The invention relates to a device for the spectrally resolved detection of optical radiation (5) during a thermal process, more particularly during laser processing. The device comprises at least two elements (4.1, 4.2) which are light-sensitive in one 5 predefined wavelength range each, a reflective diffraction grating (2), and at least one lens (3) for focusing and collimation. The device optionally comprises a reflective beam splitter (1) designed to divide the incident optical radiation (5) into a plurality of partial beams (5.1, 5.2). Said reflective beam splitter (1) is disposed upstream of the at least one lens (3) along the propagation direction of the optical radiation (5). The partial beams (5.1, 5.2) are spectrally split by means of the diffraction grating (2), and at least the first order of diffraction is deflected back through the at least one lens (3) onto one of the light-sensitive elements (4.1, 4.2).

A system and method for evaluating a burn test includes using an optical sensor system to detect an infrared reflection of a flame on a test piece and using a computer to capture initiation of fire damage to the test piece using the infrared reflection and to capture the fire damage though cessation of the fire damage using the infrared reflection.

The present disclosure relates to a bolometer pixel and a bolometer array. The bolometer pixel includes: a substrate; an absorber configured to absorb incoming light in a predetermined wavelength range and having a central absorbent body that floats above the substrate by supports; and a reflector having a reflective layer provided on the substrate to reflect light incident on the substrate, and a pattern layer provided on the reflective layer to have lens power to concentrate the incident light onto the central absorbent body.

A system may include a camera, wherein the camera comprises at least a camera lens and a camera body, and wherein the camera lens and the camera body are oriented at an angle to a viewport and a source of radiation. A system may include a first surface mirror or second surface mirror operably placed in front of the camera lens, and wherein a surface of the first surface mirror or second surface mirror is coated with a reflective material. A system may include shielding, wherein the shielding protects the camera from gamma radiation.

Embodiments of the present disclosure relate to substrate processing systems, methods, and related apparatus and chambers for detecting processing shifts. In one or more embodiments, a system for processing substrates includes a chamber body. The system includes one or more heat sources operable to heat a processing volume, a substrate support disposed in the processing volume, and a sensor operable to measure an emissivity in the processing volume. The system includes a controller including instructions that, when executed by a processor, cause a plurality of operations to be conducted. The plurality of operations include analyzing the measured emissivity for a time period. The analyzing includes generating a signal profile of the measured emissivity over the time period. The plurality of operations include detecting a shift in the signal profile along a shift section of the signal profile and adjusting a process parameter in response to the detection of the shift.

A water-mist-penetrating three-wavelength temperature measurement device and method for a high-temperature environment, the device including a housing, a three-waveband beam splitting detection module and a computing unit, the housing provided with an optical aperture, the three-waveband beam splitting detection module arranged in the housing, and including a trichroic prism, three radiation detection assemblies, the trichroic prism able to receive the light signals entering via the optical aperture, and emit radiation signals having different wavelength bands through three emission faces, respectively; the three radiation detection assemblies able to receive radiation signals having different wavelength bands emitted from corresponding emission faces, and convert them into electrical signals, respectively; the computing unit able to receive the electrical signals, and perform calculation and analysis to determine a temperature value of a target to be measured; the method including: temperature measurement data acquisition, data fusion, parameter tuning, and model application.

An imaging device is specified, the imaging device including a detector array a plurality of pixels, the pixels including a plurality of subpixel types, a micromirror array with a plurality of mirror elements, and an internal light source, wherein at least one of the subpixel types is configured to detect a first radiation; the mirror elements are configured to deflect in response to a second radiation, the internal light source is configured to illuminate the detector array with a third radiation; at least one of the subpixel types is configured to detect the third radiation deflected by the micromirror array. Furthermore, a method of multi-spectral imaging is specified.

An optical accessory for training a flame detector is disclosed. The optical accessory comprises a body defining a first opening and a second opening, the first opening and the second opening being positioned at opposite ends of body. Further, a plurality of reflector plates positioned within and moveably coupled to the body, each reflector plate being configured to move from a first orientation to a second orientation relative to the body. When each reflector plate is positioned in the first orientation, the plurality of reflector plates are configured to receive infrared waves from the first opening of the body and reflect the infrared waves towards the second opening of the body. And when each reflector plate is positioned in the second orientation, the plurality of reflector plates are configured to allow infrared waves to travel along a linear path from the first opening to the second opening of the body.