of the illumination fluorescence, in a wavelength region including a transmission maximum wavelength and including no transmission minimum wavelength in the illumination light bandpass filter is provided on a light path of the illumination fluorescence.

General technical field and state of the art

The present disclosure concerns a broadband hyperspectral imaging spectrophotometer configured to analyze an object and includes an illumination assembly having a source for emitting a light beam and configured so that the light beam scans line by line the object to be analyzed, a focusing mirror, a first mirror folding, and a planar scanning mirror movable in rotation. The illumination assembly, the focusing mirror, the first folding mirror and the planar mirror are arranged to bring the light beam to the object along a line which will be displaced on the object via the scanning mirror. The imaging spectrophotometer further includes two measuring sensors by a distance between the object and the scanning mirror. The focusing mirror is movable in translation to adapt the imager to the measured distance by the measuring sensors.

PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER

A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.

IMAGER AND SPOT SAMPLER WITH TRANSLATABLE STAGE
20240264454 · 2024-08-08 ·

Optical devices that combine imaging with spectral detection usually require bulky or expensive optics or are limited in the spectral measurements that can be made. The disclosed device uses a lens and mirror to provide two image planes: one for a pixelated detector and the other for an optical fiber assembly. The optical fiber assembly may be scanned over most or all of the field of view, or this may be achieved with a fixed fiber assembly and translatable mirror. Multiple fibers may be included in the assembly and multiple measurement or other devices may be connected to the remote ends of the optical fibers.

CONFOCAL DISPLACEMENT SENSOR
20180356284 · 2018-12-13 · ·

To provide a confocal displacement sensor that can prevent deterioration in measurement accuracy due to a spherical aberration of an optical member. The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a pinhole configured to emit detection light by allowing the light emitted from the light source for light projection to pass, an optical member configured to generate an axial chromatic aberration in the detection light emitted via the pinhole and converge the detection light toward the measurement object, a measurement control section configured to calculate displacement of the measurement object on the basis of, in the detection light irradiated on the measurement object via the optical member, detection light passed through the pinhole by being reflected while focusing on the measurement object, and a head housing configured to house the pinhole and the optical member. The optical member includes a first diffraction lens configured to diffract the detection light and a first refraction lens configured to refract the detection light. The first refraction lens is disposed with a non-diffraction surface exposed from the head housing.

LENS ASSEMBLY WITH INTEGRATED LIGHT SOURCE AND SPECTROSCOPIC ANALIZER INCLUDING THE SAME
20180321082 · 2018-11-08 · ·

A lens assembly with an integrate light source includes a light source configured to emit light to an object to be measured, a lens configured to receive light diffused and reflected from inside the object, a through hole formed at a center of the lens, in which the light source is arranged, and an internal light shielding unit arranged between the light source and an inner wall of the through hole, wherein a front portion of the internal light shielding unit protrudes from a surface of the lens toward the object.