Methods and apparatus for processing a substrate are provided. The apparatus, for example, can include a process chamber comprising a chamber body defining a processing volume and having a view port coupled to the chamber body; a substrate support disposed within the processing volume and having a support surface to support a substrate; and an infrared temperature sensor (IRTS) disposed outside the chamber body adjacent the view port to measure a temperature of the substrate when being processed in the processing volume, the IRTS movable relative to the view port for scanning the substrate through the view port.

Methods and apparatus for processing a substrate are provided. The apparatus, for example, can include a process chamber comprising a chamber body defining a processing volume and having a view port coupled to the chamber body; a substrate support disposed within the processing volume and having a support surface to support a substrate; and an infrared temperature sensor (IRTS) disposed outside the chamber body adjacent the view port to measure a temperature of the substrate when being processed in the processing volume, the IRTS movable relative to the view port for scanning the substrate through the view port.

An electromagnetic wave detection apparatus (10) includes a separation unit (16), first detector (17), propagation unit (18), second detector (20), and blocker (21). The separation unit (16) separates electromagnetic waves propagating in a first direction (d1) and propagates the electromagnetic waves in a second direction (d2) and a third direction (d3). The first detector (17) detects electromagnetic waves propagated in the second direction (d2). The propagation unit (18) includes pixels (px) along a reference surface (ss). The propagation unit (18) switches the propagation direction of electromagnetic waves propagated in the third direction (d3) and incident on the reference surface (ss) between a fourth direction (d4) and a fifth direction (d5) at each pixel (px). The second detector (20) detects the electromagnetic waves propagated in the fourth direction (d4). The blocker (21) blocks at least a portion of the electromagnetic waves propagated in the fifth direction (d5).

An optical module includes a base, a first optical component and at least two washers. The first optical component is disposed on the base and the first optical component has a flange. The washers are disposed on the first optical component and sandwiched in between the base and the flange. Each of the washers has a first side surface and a second side surface, wherein the first side surface and the second side surface tilt with respect to each other by an angle.

A method comprises capturing outputs of a VLC and an infrared array sensor (IAS). A memory includes a calibration based on a position of a laser pointer relative to the IAS. The method includes the laser pointer outputting a light beam to produce a laser dot on a target. The output of the VLC includes a representation of the laser dot. The output of the IAS includes values indicative of infrared radiation from the target. The method includes determining a temperature based on a portion of the values indicative of infrared radiation from the target. The portion of the values includes values associated with a portion of the target at which the laser dot is produced. The method includes displaying, on the display, the output of the VLC and the temperature. Displaying the output of the VLC includes displaying a visible light image showing the laser dot and at least a portion of the target.

A method includes capturing and scaling VLC and an IAS outputs to generate a scaled VLC output and a scaled thermal output (STO), aligning the scaled VLC output to the STO to generate an aligned image based on the scaled VLC output and the STO, determining alignment value(s) based on the aligned image, a laser pointer outputting a light beam to produce a laser dot on a target, and capturing a further output of the VLC. The method includes displaying the further output of the VLC (including a representation of the laser dot (RLD)), and an alignment marker, shifting the alignment marker and/or the RLD to a common position; determining coordinate(s) of the output of the IAS based on coordinate(s) of the further output of the VLC where the alignment marker and the RLD are shown at the common position; and storing the coordinate(s) of the output of the IAS.

An optical module includes a base, a first optical component and at least two washers. The first optical component is disposed on the base and the first optical component has a flange. The washers are disposed on the first optical component and sandwiched in between the base and the flange. Each of the washers has a first side surface and a second side surface, wherein the first side surface and the second side surface tilt with respect to each other by an angle.

Infrared imaging devices are provided which are configured to implement side-scan infrared imaging for, e.g., medical applications. For example, an imaging device includes a ring-shaped detector element comprising a circular array of infrared detectors configured to detect thermal infrared radiation, and a focusing element configured to focus incident infrared radiation towards the circular array of infrared detectors. The imaging device can be an ingestible imaging device (e.g., swallowable camera) or the imaging device can be implemented as part of an endoscope device, for example.

A sensor system for use in a gas turbine engine. The sensor system includes a reflective surface configured to reflect optical features corresponding to combustion in a combustion chamber that exit the combustion chamber via at least one opening therein. The sensor system further includes an optical sensor configured to receive the reflected optical features from the reflective surface.

Various techniques are disclosed for providing a device attachment configured to releasably attach to and provide infrared imaging functionality to mobile phones or other portable electronic devices. The device attachment may include an infrared imagining module and a non-thermal imaging module that cooperate with one or more of a non-thermal imaging module in an attached device and a light source in the attached device for capturing and processing images.