We disclose a chemical sensing device for detecting a fluid. The sensing device comprises: at least one substrate region comprising at least one etched portion; a dielectric region formed on the at least one substrate region, the dielectric region comprising at least one dielectric membrane region adjacent to the at least one etched portion; an optical source for emitting an infra-red (IR) signal; an optical detector for detecting the IR signal emitted from the optical source; one or more further substrates formed on or under the dielectric region, said one or more further substrates defining an optical path for the IR signal to propagate from the optical source to the optical detector. At least one of the optical source and optical detector is formed in or on the dielectric membrane region.

A high-performance Microbolometer that incorporates vanadium oxide (VOx) along with carbon nanotubes (CNTs) or graphene. This Microbolometer, which uses a microbridge comprising Si3N4 and VOx, provides low noise and high dynamic range longwave infrared (LWIR) band detection. Addition of CNTs/graphene provides a high level of performance [low 1/f noise, noise equivalent temperature difference (NETD), and thermal time constant] due to the high temperature coefficient of resistance (TCR) of these materials.

A radiation detector with a substrate and a membrane, which is suspended above the substrate by a spacer is described, wherein the spacer thermally insulates a radiation sensor, which is formed in the membrane, from the substrate. Further, the spacer includes a first layer, which is electrically conducting and contacts a first pole of the radiation sensor and of the substrate, and a second layer, which is electrically conducting and electrically insulated from the first electrically conductive layer and contacts a second pole of the radiation sensor and of the substrate, wherein the second pole differs in polarity from the first pole.

A tunable electromagnetic radiation device that includes a wavelength selective structure comprising a plurality of layers. The plurality of layers includes a compound layer comprising a plurality of surface elements, an electrically isolating intermediate layer, and a continuous electrically conductive layer. The compound layer includes at least one metallic layer or metallic-like layer and at least one dielectric layer and is in contact with a first surface of the electrically isolating intermediate layer. The continuous electrically conductive layer is in contact with a second surface of the electrically isolating intermediate layer. The wavelength selective structure has at least one reflective or absorptive resonance band. The tunable electromagnetic radiation device further includes an electrode in electrical contact with at least one of the compound layer, the electrically isolating intermediate layer, and the continuous electrically conductive layer.

A wavelength selective structure for selectively reflecting or absorbing incident electromagnetic visible or infrared radiation. The wavelength selective structure includes a wavelength selective structure with a plurality of layers, including a compound layer forming a plurality of surface elements, an electrically isolating intermediate layer, wherein the compound layer is in contact with a first surface of the electrically isolating intermediate layer, and a continuous electrically conductive layer in contact with a second surface of the electrically isolating intermediate layer. The compound layer includes at least one metallic layer and at least one dielectric layer. The selective surface has at least one resonance band for selectively reflecting or absorbing visible or infrared radiation based on a resonant electromagnetic coupling between the plurality of surface elements and the continuous electrically conductive layer.

The disclosure includes near-eye optical elements configured to suppress stray infrared light. Infrared light sources illuminate an eyebox area. A combiner layer may receive reflected infrared light and direct the reflected infrared light to a camera.

In a thermal infrared detector having trench structures, at least one sensor element is provided between the trench structures, an etching hole through which the sensor element is hollowed out and thereby thermally insulated is provided in a substrate rear surface or on the periphery of a pixel area, and an opening portion is provided below the pixel area.

An infrared sensor forming an infrared solid-state imaging device includes a sensor element portion disposed in a package. In the sensor element portion, an absorption structure supported on a substrate is provided. The absorption structure has a structure in which a second insulating film, an absorption film, and a first insulating film are stacked on a reflective film. The first insulating film and the second insulating film are formed so as to have a film thickness with which the index of absorption of infrared radiation entering the absorption structure is maximized with consideration given to the energy loss in an optical transmission path to the absorption structure.

Systems, methods, and apparatus for providing an improved electromagnetic radiation sensing micromechanical device to be utilized in high pixel-density pixel sensor arrays. The device includes an improved design for improved and adjustable performance through simple geometric or fabrication means. Furthermore, the design of the device lends itself to simple micromechanical manufacturing procedures. Additionally, the manufacturing procedures include a method to enable high uniformity and high yield sensor arrays. Arrays of the device can be utilized as IR imaging detectors for use in applications such as human presence detection, nonvisual environment monitoring, security and safety, surveillance, energy monitoring, fire detection and people counting.

A method makes an electromagnetic radiation detecting device including at least one thermal detector with an absorbent membrane suspended above a substrate, intended to be located in a sealed cavity. The method includes depositing, on the substrate, a gettering metallic layer including a metallic material with a gettering effect; depositing a carbonaceous sacrificial layer of amorphous carbon on the gettering metallic layer; depositing at least one sacrificial mineral layer on the carbonaceous sacrificial layer; chemical-mechanical planarization of the sacrificial mineral layer; fabricating the thermal detector so that the absorbent membrane is produced on the sacrificial mineral layer; removing the sacrificial mineral layer; and removing the carbonaceous sacrificial layer.