G01J5/0831

TEMPERATURE ESTIMATION DEVICE, TEMPERATURE ESTIMATING METHOD, AND TEMPERATURE ESTIMATING PROGRAM
20210396587 · 2021-12-23 · ·

A temperature estimation device (100) is provided with: an acquiring section (131) that acquires a photographed image photographed by a photographing section (110) including an infrared light sensor and a housing; a generating section (132) that corrects the photographed image with use of a correction parameter and a temporarily set temperature of the housing to generate a corrected image of the photographed image, the correction parameter that is calculated by prior temperature calibration with respect to the photographing section (110); and an estimating section (135) that estimates a temperature of the housing on the basis of non-uniformity of luminance values of pixels included in the corrected image.

Sequential beam splitting in a radiation sensing apparatus
11371890 · 2022-06-28 · ·

Systems, methods, and apparatuses for providing electromagnetic radiation sensing using sequential beam splitting. The apparatuses can include a micro-mirror chip having a plurality of light reflecting surfaces, an image sensor having an imaging surface, and a beamsplitter unit located between the micro-mirror chip and the image sensor. The beamsplitter unit includes a plurality of beamsplitters aligned along a horizontal axis that is parallel to the micro-mirror chip and the imaging surface. The beamsplitters implement the sequential beam splitting. Because of the structure of the beamsplitter unit, the height of the arrangement of the micro-mirror chip, the beamsplitter unit, and the image sensor is reduced such that the arrangement can fit within a mobile device. Within a mobile device, the apparatuses can be utilized for human detection, fire detection, gas detection, temperature measurements, environmental monitoring, energy saving, behavior analysis, surveillance, information gathering and for human-machine interfaces.

DETECTION SYSTEMS WITH SPATIAL SPECIFICITY AND METHODS OF DETECTING FLAME OR GAS WITH SPATIAL SPECIFICITY
20220187132 · 2022-06-16 ·

A detection system includes a photodetector, a spatial light modulator (SLM) device optically coupled to the photodetector, and a controller. The controller is operatively connected to the SLM device and is disposed in communication with the photodetector and a memory. The memory has instructions recorded on the memory that cause the controller to communicate a SLM pattern sequence to the SLM device, modulate illumination incident on the SLM device according to the SLM pattern sequence to generate an illumination pulse sequence, and receive an intensity-time profile from the photodetector corresponding to the SLM pattern sequence. The instructions also cause the controller to signal, with spatial specificity, presence of flame or gas when the intensity-time profile indicates that flame or gas is present within a field of view of the detection system. Detection methods and computer program products are also described.

DETECTION SYSTEMS WITH SPATIAL SPECIFICITY AND METHODS OF DETECTING FLAME OR GAS WITH SPATIAL SPECIFICITY
20220187132 · 2022-06-16 ·

A detection system includes a photodetector, a spatial light modulator (SLM) device optically coupled to the photodetector, and a controller. The controller is operatively connected to the SLM device and is disposed in communication with the photodetector and a memory. The memory has instructions recorded on the memory that cause the controller to communicate a SLM pattern sequence to the SLM device, modulate illumination incident on the SLM device according to the SLM pattern sequence to generate an illumination pulse sequence, and receive an intensity-time profile from the photodetector corresponding to the SLM pattern sequence. The instructions also cause the controller to signal, with spatial specificity, presence of flame or gas when the intensity-time profile indicates that flame or gas is present within a field of view of the detection system. Detection methods and computer program products are also described.

SPECTRAL IMAGE CAPTURING USING INFRARED LIGHT AND COLOR LIGHT FILTERING

In some aspects, a spectral image capturing device may receive, from a filter array, visible light and infrared light, wherein the filter array includes a quantity of color filters to block the infrared light and pass the visible light and a quantity of infrared filters to block the visible light and pass the infrared light. The spectral image capturing device may produce, using an image sensor that includes an array of pixel sensors, a spectral image based at least in part on the visible light and the infrared light passed by the filter array. Numerous other aspects are provided.

THERMISTOR ELEMENT AND ELECTROMAGNETIC WAVE SENSOR

A thermistor element includes a thermistor film, a first electrode provided in contact with one surface of the thermistor film, and a pair of second electrodes provided in contact with the other surface of the thermistor film, wherein the thermistor film includes an oxide having a spinel crystal structure and having a [111] preferred orientation in a film thickness direction.

THERMISTOR ELEMENT AND ELECTROMAGNETIC WAVE SENSOR

A thermistor element includes a thermistor film, a first electrode provided in contact with one surface of the thermistor film, and a pair of second electrodes provided in contact with the other surface of the thermistor film, wherein the thermistor film includes an oxide having a spinel crystal structure and having a [111] preferred orientation in a film thickness direction.

Method and device for determining the heating state of an optical element in an optical system for microlithography

A method and an apparatus for determining the heating state of an optical element in a microlithographic optical system involves at least one contactless sensor which is based on the reception of electromagnetic radiation from the optical element. The radiation range captured by the sensor is varied for the purposes of ascertaining a temperature distribution in the optical element.

Insert coaxial thermal radiation image evaluating system

An insert coaxial thermal radiation image evaluating system includes a cage support, first lens, first cage movable frame, second cage movable frame, cage holder and light detector. The first cage movable frame is movably disposed at the cage support and connected to the first lens. The second cage movable frame is movably disposed at the cage support and connected to the light detector. The cage holder is connected to the cage support to fix the cage support to an optical substrate. The first cage movable frame is movably disposed in the cage holder. The first lens and a second lens of a metal additive manufacturing system together form a structure of conjugate foci, such that a thermal radiation generated from a high-power infrared laser irradiation zone forms according to a fixed ratio an image captured by the light detector.

High-resolution thermopile infrared sensor array

High-resolution thermopile infrared sensor array having a plurality of parallel signal processing channels for the signals of a sensor array and a digital port for serially emitting the signals. Each signal processing channel comprises at least one analog to digital converter and is assigned a memory for storing the results of the analog to digital converters. Power consumption of the infrared sensor array is reduced in the case of a sensor array with at least 16 rows and at least 16 columns, in that no more than 8 or 16 pixels are connected to a signal processing channel. The number of signal processing channels corresponds to at least 4 times the number of rows. Some of the signal processing channels are disposed in the intermediate space between the pixels and others are disposed in an outer edge region of the sensor chip surrounding the sensor array along with other electronics.