G01J5/22

Measurement circuit for bolometric detector

A measurement circuit for a resistive sensor comprises an integrator of information representative of the difference between a current passing through the sensor and a first reference current, and a circuit for making the output of the integrator depend on a reference level.

Bolometric detector with MIM structures of different dimensions

A bolometric detector of LWIR wavelengths, including: a substrate; a membrane suspended above the substrate by supporting elements; an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectric element positioned between the lower and upper metal elements; a thermometric element comprising at least one thermometric material; wherein: the membrane includes the upper metal element, the thermometric material and one portion of the dielectric element of each MIM structure, the upper metal elements of at least two MIM structure have different dimensions relatively to each other in the main plane of the membrane, and the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al.sub.2O.sub.3, AlN, TiO.sub.2.

Bolometric detector with MIM structures of different dimensions

A bolometric detector of LWIR wavelengths, including: a substrate; a membrane suspended above the substrate by supporting elements; an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectric element positioned between the lower and upper metal elements; a thermometric element comprising at least one thermometric material; wherein: the membrane includes the upper metal element, the thermometric material and one portion of the dielectric element of each MIM structure, the upper metal elements of at least two MIM structure have different dimensions relatively to each other in the main plane of the membrane, and the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al.sub.2O.sub.3, AlN, TiO.sub.2.

Thermistor element and electromagnetic wave sensor

A thermistor element includes a thermistor film, a first electrode provided in contact with one surface of the thermistor film, and a pair of second electrodes provided in contact with the other surface of the thermistor film, wherein the thermistor film includes an oxide having a spinel crystal structure and having a [111] preferred orientation in a film thickness direction.

Thermistor element and electromagnetic wave sensor

A thermistor element includes a thermistor film, a first electrode provided in contact with one surface of the thermistor film, and a pair of second electrodes provided in contact with the other surface of the thermistor film, wherein the thermistor film includes an oxide having a spinel crystal structure and having a [111] preferred orientation in a film thickness direction.

Electromagnetic wave sensor

An electromagnetic wave sensor that limits the influence on bolometer membranes that is caused by heat from a local heat source is provided. Electromagnetic wave sensor has first substrate, second substrate that faces first substrate so as to form inner space between first substrate and second substrate, wherein second substrate transmits infrared rays; a plurality of bolometer membranes that is provided in inner space and that is supported by second substrate; local heat source that is formed in first substrate; first electric connection member that connects first substrate to second substrate; and lead that extends on or in second substrate and that connects first electric connection member to bolometer membrane.

Electromagnetic wave sensor

An electromagnetic wave sensor that limits the influence on bolometer membranes that is caused by heat from a local heat source is provided. Electromagnetic wave sensor has first substrate, second substrate that faces first substrate so as to form inner space between first substrate and second substrate, wherein second substrate transmits infrared rays; a plurality of bolometer membranes that is provided in inner space and that is supported by second substrate; local heat source that is formed in first substrate; first electric connection member that connects first substrate to second substrate; and lead that extends on or in second substrate and that connects first electric connection member to bolometer membrane.

DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION COMPRISING A RAISED ELECTRICAL CONNECTION PAD

A device for detecting electromagnetic radiation, including a readout circuit, which is located in a substrate, and an electrical connection pad, which is placed on the substrate, including a metal section that is raised above the substrate and electrically connected to the readout circuit. The detection device furthermore includes a protection wall that extends under the raised metal section so as to define therewith at least one portion of a cavity, and what is called a reinforcing layer section that is located in the cavity and on which the raised metal section rests.

DEVICE FOR DETECTING ELECTROMAGNETIC RADIATION COMPRISING A RAISED ELECTRICAL CONNECTION PAD

A device for detecting electromagnetic radiation, including a readout circuit, which is located in a substrate, and an electrical connection pad, which is placed on the substrate, including a metal section that is raised above the substrate and electrically connected to the readout circuit. The detection device furthermore includes a protection wall that extends under the raised metal section so as to define therewith at least one portion of a cavity, and what is called a reinforcing layer section that is located in the cavity and on which the raised metal section rests.

SELF-ASSEMBLED NANOSTRUCTURE BOLOMETERS AND METHODS OF USE THEREOF

A variety of nanostructures are provided having a metal nanowire having a plurality of faces extending along a length of the nanowire, and a plurality of semiconductor nanorods forming two or more nanorod arrays, wherein each of the nanorod arrays is attached to a different surface of the nanowire. For example, in some embodiments, the nanostructure is a silver nanowire having a pentagonal cross section and five faces extending along the length of the nanowire, and metal oxide nanorods forming five nanorod arrays extending along each of the five faces of the silver nanowire. The nanostructures can demonstrate high temperature coefficients of resistance, and can be used in a variety of bolometric materials. In some embodiments, bolometric materials are provided including a plurality of the nanostructures deposited onto a surface of a substrate. Methods of making the nanostructures and bolometers are also provided.