Patent classifications
G01J5/068
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of a thin film stack forming an electronic component. The thin film stack comprises an (optional) isolation layer, a metal layer forming an electrode, a sensor, a heater, a transistor or a logic device, and a top isolation layer.
In-ear health monitoring
This document describes techniques for, and systems that enable, in-ear health monitoring. The techniques described herein enable early detection of health conditions (e.g., contagious disease) through use of an in-ear health-monitoring and audio device. These techniques prompt a user, often through the user's smart phone, to listen to audio content through the device, which also takes the user's temperature. Through repetitive use, the techniques are capable of determining a temperature differential for the user, which aids in early detection of a contagious disease or other malady.
Method to modulate the sensitivity of a bolometer via negative interference
A semiconductor sensor system, in particular a bolometer, includes a substrate, an electrode supported by the substrate, an absorber spaced apart from the substrate, a voltage source, and a current source. The electrode can include a mirror, or the system may include a mirror separate from the electrode. Radiation absorption efficiency of the absorber is based on a minimum gap distance between the absorber and mirror. The current source applies a DC current across the absorber structure to produce a signal indicative of radiation absorbed by the absorber structure. The voltage source powers the electrode to produce a modulated electrostatic field acting on the absorber to modulate the minimum gap distance. The electrostatic field includes a DC component to adjust the absorption efficiency, and an AC component that cyclically drives the absorber to negatively interfere with noise in the signal.
CONTACT-TYPE SENSOR
The present invention limits measurement error and sensor element damage. When a contact-type sensor (200) is placed in contact with skin (10), a gap (200a) is formed between the skin (10) and a sensor element (214). The contact-type sensor (200) is provided with a water-repellent resin base plate (212) and a water-absorbing sheet (211) that, together with the skin (10) and the sensor element (214), surround the gap (200a).
IR sensor for IR sensing based on power control
A semiconductor device for measuring IR radiation is disclosed. It comprises a substrate and a cap enclosing a cavity, a sensor pixel in the cavity, comprising a first absorber for receiving said IR radiation, a first heater, first temperature measurement means for measuring a first temperature; a reference pixel in the same cavity, comprising a second absorber shielded from said IR radiation, a second heater, and second temperature measurement means for measuring a second temperature; a control circuit for applying a first/second power to the first/second heater such that the first temperature equals the second temperature; and an output circuit for generating an output signal indicative of the IR radiation based on a difference between the first and second power.
INFRARED IMAGING DEVICE AND METHOD OF UPDATING FIXED PATTERN NOISE DATA
A noise data update processing unit calculates the amount of a fixed pattern noise component on the basis of a detection signal of infrared rays detected by an infrared detector in a state where an optical system is controlled to be in a non-focused state, and updates an FPN data storage unit with the calculated amount of the FPN component. The noise data update processing unit calculates an average value of detection signals of each detector element and a plurality of peripheral detector elements, and calculates a signal component dependent on incident infrared rays included in the detection signal of each detector element by subtracting an average value of fixed pattern noise data before update from the calculated average value. The amount of the fixed pattern noise component is calculated by subtracting the calculated signal component from the detection signal of each detector element.
Method for monitoring and control of torrefaction temperature
The invention relates to a method and an arrangement for precise monitoring and control of torrefaction temperature, which enables accurate control of the quality and properties of the torrefied material. The method includes determining the surface temperature of the biomass in the torrefaction arrangement is using an IR-thermometer and hot nitrogen gas a purge gas.
Camera, computer program and method for measuring thermal radiation and thermal rates of change
A camera, computer program, and method for determining and displaying temperature rates of change for regions within the camera's field of view. More specifically, the embodiments provide for the continuous, real-time temperature measurement and display of a plurality of objects within the camera's field of view, and further for the real-time processing and display of the temperature rates of change for the region.
TEMPERATURE SENSOR, DEVICE USING SAME, AND TEMPERATURE MEASUREMENT METHOD
A temperature sensor includes a first infrared measuring means, a second infrared measuring means, and a calculating unit. The first infrared measuring means measures infrared rays emitted from an object and outputs a first voltage. The second infrared measuring means measures infrared rays emitted from around the object and outputs a second voltage. The calculating unit calculates the output temperature of the object from the first voltage, calculates the ambient temperature of the object from the second voltage, and corrects the output temperature based on the ambient temperature to calculate the temperature of the object.
INFRARED IMAGING DEVICE, FIXED PATTERN NOISE CALCULATION METHOD, AND FIXED PATTERN NOISE CALCULATION PROGRAM
An infrared imaging device includes an imaging element including a plurality of infrared detection pixels which are two-dimensionally arranged, a diaphragm, and a FPN calculation unit which acquires a first captured image data obtained by capturing an image using the imaging element in a state in which an F-number of the diaphragm is set to a first value and a second captured image data obtained by capturing an image using the imaging element in a state in which the F-number is set to a second value while a motion picture is being captured, and calculates fixed pattern noise included in captured image data obtained by capturing an image using the imaging element based on the acquired first captured image data, the acquired second captured image data, the first value, and the second value.