Optical microcavity resonance measurements can have readout noise matching the fundamental limit set by thermal fluctuations in the cavity. Small-heat-capacity, wavelength-scale microcavities can be used as bolometers that bypass the limitations of other bolometer technologies. The microcavities can be implemented as photonic crystal cavities or micro-disks that are thermally coupled to strong mid-IR or LWIR absorbers, such as pyrolytic carbon columns. Each microcavity and the associated absorber(s) rest on hollow pillars that extend from a substrate and thermally isolate the cavity and the absorber(s) from the rest of the bolometer. This ensures that thermal transfer to the absorbers is predominantly from radiation as opposed to from conduction. As the absorbers absorb thermal radiation, they shift the resonance wavelength of the cavity. The cavity transduces this thermal change into an optical signal by reflecting or scattering more (or less) near-infrared (NIR) probe light as a function of the resonance wavelength shift.

An optical detector device includes a housing with a projecting neck that is closed off towards the outside by a light-transmissive pane, under which at least one optical waveguide that tapers in the direction of an optical sensor is disposed. An optical waveguide arrangement has a plurality of optical waveguides which are retained in the neck by a holding mechanism.

A photonic device has a substrate with one or more optical resonators having a first resonant frequency response relative to temperature and a different second resonant frequency response relative to temperature. A first waveguide optically couples a first light beam having a first frequency to a first optical resonator and a second waveguide optically couples a second light beam having a second frequency to a second optical resonator. An optical shifter may shift an optical characteristic of the second light beam. A detector converts output light from the photonic device into an electric signal having a characteristic indicative of a physical condition, such as temperature, of the photonic device. In some cases, output light from the one or more optical resonators is combined and a temperature of the photonic device is determined from a beat frequency in the combined light. One or more multimode optical resonators may be used.

An optical component for an interferometric imaging device, which comprises: an object arm, including a first planar waveguide and a first diffraction grating formed in the first planar waveguide and capable of extracting light from the object arm; a reference arm, comprising a second planar waveguide and a second diffraction grating formed in the second planar waveguide and capable of extracting light from the reference arm; wherein the optical component is configured such that, in use with an optically reflective surface extending parallel to the plane of the optical component between the object arm and the reference arm, at least part of the light extracted from the object arm interferes with at least part of the light extracted from the reference arm.

An optical component for an interferometric imaging device, which comprises: an object arm, including a first planar waveguide and a first diffraction grating formed in the first planar waveguide and capable of extracting light from the object arm; a reference arm, comprising a second planar waveguide and a second diffraction grating formed in the second planar waveguide and capable of extracting light from the reference arm; wherein the optical component is configured such that, in use with an optically reflective surface extending parallel to the plane of the optical component between the object arm and the reference arm, at least part of the light extracted from the object arm interferes with at least part of the light extracted from the reference arm.

An infrared sensor module and a forehead thermometer are provided. The infrared sensor module includes a light guide structure and an infrared sensor element. An annular hollow space is formed inside the light guide structure and passes therethrough. A first and second opening is formed on two opposite sides of the light guide structure, respectively. A diameter of the first opening is greater than a diameter of the second opening. The annular hollow space includes a matte and reflective area, the matte area has serration portions, and each of the serration portions extends from the first opening to the second opening and is arranged parallel to each other. The reflective area is formed between the second opening and the matte area. The infrared sensor element is disposed at the second opening. The forehead thermometer includes a casing, a circuit board, the infrared sensor module, and an operating switch.

Embodiments of the present disclosure generally relate to apparatus for processing a substrate, and more specifically to reflector plates for rapid thermal processing. In an embodiment, a reflector plate assembly for processing a substrate is provided. The reflector plate assembly includes a reflector plate body, a plurality of sub-reflector plates disposed within the reflector plate body, and a plurality of pyrometers. A pyrometer of the plurality of pyrometers is coupled to an opening formed in a sub-reflector plate. Chambers including a reflector plate assembly are also described herein.

An apparatus for measuring a temperature of an assembly that is internal to a process chamber. The apparatus may include a light pipe positioned between a lamp radiation filtering window and the assembly, the light pipe has a first end with a bevel configured to redirect infrared radiation emitted from the assembly through the light pipe and has a second end distal to the first end, an optical assembly configured to collimate, filter, and focus infrared radiation from the second end of the light pipe, an optical detector configured to receive an output from the optical assembly and generate at least one signal representative of the infrared radiation, a temperature circuit that transforms the at least one signal into a temperature value, and a controller that is configured to receive the temperature value and to make adjustments to other process parameters of process chamber based on the temperature value.

An infrared detector includes a substrate in which a void is formed, a micro-resonator suspended over the void, an infrared absorber on an upper surface of the micro-resonator, a thermal isolation bridge supporting the micro-resonator, a first waveguide optically coupled with the micro-resonator, a second waveguide intersecting the first waveguide and optically coupled with the micro-resonator, a light source optically coupled with the first waveguide, and a photodetector optically coupled with the second waveguide.

An optical component for an interferometric imaging device, which comprises: an object arm, including a first planar waveguide and a first diffraction grating formed in the first planar waveguide and capable of extracting light from the object arm; a reference arm, comprising a second planar waveguide and a second diffraction grating formed in the second planar waveguide and capable of extracting light from the reference arm; wherein the optical component is configured such that, in use with an optically reflective surface extending parallel to the plane of the optical component between the object arm and the reference arm, at least part of the light extracted from the object arm interferes with at least part of the light extracted from the reference arm.