A spectrometry system may include an etalon array having a first etalon and a second etalon. The first etalon may be configured to process light to at least generate a first transmission pattern. The first transmission pattern may have at least a first transmission peak corresponding to a first wavelength in an original spectrum of the light. The second etalon may be configured to process the light to at least generate a second transmission pattern. The second transmission pattern may have at least a second transmission peak corresponding to a second wavelength in the original spectrum of the light. The first etalon may have a different thickness than the second etalon in order for the first transmission pattern to have at least one transmission peak that is at a different wavelength than the second transmission pattern. The first transmission pattern and the second transmission pattern may enable a reconstruction the original spectrum of the light.

The present invention discloses a wavelength-modulable spectrum generator as well as a system and method for measuring concentration of a gas component based thereon. The wavelength-modulable spectrum generator includes a filter plate, a to-be-measured gas box and a light intensity receiving plate. A plate surface of the filter plate is encircled with N filter holes, and a filter lens with a specific refractive index is correspondingly fixedly arranged in each filter hole. A light source mounting position is fixed to a side of an in-light surface of the filter plate. After any light source is mounted at the light source mounting position, lights of the light source irradiate the filter lens. A rotation and deflection driving mechanism is connected with an out-light surface of the filter plate and drives the filter plate to rotate or deflect along the axis according to a preset angle.

Spectroscopic chemical analysis methods and apparatus are disclosed which employ deep ultraviolet (e.g. in the 200 nm to 300 nm spectral range) electron beam pumped wide bandgap semiconductor lasers, incoherent wide bandgap semiconductor light emitting devices, and hollow cathode metal ion lasers to perform non-contact, non-invasive detection of unknown chemical analytes. These deep ultraviolet sources enable dramatic size, weight and power consumption reductions of chemical analysis instruments. In some embodiments, Raman spectroscopic detection methods and apparatus use ultra-narrow-band angle tuning filters, acousto-optic tuning filters, and temperature tuned filters to enable ultra-miniature analyzers for chemical identification. In some embodiments Raman analysis is conducted along with photoluminescence spectroscopy (i.e. fluorescence and/or phosphorescence spectroscopy) to provide high levels of sensitivity and specificity in the same instrument.

The invention discloses a hybrid and scanning/snapshot spectral imager operating in both staring-spectral scanning and video snapshot spectral imaging modes. Snapshot spectral imaging operation at a set of selectable critical spectral bands comprise the basis for a machine learning-based estimation and video-rate display of a full hyperspectral cube, without compromising spatial resolution. Operating in the staring-type scanning mode, the disclosed hybrid spectral imager acquires sets of narrow band images at a given tuning step and for a plurality of tuning steps until completing a hyperspectral cube sampling. Scanning operation may be used for optimally configuring snapshot operation, such that redundant information present in the collected spectra is discarded. The disclosed hybrid spectral imager includes embodiments susceptible for miniaturization and low power operation, allowing for their integration into mobile phone and computer platforms. The invention is intended to address applications comprising, at least in part, nondestructive testing, real-time spectral and chemical mapping, noninvasive diagnosis and spectral photography.

Systems and methods for hyperspectral imaging are described. In one implementation, a hyperspectral imaging system includes a sample holder configured to hold a sample, an illumination system, and a detection system. The illumination system includes a light source configured to emit excitation light having one or more wavelengths and a diffractive element. The illumination system is configured to structure the excitation light into a predetermined two-dimensional pattern at a conjugate plane of a focal plane in the sample, spectrally disperse the structured excitation light in a first lateral direction, and illuminate the sample in an excitation pattern with the one or more wavelengths dispersed in the first lateral direction.

An optical device may include a narrowband optical filter to receive a beam of light at a selected angle of incidence, wherein the beam of light is caused to be received by the narrowband optical filter at the selected angle of incidence by a steering element included in the optical device, and output a filtered beam of light associated with the beam of light, wherein a wavelength of the filtered beam of light depends on the selected angle of incidence of the beam of light on the narrowband optical filter. The optical device may include a photodiode to receive at least a portion of the filtered beam of light after the filtered beam of light is outputted by the narrowband optical filter.

A spectrophotometer is provided, which comprises a receiving part diffusing an incident light, a first broadband filter group, and a detector detecting the light having passed through the first broadband filter group, in order to easily select and detect a plurality of lights having specific wavelengths, wherein the first broadband filter group comprises a first broadband filter arranged to have a first angle with respect to an incident direction of light to enable the incident light to pass through a first wavelength band, a second broadband filter arranged to have a second angle, which is different from the first angle, with respect to an incident direction of light to enable the light having passed through the first broadband filter to pass through a second wavelength band, and a first path compensation means for adjusting a path of the light having passed through the second broadband filter to be identical to a path of the light having passed through the first broadband filter, wherein the first broadband filter, the second broadband filter and the first path compensation means are arranged in series with respect to the incident direction of light. Accordingly, it is possible to increase the efficiency of the outputted light compared to the incident light, and to detect a plurality of lights having the desired specific wavelengths at the same time.

Systems and methods for hyperspectral imaging are described. In one implementation, a hyperspectral imaging system includes a sample holder configured to hold a sample, an illumination system, and a detection system. The illumination system includes a light source configured to emit excitation light having one or more wavelengths and a diffractive element. The illumination system is configured to structure the excitation light into a predetermined two-dimensional pattern at a conjugate plane of a focal plane in the sample, spectrally disperse the structured excitation light in a first lateral direction, and illuminate the sample in an excitation pattern with the one or more wavelengths dispersed in the first lateral direction.

A filter device for an optical module for a lab-on-a-chip analysis device, in which the optical module has a light path, includes a support element, a filter support, and a drive device. The support element can be mounted in the optical module. The filter support is arranged so that it can move on the support element. The filter support also has a first filter region and a second filter region. The drive device is configured such that the filter support can move between a first position in which the first filter region is arranged in the light path, and a second position in which the second filter region is arranged in the light path.

A metrology system includes an illumination source to generate an illumination beam, a multi-channel spectral filter, a focusing element to direct illumination from the single optical column to a sample, and at least one detector to capture the illumination collected from the sample. The multi-channel spectral filter includes two or more filtering channels having two or more channel beam paths. The two or more filtering channels filter illumination propagating along the two or more channel beam paths based on two or more spectral transmissivity distributions. The multi-channel spectral filter further includes a channel selector to direct at least a portion of the illumination beam into at least one selected filtering channel to filter the illumination beam. The multi-channel spectral filter further includes at least one beam combiner to combine illumination from the two or more filtering channels to a single optical column.