A sensor of thermal patterns of an object, of papillary print sensor type, including a contact surface to apply the object thereon. The sensor includes at least one capsule sealed under vacuum, arranged between a substrate and the contact surface, suited to exchanging heat with the object and to emitting electromagnetic radiation as a function of its temperature; inside each capsule, at least one bolometric plate, to convert incident electromagnetic radiation into heat; at least one optical filter, to stop electromagnetic radiation in the infrared, each capsule being covered by an optical filter; with reading the electrical resistances of the bolometric plates. Such a print sensor offers both good insulation between the substrate and the sensitive elements, and good mechanical strength.

An optical sensor includes a light receiver and a circuit portion electrically connected to the light receiver, and the circuit portion includes a substrate, an electronic component on the substrate, a resin covering the electronic component, and a metal pillar electrically connected to the electronic component and including a portion covered with the resin and a portion exposed from the resin, and the light receiver is located on the circuit.

An optical sensor includes a light receiver, a circuit portion having an electronic component electrically connected to the light receiver, a metal cap covering an upper portion of the light receiver and includes a cavity facing the light receiver, an optical filter in the cavity of the metal cap, and a metal stem connected to the metal cap, and the circuit portion is on the metal stem.

Microbolometer systems and methods are provided herein. For example, an infrared imaging device includes a microbolometer array. The microbolometer array includes a plurality of microbolometers. Each microbolometer includes a microbolometer bridge that includes a first portion and a second portion. The first portion includes a resistive layer configured to capture infrared radiation. The second portion includes a second portion having a plurality of perforations defined therein.

The present invention relates to a blackbody radiation source. The blackbody radiation source comprises a blackbody radiation cavity and a plurality of carbon nanotubes. The blackbody radiation cavity comprises an inner surface. The plurality of carbon nanotubes are located on the inner surface. An extending direction of each of the carbon nanotubes is substantially perpendicular.

In one aspect, the invention provides a nanobolometer cell including a base layer, a dielectric spacer layer above and adjacent to the base layer, an ultrathin silicon film above and adjacent to the spacer layer, and at least one plasmonic optical antenna resonator above and adjacent to the silicon film.

A thermoelectric conversion material contains a matrix composed of a semiconductor and nanoparticles disposed in the matrix, and the nanoparticles have a lattice constant distribution Δd/d of 0.0055 or more.

A thermal pixel configured as an electromagnetic emitter and/or an electromagnetic detector. The thermal pixel comprises a micro-platform suspended with semiconductor nanowires from a surrounding support platform. The nanowires comprise phononic structure providing a decrease in thermal conductivity. In some embodiments, the pixel is structured for operation within a broad bandwidth or a limited bandwidth. Metamaterial and/or photonic crystal filters provide pixel operation over a limited bandwidth. In some other embodiments, the micro-platform comprises a nanotube structure providing a broadband emission/absorption spectral response.

A microelectromechanical infrared sensing device is provided, which includes a substrate, a sensing plate, a reflecting plate, a plurality of first supporting elements, a plurality of second supporting elements and a plurality of stoppers. The second supporting elements are connected to the sensing plate, such that the sensing plate is suspended above the substrate. The reflecting plate is disposed between the substrate and the sensing plate. The first supporting elements are connected to the reflecting plate, such that the reflecting plate is suspended between the substrate and the reflecting plate. When the reflecting plate moves toward the substrate and at least one of the stoppers contacts the substrate or the reflecting plate, the distance between the reflecting plate and the sensing plate increases.

A microelectromechanical infrared sensing apparatus includes a substrate, a sensing plate, a plurality of supporting elements and a plurality of stoppers. The substrate includes an infrared reflecting layer. The sensing plate includes an infrared absorbing layer. The supporting elements are disposed on the substrate, and each of the supporting elements is connected to the sensing plate, such that the sensing plate is suspended above the infrared reflecting layer. The stoppers are disposed between the substrate and the sensing plate. When the sensing plate moves toward the infrared reflecting layer and the stoppers contact both the substrate and the sensing plate, the distance between the sensing plate and the infrared reflecting layer is substantially equal to the height of at least one of the stoppers.