A temperature measuring apparatus for measuring a temperature of a substrate is described. A light emitting source that emits light signals such as laser pulses are applied to the substrate. A detector on the other side of the light emitting source receives the reflected laser pulses. The detector further receives emission signals associated with temperature or energy density that is radiated from the surface of the substrate. The temperature measuring apparatus determines the temperature of the substrate during a thermal process using the received laser pulses and the emission signals. To improve the signal to noise ratio of the reflected laser pulses, a polarizer may be used to polarize the laser pulses to have a S polarization. The angle in which the polarized laser pulses are applied towards the substrate may also be controlled to enhance the signal to noise ratio at the detector's end.

An infrared imaging system includes a detector configured to detect wavelengths in a first infrared wavelength band and a second infrared wavelength band, shorter than the first infrared wavelength band, a light source configured to output light in the second infrared wavelength band to an object, and an identify circuit configured to identify the object based on spectral characteristics of light returned from the object detected by the detector. The second infrared wavelength band is an extended short wavelength infrared band.

An inspection system for inspecting an interior of high temperature process equipment includes an infrared camera; a first wedge prism and a second wedge prism to be inserted into a port of the high temperature process equipment to view the interior; and an optical relay and relaying light output from the first and second wedge prisms to the infrared camera.

A water-mist-penetrating three-wavelength temperature measurement device and method for a high-temperature environment, the device including a housing, a three-waveband beam splitting detection module and a computing unit, the housing provided with an optical aperture, the three-waveband beam splitting detection module arranged in the housing, and including a trichroic prism, three radiation detection assemblies, the trichroic prism able to receive the light signals entering via the optical aperture, and emit radiation signals having different wavelength bands through three emission faces, respectively; the three radiation detection assemblies able to receive radiation signals having different wavelength bands emitted from corresponding emission faces, and convert them into electrical signals, respectively; the computing unit able to receive the electrical signals, and perform calculation and analysis to determine a temperature value of a target to be measured; the method including: temperature measurement data acquisition, data fusion, parameter tuning, and model application.

A temperature measuring apparatus for measuring a temperature of a substrate is described. A light emitting source that emits light signals such as laser pulses are applied to the substrate. A detector on the other side of the light emitting source receives the reflected laser pulses. The detector further receives emission signals associated with temperature or energy density that is radiated from the surface of the substrate. The temperature measuring apparatus determines the temperature of the substrate during a thermal process using the received laser pulses and the emission signals. To improve the signal to noise ratio of the reflected laser pulses, a polarizer may be used to polarize the laser pulses to have a S polarization. The angle in which the polarized laser pulses are applied towards the substrate may also be controlled to enhance the signal to noise ratio at the detector's end.

A method of forming an infrared detector includes defining an optical window in a cover substrate. Defining the optical window includes forming a multilayer interference filter or a periodic diffraction grating on an upper surface of the optical window and a periodic diffraction grating on the lower surface of the optical window. The method also includes performing anodic bonding of a spacer onto the cover substrate, transferring the cover substrate provided onto a base substrate, and hermetically bonding the spacer onto the base substrate.

A method for measuring by thermography a heating surface such as a metal surface, a ceramic surface in particular an electric heating plate includes a homogeneous layer with constant thickness of a coating material is deposited onto the surface to be measured, the surface is heated to a determined temperature; and a thermal image of the surface coated with the layer of coating material, heated, is captured using a thermal measurement apparatus, the coating material having an emissivity detectable at the determined temperature in the spectral range of the thermal measurement apparatus, the coating material having an emissivity higher than that of the surface in the spectral range of the thermal measurement apparatus.

A curved prism array applied to an infrared sensor wherein: the infrared sensor comprises at least an infrared sensing element which is used in detecting infrared signals within a solid-angled FOV and installed inside the curved prism array; the curved prism array has an incident focal plane and a plurality of emergent focal planes, both of which are not parallel with each other, such that infrared signals beyond the solid-angled FOV are received by the incident focal plane, refracted through one of the emergent focal planes and guided toward the infrared sensing element for expansion of the solid-angled FOV of the infrared sensing element.