A metrology system includes an illumination source to generate an illumination beam, a multi-channel spectral filter, a focusing element to direct illumination from the single optical column to a sample, and at least one detector to capture the illumination collected from the sample. The multi-channel spectral filter includes two or more filtering channels having two or more channel beam paths. The two or more filtering channels filter illumination propagating along the two or more channel beam paths based on two or more spectral transmissivity distributions. The multi-channel spectral filter further includes a channel selector to direct at least a portion of the illumination beam into at least one selected filtering channel to filter the illumination beam. The multi-channel spectral filter further includes at least one beam combiner to combine illumination from the two or more filtering channels to a single optical column.

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

A method of adaptively scanning a selected area that includes selecting an imaging mode, performing a scan of the selected area using the imaging mode, detecting an item of interest, automatically selecting a new imaging mode in response to detecting the item of interest, and performing a scan of the item of interest using the new imaging mode. The imaging mode may determine at least one of a scanning pattern, a scanning speed, and a scanning rate. Spectral data and image data may be gathered and used to detect the item of interest. The method may also include providing a scanning spectrometer system that has a gimbal system configured to provide at least two degrees of freedom to the scanning spectrometer system. The gimbal system may have a spectrometer and a camera each mounted on the gimbal system and configured to gather the spectral data and the image data, respectively.

The present disclosure discloses a tunable fiber scanner for an all-fiber nonlinear microspectrometer, including a scanning fiber, a scanning unit and a driving unit; the scanning unit includes a micro scanning square tube, the scanning fiber is fixed in the center of the micro scanning square tube, and the fiber ferrule is slidable relative to the scanning fiber so as to form an optical fiber cantilever; the spiral regulator controls the scanning fiber to generate lateral movement to obtain a controllable length of the optical fiber cantilever; the driving unit includes a piezoelectric ceramic driver arranged outside the scanner, the piezoelectric ceramic driver applies amplified driving signal to the micro scanning square tube, and the micro scanning square tube receives the amplified driving signal to drive the scanning fiber to scan and drive the optical fiber cantilever to perform resonance scanning.

The present invention provides a wide-filed spectral imaging system including a laser generator, a wavelength adjustment module, an objective lens, and a single-pixel imaging and a spectral separating module. The laser generator is configured to generate a laser excitation beam. The wavelength adjustment module is configured to disperse the laser excitation beam into a plurality of beams of different wavelengths. The objective lens is configured to focus the plurality of beams of different wavelengths on a sample to excite molecules under test in the sample and generate an emission light. The single-pixel imaging and spectral separating module is configured to generate a series of patterns and modulate the emission light with the series of patterns to generate a diffracted beam. The single-pixel imaging and spectral separating module further disperses the wavelength of the diffracted beam, collects light signals of the expanded diffracted beam, and performs a spectral image reconstruction.