A working machine, movable on a substrate, comprises a sensor arrangement, wherein the sensor arrangement comprises: at least one sensor housing (24) with a sensor accommodation space (26) open via a detecting aperture (30), at least one sensor (28) arranged in the sensor accommodation space (26) of the at least one sensor housing (24), at least one air-supply arrangement (32) for generating an air flow (L) flowing through the sensor accommodation space (26) in the at least one sensor housing (24).

A device for measuring surface temperature of a turbine blade based on a rotatable prism includes a probe, a prism rotating apparatus and an optical focusing apparatus. The prism rotating apparatus and the optical focusing apparatus are located inside the probe. The probe includes a probe outer casing, a probe inner casing, a water-cooled casing pipe, a sapphire window piece, a quartz prism, a light pipe, a collimating lens, a focusing lens and an infrared array detector. The prism rotating apparatus includes a rotary motor, a worm, a gear and a prism rotary table, the rotary motor rotates to drive the prism rotary table to rotate. The optical focusing apparatus includes a telescopic motor, a coupler, a lead screw and a drive rod, the telescopic motor rotates to drive the lead screw, so as to further drive the drive rod to move along the slot.

A method and an apparatus for determining the heating state of an optical element in a microlithographic optical system involves at least one contactless sensor which is based on the reception of electromagnetic radiation from the optical element. The radiation range captured by the sensor is varied for the purposes of ascertaining a temperature distribution in the optical element.

To provide an image forming apparatus whose detection range of a person by using a pyroelectric sensor is adjustable without adjusting sensitivity of the pyroelectric sensor, an image forming apparatus includes: an image forming apparatus main body; and a pyroelectric sensor that detects presence of a person based on light received from the periphery of the image forming apparatus main body, wherein the pyroelectric sensor is rotatably mounted to the image forming apparatus main body.

A method of detecting defects in a composite structure includes applying heat to a surface of a composite structure. Thermographic images or frames captured by a moving camera may be utilized to corm temporally aligned images that include temperature data (pixels) from a plurality of frames, wherein the pixels comprise data captured at a simple (uniform) time delay from the time at which heat was applied. The temporally aligned thermographic data for the surface region may include variations due to differences in thermal transients caused by defects in the composite structure. The variations in the thermographic data may be utilized to detect one or more defects in the composite structure.

A system and method for nondestructive inspection of a unitized composite structures is provided. The system includes an infrared thermographic camera and a carriage that can be mounted on, for example, adjacent frames of the unitized composite structure. The carriage can move along the length of the frames while the infrared thermographic camera collects and analyzes thermographic images of the frame, skin, and stiffeners. The carriage can be moved to other frames and the inspection continued until the entire unitized composite structure has be inspected.

Apparatus and methods are disclosed for highly accurate remote measurement of sea surface skin temperature. Thermal band 8 to 14 micron images of the surface of the ocean taken by a downward looking infrared camera are processed to determine the optimum segments of the image to utilize. The influence of contaminating reflection of the downwelling flux from the sky and other error sources are removed and from the data and/or otherwise corrected for making sea surface temperature accuracy within several tenths of a degree possible.

Methods and apparatus for processing a substrate are provided. The apparatus, for example, can include a process chamber comprising a chamber body defining a processing volume and having a view port coupled to the chamber body; a substrate support disposed within the processing volume and having a support surface to support a substrate; and an infrared temperature sensor (IRTS) disposed outside the chamber body adjacent the view port to measure a temperature of the substrate when being processed in the processing volume, the IRTS movable relative to the view port for scanning the substrate through the view port.

Aspects of the present disclosure include a PIR assembly including a dome comprising a plurality of optical components, a stationary circuit board, and a moveable PIR sensor moveably coupled to the stationary circuit board via a flexible cable, wherein the moveable PIR sensor is configured to move to a first position to monitor a first zone via a first optical component of the plurality of optical components and to a second position to monitor a second zone via a second optical component of the plurality of optical components.

Methods and apparatus for processing a substrate are provided. The apparatus, for example, can include a process chamber comprising a chamber body defining a processing volume and having a view port coupled to the chamber body; a substrate support disposed within the processing volume and having a support surface to support a substrate; and an infrared temperature sensor (IRTS) disposed outside the chamber body adjacent the view port to measure a temperature of the substrate when being processed in the processing volume, the IRTS movable relative to the view port for scanning the substrate through the view port.