G01J5/0846

WAFER FAR EDGE TEMPERATURE MEASUREMENT SYSTEM WITH LAMP BANK ALIGNMENT
20220301906 · 2022-09-22 ·

A reactor system designed to provide accurate monitoring of wafer temperatures during deposition steps. The reactor system includes a pyrometer mounting assembly supporting and positioning three or more pyrometers (e.g., infrared (IR) pyrometers) relative to the reaction chamber to measure a center wafer temperature and an edge wafer temperature as well as reaction chamber temperature. The pyrometer mounting assembly provides a small spot size or temperature sensing area with the edge pyrometer to accurately measure edge wafer temperatures. A jig assembly, and installation method for each tool setup, is provided for use in achieving accurate alignment of the IR pyrometer sensing spot (and the edge pyrometer) relative to the wafer, when the pyrometer mounting assembly is mounted upon a lamp bank in the reactor system or in tool setup. The wafer edge temperature sensing with the reactor system assembled with proper alignment ensures accurate and repeatable measurement of wafer temperatures.

Connected monitoring system

A multi-zone monitoring system is disclosed. The system includes a plurality of sensor modules configured to monitor conditions in a plurality of detection zones. The sensor modules include a combination of detection devices configured to detect different conditions based on a designated zone of each sensor module. The system further includes a reporting device in communication with each of the sensor modules. The reporting device is configured to report the status of each of the detection zones based on indications communicated via the detection devices in the corresponding detection zone.

INFRARED TEMPERATURE SENSOR
20220113203 · 2022-04-14 ·

An infrared temperature sensor comprises a first communication port and a second communication port. A plurality of infrared temperature sensors can be cascaded to each other and connected to an external host controller through the second communication port. The external host controller can set up and administer the unique addresses of the plurality of the infrared temperature sensors through the second communication port, whereby to selectively perform multicasting communication or unicasting communication with the plurality of infrared temperature sensors through the first communication port. The infrared temperature sensor further comprises a second thermopile sensing element used to sense the thermal radiation of a package structure, whereby to compensate for the measurement error induced by temperature variation of the package structure. Thus, the measurement accuracy is increased.

Device attachment with dual band imaging sensor
11297264 · 2022-04-05 · ·

Various techniques are disclosed for providing a device attachment configured to releasably attach to and provide infrared imaging functionality to mobile phones or other portable electronic devices. The device attachment may include an infrared imagining module and a non-thermal imaging module that cooperate with one or more of a non-thermal imaging module in an attached device and a light source in the attached device for capturing and processing images.

TEMPERATURE CALIBRATION WITH BAND GAP ABSORPTION METHOD
20220082445 · 2022-03-17 ·

A method and apparatus for calibration non-contact temperature sensors within a process chamber are described herein. The calibration of the non-contact temperature sensors includes the utilization of a band edge detector to determine the band edge absorption wavelength of a substrate. The band edge detector is configured to measure the intensity of a range of wavelengths and determines the actual temperature of a substrate based off the band edge absorption wavelength and the material of the substrate. The calibration method is automated and does not require human intervention or disassembly of a process chamber for each calibration.

Automated sensing system for health detection
20220020149 · 2022-01-20 ·

A system and method for detecting medical conditions in individuals in crowded settings is described, including methods and approaches for addressing confounding issues such as variation due to external factors.

System and methods for detecting, confirming, classifying, and monitoring a fire
11151854 · 2021-10-19 · ·

One variation of a method for detecting a fire includes: during a first time period: detecting an increase in ambient light intensity and detecting an increase in ambient humidity; responsive to the increase in ambient light intensity and the increase in ambient humidity, detecting a fire event; during a second time period: correlating a decrease in ambient light intensity with an increase in visual obscuration; detecting an increase in ambient air temperature; in response to a magnitude of the increase in visual obscuration remaining below a high obscuration threshold and a magnitude of the increase in ambient temperature remaining below a high temperature threshold, classifying the fire as an incipient fire; and, in response to the magnitude of the increase in visual obscuration exceeding the high obscuration threshold and the magnitude of the increase in ambient temperature exceeding the high temperature threshold, classifying the fire as a developed fire.

COMBINED OPTICAL SYSTEM FOR DIMENSIONAL AND THERMAL MEASUREMENTS, AND OPERATING METHOD THEREOF
20210308792 · 2021-10-07 ·

A combined optical system for determining temperature of the surface of an object or material and its distance with respect to a predetermined reference point associated with the system includes an optical radiation source emitting optical probe radiation at a predetermined wavelength or in a predetermined wavelength range, a source control unit controlling switching of the source from an operative condition, in which it emits optical probe radiation, to an inoperative condition, in which it does not emit optical probe radiation, optical detectors acquiring scattered optical radiation and thermally emitted optical radiation from the surface of the object or material, and a processing unit determining the distance of the surface of the object/material based on scattered optical probe radiation when the source is operative, and the local temperature of the surface of the object/material on the basis of thermally emitted optical radiation when the source is inoperative.

Satellite onboard imaging systems and methods for space applications

Satellite onboard imaging systems having a look-down view and a toroidal view of the Earth are disclosed. In one embodiment, a satellite onboard imaging systems include an infrared sensing system and a controller. The infrared sensing system includes a first imager configured to have a first field of view that observes a look-down view of the Earth from a satellite and a second imager configured to have a second field of view that observes a toroidal view of the Earth centered at the satellite. The controller is coupled to the first imager and the second imager and operable to process image data from the first imager and the second imager. The controller is further operable to output indications of thermal energy of an identical, or different objects based on the first thermal image signal, the second thermal image signal, or both.

COST EFFECTIVE, MASS PRODUCIBLE SYSTEM FOR RAPID DETECTION OF FEVER CONDITIONS BASED ON THERMAL IMAGING
20210295517 · 2021-09-23 ·

Systems and methods based on thermal imaging for rapid detection of fever conditions in humans that provide for extremely inexpensive, mass producible, field deployable devices accurate in specific, relatively low temperature ranges, and in particular temperatures near nominal human body temperature. The system may include a thermal imager tailored for the application and a corresponding mass producible controlled temperature calibration source configured to provide real time calibration near the human body temperature of interest. The imager and source are deployed in a way such that target people and the calibration source will be within the imager FOV for fever detection. The combination of real time near measurement temperature calibration, with suitable thermography approaches, yield fast, accurate measurements in the fever range using low cost, easy-to-produce components. In combination with a visible imager and pattern/facial recognition techniques, detection of a human target's facial regions of interest suitable for fever detection can be accurately accomplished.