A system comprising a light source, and a retention device configured to receive and retain a sample for measurement. The system includes a detector. An optical path couples light between the light source, the sample when present, and the detector. An optical objective is coupled to a turret assembly and configured to couple light from the light source to the sample when present, and couple reflected light to the detector. An amplified piezo actuator (APA) assembly is coupled to the turret assembly. A controller is coupled to the APA assembly and configured to automatically control a vertical position of the optical objective using the APA assembly. The detector is configured to output data representing a film thickness and a surface profile of the sample when present.

A Tilted Filter Imaging Spectrometer (TFIS) is designed to be a very small optical spectrometer having very high sensitivity and spectral resolution. These properties suggest the use of the device as a Fraunhofer Line discriminator (FLD) to detect objects that fluoresce in sunlight. According to at least one embodiment of the present invention, the tilted filter imaging spectrometer incorporates at least one dielectric filter, at least one imaging lens structure; and an imaging detector operatively positioned at a focal length of the imaging lens structure, wherein the dielectric filter is operatively positioned at an angle relative to an optical axis of the imaging lens structure. In at least a second embodiment, the tilted filter imaging spectrometer further incorporates at least one Fabry-Perot Etalon, wherein the Fabry Perot Etalon and the dielectric filter are operatively positioned at angles relative to an optical axis of the imaging lens structure.

A metrology system includes an illumination source to generate an illumination beam, a multi-channel spectral filter, a focusing element to direct illumination from the single optical column to a sample, and at least one detector to capture the illumination collected from the sample. The multi-channel spectral filter includes two or more filtering channels having two or more channel beam paths. The two or more filtering channels filter illumination propagating along the two or more channel beam paths based on two or more spectral transmissivity distributions. The multi-channel spectral filter further includes a channel selector to direct at least a portion of the illumination beam into at least one selected filtering channel to filter the illumination beam. The multi-channel spectral filter further includes at least one beam combiner to combine illumination from the two or more filtering channels to a single optical column.

An arrangement for hyperspectral imaging, comprising an imaging sensor (170,270); a band-pass filter element (130,230): at least one imaging optics element (120,160,220,260) configured to form an image on the imaging sensor (170,270); and a first adjustable multi passband filter (150a,255); wherein the first (150a,255) adjustable multi passband filter is configured to be adjusted by tilting.

A system comprising a light source, and a retention device configured to receive and retain a sample for measurement. The system includes a detector. An optical path couples light between the light source, the sample when present, and the detector. An optical objective is configured to couple light from the light source to the sample when present, and couple reflected light to the detector. A controller is configured to automatically control focus and/or beam path of the light directed by the optical objective to the sample when present. The system includes a spatially variable filter (SVF) positioned in the optical path. The SVF is configured to have spectral properties that vary as a function of illuminated position on the SVF.

An optical analysis tool includes an integrated computational element (ICE). The ICE includes a plurality of layers stacked along a first axis. Constitutive materials of the layers are electrically conductive and patterned with corresponding patterns. An arrangement of the patterns with respect to each other is related to a characteristic of a sample.

A system comprising a light source configured to illuminate a sample under measurement. The system includes a detector configured to receive reflected light from the sample, and the detector generates a signal representing the reflected light. A spatially variable filter (SVF) is positioned in the optical path. The SVF is configured to have spectral properties that vary as a function of illuminated position on the SVF.

A spectroscope used for a microspectroscopic system includes: a collimating optical system that causes signal light to be substantially collimated light; spectroscopic optical systems and each of which includes at least one of each of spectral elements and in which a wavelength band for spectral separation varies depending on an incident angle of the signal light; at least one of each of optical receivers that detect the signal light spectrally separated by the spectroscopic optical systems; a mechanism that varies the incident angles of the signal light on the spectral elements; and a controller unit that determines the incident angles of the signal light on the spectral elements in accordance with the wavelength band for spectrally separating the signal light and controls the mechanism so as to attain the incident angles.

An image pickup device, which comprises an optical characteristics changing unit (15), an optical system (45) containing an objective lens (47) and for leading a light from the objective lens to the optical characteristics changing unit, and an image pickup element (52) for receiving a light via the optical characteristics changing unit, wherein the optical characteristics changing unit has two or more dividing units, and has a configuration where one of the dividing units is selectively disposed along an optical path, and the dividing unit has a first region to select a specific wavelength from the light coming from the optical system and a second region where optical characteristics of the light from the optical system are not changed.

Proposed is a spectroscope including a disperser configured to disperse incident signal light, wherein the disperser includes a bandpass filter configured to spectroscopically process the signal light by pivoting according to a driving signal and a light-receiving element configured to receive the signal light spectroscopically processed by bands and output a corresponding electrical signal.