A temperature sensing assembly includes a sheath defining an interior space, a first temperature sensor and a second temperature sensor. The first temperature sensor has first and second conductors extending within the interior space of the sheath and joined at a first junction point. The first conductor is constructed of a first material and the second conductor is constructed of a second material that is different than the second material. The second temperature sensor has third and fourth conductors extending within the interior space of the sheath and joined at a second junction point. The third conductor is constructed of a third material and the fourth conductor is constructed of a fourth material that is different than the fourth material. The first material is different than each of the third and fourth materials. The first junction point is adjacent to the second junction point.

There is provided a technique capable of easily improving accuracy of temperature measurement of a substrate, regardless of a film formation state of the substrate. There is provided a substrate processing apparatus including a substrate mounting table having a mounting surface on which a substrate is mounted, a heater configured to heat the substrate mounted on the mounting surface, and an elastically deformable temperature sensor whose leading end portion constitutes a temperature detection part. The temperature sensor is configured to extend from below the mounting surface to above the mounting surface, and the leading end portion protrudes from the mounting surface.

There is provided a technique capable of easily improving accuracy of temperature measurement of a substrate, regardless of a film formation state of the substrate. There is provided a substrate processing apparatus including a substrate mounting table having a mounting surface on which a substrate is mounted, a heater configured to heat the substrate mounted on the mounting surface, and an elastically deformable temperature sensor whose leading end portion constitutes a temperature detection part. The temperature sensor is configured to extend from below the mounting surface to above the mounting surface, and the leading end portion protrudes from the mounting surface.

Provided are a temperature sensor and a temperature measurement system capable of improving processability and assemblability. The temperature sensor (1) is a temperature sensor configured to measure a temperature of a resin (120) filling a die (110) in a resin molding device (100). The temperature sensor (1) includes a metal sheath (10) having a bottomed tubular shape, a pair of thermocouple element wires (20) accommodated in the metal sheath (10), and an insulator (30) provided around the pair of thermocouple element wires (20) in the metal sheath (10), and the temperature sensor (1) is a grounded sheath thermocouple including a tip as a temperature measuring contact for the resin (120). Further, the temperature sensor (1) further includes a housing (40) covering a periphery of a tip portion of the metal sheath (10), and a tip of the metal sheath (10) has a planar shape.

Provided are a temperature sensor and a temperature measurement system capable of improving processability and assemblability. The temperature sensor (1) is a temperature sensor configured to measure a temperature of a resin (120) filling a die (110) in a resin molding device (100). The temperature sensor (1) includes a metal sheath (10) having a bottomed tubular shape, a pair of thermocouple element wires (20) accommodated in the metal sheath (10), and an insulator (30) provided around the pair of thermocouple element wires (20) in the metal sheath (10), and the temperature sensor (1) is a grounded sheath thermocouple including a tip as a temperature measuring contact for the resin (120). Further, the temperature sensor (1) further includes a housing (40) covering a periphery of a tip portion of the metal sheath (10), and a tip of the metal sheath (10) has a planar shape.

A temperature sensing assembly includes a sheath defining an interior space, a first temperature sensor and a second temperature sensor. The first temperature sensor has first and second conductors extending within the interior space of the sheath and joined at a first junction point. The first conductor is constructed of a first material and the second conductor is constructed of a second material that is different than the second material. The second temperature sensor has third and fourth conductors extending within the interior space of the sheath and joined at a second junction point. The third conductor is constructed of a third material and the fourth conductor is constructed of a fourth material that is different than the fourth material. The first material is different than each of the third and fourth materials. The first junction point is adjacent to the second junction point.

A temperature sensing assembly includes a sheath defining an interior space, a first temperature sensor and a second temperature sensor. The first temperature sensor has first and second conductors extending within the interior space of the sheath and joined at a first junction point. The first conductor is constructed of a first material and the second conductor is constructed of a second material that is different than the second material. The second temperature sensor has third and fourth conductors extending within the interior space of the sheath and joined at a second junction point. The third conductor is constructed of a third material and the fourth conductor is constructed of a fourth material that is different than the fourth material. The first material is different than each of the third and fourth materials. The first junction point is adjacent to the second junction point.

A coaxial thermocouple includes a wire, an insulation layer surrounding the wire, a sheath surrounding the insulation layer, and an electrical junction formed between the wire and the sheath and at one longitudinal end of the coaxial thermocouple, the electrical junction including a swaged end with an outer diameter of the sheath reducing in diameter along a longitudinal length of the coaxial thermocouple until the sheath contacts the wire within the insulation layer. The wire includes a first material and the sheath includes a second material where the first material includes one of molybdenum (Mo) or niobium (Nb) and the second material includes the other of molybdenum (Mo) or niobium (Nb).

A coaxial thermocouple includes a wire, an insulation layer surrounding the wire, a sheath surrounding the insulation layer, and an electrical junction formed between the wire and the sheath and at one longitudinal end of the coaxial thermocouple, the electrical junction including a swaged end with an outer diameter of the sheath reducing in diameter along a longitudinal length of the coaxial thermocouple until the sheath contacts the wire within the insulation layer. The wire includes a first material and the sheath includes a second material where the first material includes one of molybdenum (Mo) or niobium (Nb) and the second material includes the other of molybdenum (Mo) or niobium (Nb).

A sheathed thermocouple includes thermocouple wires; a metal sheath accommodating the thermocouple wires; inorganic insulating material powder filled in an internal space of the metal sheath; a glass seal part tightly sealing an opening of the metal sheath while allowing the thermocouple wires to pass; compensation lead wires connected to the thermocouple wires; a metal sleeve having a cylindrical shape having a leading end part defining a connecting section connected with an outer peripheral surface of the metal sheath, and allowing a portion of the metal sheath closer to a proximal end than the connecting section, the thermocouple wires and the compensation lead wires to be in an internal space, the thermocouple wires and the compensation lead wires lying without contact between themselves; and a glass filler part made of a glass having a lower softening temperature than the glass seal part, and filling an internal space of the metal sleeve.