An apparatus includes a base component and collimators housed within the base component. The collimators correspond to collection cylinders for sampling optical emission spectroscopy (OES) signals with respect to locations of a wafer in an etch chamber. The apparatus further includes a guide, operatively coupled to the plurality of collimators, to guide the sampling of the OES signals along paths for sampling the OES signals.

An apparatus includes a base component and collimators housed within the base component. The collimators correspond to collection cylinders for sampling optical emission spectroscopy (OES) signals with respect to locations of a wafer in an etch chamber. The apparatus further includes a guide, operatively coupled to the plurality of collimators, to guide the sampling of the OES signals along paths for sampling the OES signals.

A filter array used in a light detection device, which generates image data corresponding to each of N wavelength bands (N being an integer greater than or equal to 2) included in a specific wavelength range, includes optical filters. The optical filters include various types of optical filters with different light transmittance with respect to each wavelength band. M.sub.i≥0.1 with respect to each wavelength band, where M.sub.i=μ.sub.i−σ.sub.i, μ.sub.i denoting an average value of light transmittance of the optical filters with respect to light having a wavelength included in an i-th wavelength band (i being an integer greater than or equal to 1 and less than or equal to N) of the N wavelength bands, σ.sub.i denoting a standard deviation of the light transmittance of the optical filters with respect to the light having the wavelength included in the i-th wavelength band.

An IR radiator element (1) suitable for use as a miniature infrared emitter (micro-hotplate) in a gas sensor, IR-spectrometer or electron microscope. The micro-hotplate comprises a plate (2) supported by multiple support arms (4). The plate and arms are fabricated as a MEMS device comprising a single contiguous piece of electrically-conducting refractory ceramic such as hafnium carbide (HfC) or tantalum hafnium carbide (TaHfC). Each of the arms (4), in addition to providing structural cantilever support for the plate (2), acts as a heating element for the plate (2). The plate (2) is heated by applying a voltage across the arms (4). The arms (4) may also be shaped to absorb thermomechanical stress which arises during the heating and cooling of the arms and plate. The plate, which may have an area of less than 0.05 mm.sup.2 and a thickness of between 1% and 10% of the largest dimension of the plate (2), for example, can be heated to 4,000 K or more and cooled again with a duty cycle of as little 0.5 ms, thereby permitting pulsed operation at frequencies of up to 2 kHz. Its small size (10-200 μm) and low power consumption (e.g. 10-100 mW) make the micro-hotplate suitable for use in cryogenic applications, in miniaturized devices or in battery-powered devices such as mobile phones.

Tunable MEMS etalon devices comprising: a front mirror and a back mirror, the front and back mirrors separated in an initial pre-stressed un-actuated etalon state by a gap having a pre-stressed un-actuated gap size determined by a back stopper structure in physical contact with the front mirror and back mirrors, the etalon configured to assume at least one actuated state in which the gap has an actuated gap size gap greater than the pre-stressed un-actuated gap size; an anchor structure, a frame structure fixedly coupled to the front mirror at a first surface thereof that faces incoming light, and a flexure structure attached to the anchor structure and to the frame structure but not attached to the front mirror, and a spacer structure separating the anchor structure from the back mirror, and wherein the front mirror and the spacer structure are formed in a same single glass layer.

A colorimetric apparatus has a shutter unit that can shift between a closed position and an open position. The apparatus body has: a shifting member that can shift between a projection position, at which the shifting member projects in a first direction, and a retraction position, at which the shifting member retracts in a second direction; a first pressing member that presses the shifting member in the first direction; and an operation conversion means that converts the shift operation of the shifting member with respect to the apparatus body to the shift operation of the shutter unit. In a state in which the shifting member is at the projection position, the shutter unit is at the closed position. When the shifting member shifts from the projection position to the retraction position, the shutter unit shifts from the closed position to the open position.

A measurement system is provided with an array of laser diodes with one or more Bragg reflectors. At least a portion of the light generated by the array is configured to penetrate tissue comprising skin. A detection system configured to: measure a phase shift, and a time-of-flight, of at least a portion of the light from the array of laser diodes reflected from the tissue relative to the portion of the light generated by the array; generate one or more images of the tissue; detect oxy- or deoxy-hemoglobin in the tissue; non-invasively measure blood in blood vessels within or below a dermis layer within the skin; measure one or more physiological parameters based at least in part on the non-invasively measured blood; and measure a variation in the blood or physiological parameter over a period of time.

Systems, methods, and devices for fluorescence imaging with a minimal area image sensor are disclosed. A system includes an emitter for emitting pulses of electromagnetic radiation and an image sensor comprising a pixel array for sensing reflected electromagnetic radiation, wherein the pixel array comprises active pixels and optical black pixels. The system includes a black clamp providing offset control for data generated by the pixel array and a controller comprising a processor in electrical communication with the image sensor and the emitter. The system is such that at least a portion of the pulses of electromagnetic radiation emitted by the emitter comprises electromagnetic radiation having a wavelength from about 770 nm to about 790 nm.

A combined multi-spectral and polarization (CMSP) sensor is disclosed that enhances contrast-to-noise ratio (CNR). The CMSP sensor comprises a multi-spectral and polarization (MSP) filter, a single focal plane array (FPA), and a controller. The FPA comprises a plurality of detectors and the MSP filter comprises at least a first bandpass filter having a first frequency range and a second bandpass filter having a second frequency range that is distinct from the first frequency range and a first polarization filter having a first polarization value and a second polarization filter having a second polarization value that is distinct from the first polarization value.

A combined multi-spectral and polarization (CMSP) sensor is disclosed that enhances contrast-to-noise ratio (CNR). The CMSP sensor comprises a multi-spectral and polarization (MSP) filter, a single focal plane array (FPA), and a controller. The FPA comprises a plurality of detectors and the MSP filter comprises at least a first bandpass filter having a first frequency range and a second bandpass filter having a second frequency range that is distinct from the first frequency range and a first polarization filter having a first polarization value and a second polarization filter having a second polarization value that is distinct from the first polarization value.