A multi-zone temperature control device and a multi-zone temperature control method are disclosed. The multi-zone temperature control device has multiple thermo-conductive reservoirs for accommodating a specimen, multiple temperature adjustment devices for adjusting temperatures of multiple adjustment blocks, a driving device, and a control device.

The control device executes multiple temperature control procedures at the same time. During the execution of each temperature control procedure, the present disclosure makes the adjustment blocks contact and leave the thermo-conductive reservoirs in the same zone, such that the thermo-conductive reservoirs reach the target temperatures of the temperature control procedure sequentially.

A compact, portable Raman spectrometer makes fast, sensitive standoff measurements at little to no risk of eye injury or igniting the materials being probed. This spectrometer uses differential Raman spectroscopy and ambient light measurements to measure point-and-shoot Raman signatures of dark or highly fluorescent materials at distances of 1 cm to 10 m or more. It scans the Raman pump beam(s) across the sample to reduce the risk of unduly heating or igniting the sample. Beam scanning also transforms the spectrometer into an instrument with a lower effective safety classification, reducing the risk of eye injury. The spectrometer's long standoff range automatic focusing make it easier to identify chemicals through clear and translucent obstacles, such as flow tubes, windows, and containers. And the spectrometer's components are light and small enough to be packaged in a handheld housing or housing suitable for a small robot to carry.

A compact, portable Raman spectrometer makes fast, sensitive standoff measurements at little to no risk of eye injury or igniting the materials being probed. This spectrometer uses differential Raman spectroscopy and ambient light measurements to measure point-and-shoot Raman signatures of dark or highly fluorescent materials at distances of 1 cm to 10 m or more. It scans the Raman pump beam(s) across the sample to reduce the risk of unduly heating or igniting the sample. Beam scanning also transforms the spectrometer into an instrument with a lower effective safety classification, reducing the risk of eye injury. The spectrometer's long standoff range automatic focusing make it easier to identify chemicals through clear and translucent obstacles, such as flow tubes, windows, and containers. And the spectrometer's components are light and small enough to be packaged in a handheld housing or housing suitable for a small robot to carry.

The present disclosure relates to a thermal-acoustic-vibration three-parameter integrated in-situ sensor and system with a high-temperature-resistant and high-pressure-resistant structure, and specifically relates to the field of sensors. The provided thermal-acoustic-vibration three-parameter integrated in-situ sensor with a high-temperature-resistant and high-pressure-resistant structure comprises a heat detection device, a sound detection device and a vibration detection device; and the sound detection device and the vibration detection device are distributed on two sides of the heat detection device. When heat, sound and vibration need to be detected, only spectra of light signals emitted by the heat detection device, the sound detection device and the vibration detection device need to be obtained, and heat information, sound information and vibration information to be detected are obtained through the corresponding relation between the spectra of the optical signals emitted by the heat detection device, the sound detection device and the vibration detection device and heat information, sound information and vibration information to be detected.

Apparatus and systems for temperature probe integration on pedestal heaters of a processing chamber including a cooling assembly for cooling temperature probes disposed within. Cooling assemblies can be actively water-cooled, passively cooled by fin stacks. Further cooling assemblies include a mechanical arm assembly for lowering or raising the temperature probes.

Examples of a optoelectronic transducer module with integrated signal processing for use in thermographic temperature measurement are disclosed. The module includes a light source, an optical element to couple the light to an optical port, a connector configured to connect the optoelectronic transducer module to a fiber optic sensor, a detector to detect an emitted light from the fiber optic sensor and convert the detected emitted light into an electrical signal and a module processing unit coupled to the light source and the detector configured to convert the electrical signal into a set of digital results. The optoelectronic module is in communication with an external processing unit using a high speed circuitry for data aggregation and a low speed circuitry for configuration and firmware upgrade in the module. The opto-electronic module is replaceable during operation to avoid big downtime.

Examples of a fiber optic temperature measuring system for measuring a temperature of a surface at multiple points simultaneously in real time is provided. The fiber optic temperature measuring system comprises a fiber optic probe with fiber bundle with plurality of individual fibers with thermographic phosphor at the fiber's tip and a high-speed camera. Invention allows accurate multipoint measurement of ESC' surface temperature. The thermographic phosphor is embedded in a nudge at the tip of each individual fibers or on the surface (under the surface) at predetermined positions.

A compact, portable Raman spectrometer makes fast, sensitive standoff measurements at little to no risk of eye injury or igniting the materials being probed. This spectrometer uses differential Raman spectroscopy and ambient light measurements to measure point-and-shoot Raman signatures of dark or highly fluorescent materials at distances of 1 cm to 10 m or more. It scans the Raman pump beam(s) across the sample to reduce the risk of unduly heating or igniting the sample. Beam scanning also transforms the spectrometer into an instrument with a lower effective safety classification, reducing the risk of eye injury. The spectrometer's long standoff range automatic focusing make it easier to identify chemicals through clear and translucent obstacles, such as flow tubes, windows, and containers. And the spectrometer's components are light and small enough to be packaged in a handheld housing or housing suitable for a small robot to carry.

A compact, portable Raman spectrometer makes fast, sensitive standoff measurements at little to no risk of eye injury or igniting the materials being probed. This spectrometer uses differential Raman spectroscopy and ambient light measurements to measure point-and-shoot Raman signatures of dark or highly fluorescent materials at distances of 1 cm to 10 m or more. It scans the Raman pump beam(s) across the sample to reduce the risk of unduly heating or igniting the sample. Beam scanning also transforms the spectrometer into an instrument with a lower effective safety classification, reducing the risk of eye injury. The spectrometer's long standoff range automatic focusing make it easier to identify chemicals through clear and translucent obstacles, such as flow tubes, windows, and containers. And the spectrometer's components are light and small enough to be packaged in a handheld housing or housing suitable for a small robot to carry.

Examples of a monolithic phosphor composite for measuring a parameter of an object are disclosed. The ceramic metal oxide phosphor composite is used in an optical device for measuring the parameter of the measuring object. The device comprises a fiber optic probe with a light guide, a light source operatively coupled to the fiber optic probe to provide excitation light into the light guide, a monolithic ceramic metal oxide phosphor composite functionally coupled to a tip of the fiber optic probe, a sensor operatively coupled to the fiber optic probe to detect the emitted light and a processing unit functionally coupled to the sensor to process the emitted light. The monolithic ceramic metal oxide phosphor composite can be embedded in a notch made into the object or can be adhered to a surface of the object with a binder. When the monolithic ceramic metal oxide phosphor composite is illuminated with the excitation light it emits light in a wavelength different from the excitation light and a change in emission intensity at a single wavelength or the change in intensity ratio of two or more wavelengths, a shift in emission wavelength peak or a decay time of the phosphor luminescence is a function of the measuring parameter.