The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having a treating space; and a support unit configured to support and heat a substrate in the treating space, and wherein the support unit includes: at least one heating element for adjusting a temperature of the substrate; a power source for generating a power applied to at least one heating element; a power supply line for transmitting the power generated by the power source to the at least one heating element; a power return line for grounding the at least one heating element; and a current measuring resistor provided on the power supply line or the power return line and used for estimating a temperature of the at least one heating element.

The present invention provides a thermal sensor integrated IC having a resistor and a converting circuit. The resistor is implemented by at least one metal line, wherein a resistance of the resistor is varied with a temperature of the resistor, the resistor has a first terminal and a second terminal, and one of the first terminal and the second terminal is arranged to provide a voltage signal corresponding to the resistance. The converting circuit is coupled to the resistor, and is configured to convert the voltage signal to an output signal for determining the temperature. In one embodiment, the at least one metal line is made by copper.

A vehicle pane with a temperature sensor, includes a substrate and a transparent, electrically conductive coating on a surface of the substrate, wherein a temperature measuring field that is electrically isolated from the surrounding electrically conductive coating by a separating line is formed in the electrically conductive coating, a measurement current path running between two electrical contact points is formed from a region of the electrically conductive coating in the temperature measuring field, the electrical contact points can be connected to a voltage source such that an electric current flows through the measurement current path, and the electrical contact points can be connected to an analysis unit that is suitable for measuring the current strength of the electric current, determining the electrical resistance of the measurement current path therefrom, and determining the temperature from the electrical resistance using calibration data.

The invention comprises a thermal flow sensor for determining the temperature and the flow velocity of a flowing measuring medium, comprising: a functional element which is configured to determine the temperature of the measuring medium and to influence the temperature of the measuring medium; and a control and evaluation unit which is configured to determine the temperature of the measuring medium in a first interval of time by means of the functional element and to determine the flow velocity of the measuring medium in a second interval of time following the first interval of time, and a method for determining the temperature and the flow velocity of the measuring medium by means of the thermal flow sensor according to the invention, and a sensor system comprising such a thermal flow sensor and a further sensor type.

An object of the present invention is to enhance fault detection accuracy offered by a fault detection apparatus. A microcomputer reads a characteristic signal input thereto. The microcomputer compares a characteristic read from the characteristic signal with a previously established reference value. The previously established reference value represents a characteristic exhibited by a resistor that is connected with a temperature sensor circuit when the temperature sensor circuit operates normally. The microcomputer determines whether the characteristic exhibited by the resistor falls within a detection range. If it is determined that the characteristic falls with the detection range, the temperature sensor circuit is detected to be operational and information indicating that the temperature sensor circuit is operational is output to a host control apparatus. If it is determined that the detection range is exceeded, the temperature sensor circuit is detected to be faulty and information indicating that the temperature sensor circuit is faulty is output to the host control apparatus.

A case for an electronic cigarette vaporiser, the case including an automatic lifting mechanism that lifts the vaporiser up a few mm from the case to enable a user to easily grasp the vaporiser and withdraw it from the case. The lifting mechanism can be spring- based. The case both re-fills the vaporiser with liquid and also re-charges a battery in the vaporiser.

Implementations described herein generally relate to semiconductor manufacturing, and more specifically to a temperature measurement device. In one implementation, the temperature measurement device includes a substrate and a stack of metal layers coupled to the substrate. Each metal layer of the stack of metal layers extends continuously uninterrupted from edge to edge of the substrate. The first metal layer has a lower electrical resistivity than the second metal layers. The electrical resistivity of the stack is based on the electrical resistivity of the first metal layer, which is temperature dependent. Utilizing a known relationship between temperature measurements and resistivity measurements, the temperature measurement device can measure and store temperature information in various substrate processing processes.

A temperature sensor includes a substrate, a platinum resistor arranged on at least one surface of the substrate, a protective layer covering at least a portion of the platinum resistor and a cover layer covering at least a portion of the protective layer, the cover layer including Al2O3, SiO2 and Y2O3. The cover layer may also include B2O3. A conductive wire may be electrically connected to the platinum resistor. A glass ceramic may be covering at least a portion of the conductive wire, platinum resistor, protective layer and cover layer.

A voltage-glitch detection and protection circuit and method are provided. Generally, circuit includes a voltage-glitch-detection-block (GDB) and a system-reset-block coupled to the GDB to generate a reset-signal to cause devices in a chip including the circuit to be reset when a voltage-glitch in a supply voltage (VDD) is detected. The GDB includes a voltage-glitch-detector coupled to a latch. The voltage-glitch-detector detects the voltage-glitch and generates a PULSE to the system-reset-block and latch. The latch receives the PULSE and generates a PULSE_LATCHED signal to the system-reset-block to ensure the reset-signal is generated no matter a width of the PULSE. In one embodiment, the latch includes a filter and a sample and hold circuit to power the latch, and ensure the PULSE_LATCHED signal is coupled to the system-reset-block when a voltage to the GDB or to the latch drops below a minimum voltage due to the voltage-glitch.

A temperature sensor is disclosed that determines whether the temperature of an integrated circuit (IC) is within a normal temperature range. A low threshold monitor circuit senses whether the temperature of the IC is above or below a minimum temperature threshold. A high threshold monitor circuit configured senses whether the temperature of an integrated circuit (IC) is above or below a maximum temperature threshold. The minimum temperature threshold is determined by an intersection of a first temperature coefficient of resistance (TCR) and a second TCR that are associated with a first pair of conductive lines. The maximum temperature threshold is determined by an intersection of a third TCR and a fourth TCR associated that are with the second pair of conductive lines.